博碩士論文 106232012 詳細資訊




以作者查詢圖書館館藏 以作者查詢臺灣博碩士 以作者查詢全國書目 勘誤回報 、線上人數:25 、訪客IP:3.239.192.241
姓名 莊天仁(Tien-Jen Chuang)  查詢紙本館藏   畢業系所 照明與顯示科技研究所
論文名稱 3-D曲面玻璃之鍍膜均勻性
(Coating uniformity of 3-D curved glass)
相關論文
★ 偏壓式磁控濺鍍法製作矽異質接面太陽能電池之研究★ 高功率脈衝磁控濺鍍技術鍍製高硬度光學多 層膜的研究
★ 膜堆光學導納量測儀★ 以奈米壓印改善陽極氧化鋁週期性
★ 含氫矽薄膜太陽電池材料之光電特性研究★ 自我複製結構膜光學性質之研究
★ 溫度及應力對高密度分波多工器(DWDM)濾光片中心波長飄移之研究★ 以射頻磁控濺鍍法鍍製P型和N型微晶矽薄膜之研究
★ 以奈米小球提升矽薄膜太陽能電池吸收之研究★ 定光電流量測法在氫化矽薄膜特性的研究
★ 動態干涉儀量測薄膜之光學常數★ 反應式濺鍍過渡態矽薄膜之研究
★ 光子晶體偏振分光鏡之設計與製作★ 偏壓對射頻濺鍍非晶矽太陽能薄膜特性之研究
★ 負折射率材料應用於抗反射與窄帶濾光片之設計★ 負電荷介質材料在矽晶太陽電池之研究
檔案 [Endnote RIS 格式]    [Bibtex 格式]    [相關文章]   [文章引用]   [完整記錄]   [館藏目錄]   至系統瀏覽論文 (2025-1-1以後開放)
摘要(中) 近年來隨著智慧型產品蓬勃發展,以3-D曲面型玻璃為顯示器的智慧型裝置逐漸成為趨勢,而在非平面物體上的光學薄膜製鍍過程會因為薄膜厚度的差異導致色差產生。本研究目的在對於3-D曲面玻璃探討光學薄膜分布,利用行星式旋轉基板支撐架並且使用電子束蒸鍍腔,分別蒸鍍Ta2O5與SiO2兩種材料,從蒸發源與基板的幾何關係及蒸發源發射特性來對膜厚分佈建立關係式,亦有不同傾斜角度所造成不同的均勻性變化,並找出較佳均勻性的傾斜角度,再利用關係式所的到結果進行模擬,並且沉積4層抗反射膜於3-D曲面玻璃,再藉由量測分析光譜穿透率。
摘要(英) In recent years, as the rapid development of smart devices, the applications of 3-D curved glass on display have become a trend gradually. The optical film deposited on the 3-D curved glass performs color differences due to the difference in the film thickness. The purpose of this research is to study the distribution of optical films on the 3-D curved glass. The electron beam evaporation coater was with a planetary rotating substrate holder used to deposit two materials, Ta2O5 and SiO2. From the geometric relationship between the evaporation source and the substrate holder, the film thickness distribution was calculated. The different inclined angles of the substrate angle were analyzed to achieve a better thin film uniformity. Finally, a 4-layer anti-reflected coating was deposited on the 3-D curved glass, and the spectral transmittance is with good uniformity.
