### 博碩士論文 105521124 詳細資訊

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(Applications of Randomness and Homogeneity Test to Enhance the Systematic Error Resolution for Wafer Map Analysis)

 ★ E2T-iSEE:應用於事件與情感狀態轉移排程器之編輯 ★ “偶”:具情感之球型機器人 ★ 陣列區塊電容產生器於製程設計套件之評量 ★ 應用於數位家庭整合計畫影像傳輸子系統之設計考量與實現 ★ LED 背光模組靜電放電路徑 ★ 電阻串連式連續參考值產生器於製程設計套件之評量 ★ 短篇故事分類與敘述 ★ 延伸考慮製程參數相關性之類比電路階層式變異數分析器 ★ 以電子電路觀點對田口式惠斯登電橋模擬實例的再分析 ★ 應用於交換電容ΔΣ調變電路之電容排列良率自動化擺置平台 ★ 陣列MiM電容的自動化佈局 ★ 陣列MiM電容的平衡接點之通道繞線法 ★ 氣象資訊達人 ★ 嵌入式WHDVI多核心Forth微控制器之設計 ★ 應用於電容陣列區塊之維持比值良率的通道繞線法 ★ 使用於矽穿孔耦合分析之垂直十字鏈基板結構

After cutting into various shapes, we use the randomness and homogeneity test to test each wafer. In randomness test, the hypothesis test is used. If the alternative hypothesis is over-cluster, the null hypothesis is determined to use a one-tailed test. And, we will check whether B-Score is higher than the critical value 1.64 or not. If the alternative hypothesis is non-random, the null hypothesis is determined to use two-tailed tests. Then, check the absolute value of B-Score is higher than 1.96 or not. Finally, you can draw a gateway diagram and divide it into five blocks. In the homogeneity test, we choose the yield parameter to support us to analyze wafer. If the yield difference of wafer is higher than the threshold after doing partition, the wafer may have systematic error.
Different partition method is used to distinguish different failure types. For example, we change the radius of the donut partition wafer to detect the edge-ring failure type and the defect position. Then, the applications of randomness and homogeneity test is used for the wafer after doing partition. Finally, the results of the test are combined to enhance the systematic errors resolution, so as to improve the yield and reduce costs.

★ 隨機性錯誤
★ 系統性錯誤
★ 良率

★ Yield
★ Random errors
★ Systematic errors

ABSTRACT II

1-1 研究背景與動機 1
1-2 文獻探討 2
1-3 論文目標 3
1-4 論文架構 4

2-1 相關研究 5
2-2 迴力棒特徵圖 7
2-2-1 特徵參數NBD、NCL 8
2-2-2 特徵參數搜尋方式 8
2-2-3 特徵參數搜尋範例 9
2-2-4 損壞晶粒良率 YBD 11
2-3 迴力棒特徵圖共生效應 12
2-4 特徵參數 B-SCORE 13

3-1 隨機性檢測 14
3-2 分割晶圓圖隨機性檢測 15
3-2-1 甜甜圈分割隨機性檢測 14
3-2-2 中國錢分割隨機性檢測 14
3-2-2 半圓分割隨機性檢測 14
3-2-2 扇形分割隨機性檢測 20
3-3 均勻性檢測 21
3.4 分割晶圓圖均勻性檢測 21
3-2-1 甜甜圈分割均勻性檢測 21
3-2-2 中國錢分割均勻性檢測 22
3-2-2 半圓分割均勻性檢測 22
3-2-2 扇形分割均勻性檢測 22

4-1 甜甜圈分割真實晶圓檢測 23
4-2 中國錢分割真實晶圓檢測 26
4-3 半圓分割真實晶圓檢測 29
4-4 扇形分割真實晶圓檢測 31

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