關鍵字(中) ★ 電子束蒸鍍
★ 3-D曲面玻璃
★ 行星式式旋轉基板支撐架
★ 均勻性
★ 抗反射膜
關鍵字(英) ★ Electron beam evaporation coater
★ 3-D curved glass
★ Planetary rotating substrate holder
★ Uniformity
★ Anti-reflected coating
論文目次 摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vii
第一章 緒論 1
1-1 前言 1
1-2 研究動機與目的 3
第二章 理論分析 4
2-1 膜厚分布分析 4
2-1-1 點源膜厚理論 4
2-1-2 面源膜厚理論 6
2-2 各型旋轉基板支撐架推導 7
2-2-1 傾斜型平面旋轉基板支撐架 7
2-2-2 傾斜型行星式旋轉支撐架 11
2-2-3 基板傾斜面朝公轉中心型行星式旋轉支撐架 15
第三章 實驗儀器與方法 20
3-1 雙電子鎗蒸鍍設備與離子源輔助蒸鍍系統 20
3-2 光譜量測儀 21
3-3 3-D曲面玻璃曲率量測 22
3-4 實驗流程 23
3-5 實驗步驟 24
第四章 實驗結果與分析 26
4-1蒸發源發射特性 26
4-2 Ta2O5 膜厚分布之探討 27
4-2-1 Ta2O5蒸發源發射特性N值之實驗與模擬結果比較 27
4-2-2 Ta2O5行星式旋轉基板之單層膜實驗值與模擬值比較 30
4-3 SiO2 膜厚分布之探討 33
4-3-1 SiO2蒸發源發射特性N值之實驗與模擬結果比較 33
4-3-2 SiO2行星式旋轉基板之單層膜實驗值與模擬值比較 37
4-4 抗反射膜設計 40
4-5 四層抗反射膜設計與沉積結果 41
第五章 結論 53
參考文獻 54
參考文獻 [1] Kimi Lin.(2018). 3D display cover lens expected to grow strong in coming years. Retrieved from https://technology.ihs.com/605362/3d-display-cover-lens-expected-to-grow-strong-in-coming-years (December 16, 2019)
[2] Stacy Wu.(2017). Primary Automotive Display Systems Market Valued at $11.6 Billion Globally in 2017, Will Grow to Nearly $21 Billion in 2022, IHS Markit Says. Retrieved from https://technology.ihs.com/591895/primary-automotive-display-systems-market-valued-at-116-billion-globally-in-2017-will-grow-to-nearly-21-billion-in-2022-ihs-markit-says (December 16, 2019)
[3] J. B. Oliver and D. Talbot ,“Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system,” Appl. Opt. Vol. 45, No. 13 , pp.3097-3105 , May 2006
[4] J. B. Oliver, “Analysis of a planetary-rotation system for evaporated optical coatings,” Appl. Opt. Vol. 55, No. 30 , pp.8550-85555 , Oct. 2016
[5] J. B. Oliver, “ Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings,” Appl. Opt . Vol. 56, No. 5 , February 2017
[6] C. Guo, M. Kong, C. Liu, B. Li “Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system,” Appl. Opt. Vol. 52, No. 4 , February 2013
[7] 李正中,薄膜光學與鍍膜技術 , 藝軒圖書出版社第八版,pp.299 (2016).
[8] W. C. Herrmann Jr. “E-beam deposition characteristics of reactively evaporated Ta2O5 for optical interference coatings,” J. Vac. Sci. Technol., 18(3) , April 1981
[9] R. Prachachet, P. Buranasiri, M. Horprathum, P. Eiamchai, S.Limwichean, V. patthanasettakul, N.Nuntawong, P. Chindaudom, B. Samransuksamer, T. Lertvanithphol, “Investigation of optical characteristics of the evaporated Ta2O5 thin films based on ellipsometry and spectroscopy,” Materialstoday:proceedings ,Volume 4, Issue 5, part 2 , pp. 6365-6371 , 2017
[10]李正中,薄膜光學與鍍膜技術 , 藝軒圖書出版社第八版 ,pp.463-470 (2016).
[11] Winmate, Anti-Reflection & Anti-Glare Protection Glass Coating Technology, Retrieved from https://www.winmate.com/AR_AG_Coating_Glass.asp (December 16, 2019)
[12] H. A. Macleod, “Thin-Film Optical Filter,” Macmillan Publishing , pp.412~420 (1986).
[13]李正中,薄膜光學與鍍膜技術 , 藝軒圖書出版社第八版 ,pp.403-409 (2016).
[14]莊凱評, “光學薄膜厚度均勻性之研究”,pp.21(2000)
[15]李正中,薄膜光學與鍍膜技術 , 藝軒圖書出版社第八版 ,pp.338-344 (2016).
[16] J. B. Oliver “Impact of deposition-rate fluctuations on thin-film thickness and uniformity”, Optics Letters Vol. 41, No. 22, November 2016
指導教授 陳昇暉(Sheng-Hui Chen) 審核日期 2020-1-15
推文 facebook   plurk   twitter   funp   google   live   udn   HD   myshare   reddit   netvibes   friend   youpush   delicious   baidu   
網路書籤 Google bookmarks   del.icio.us   hemidemi   myshare   

若有論文相關問題,請聯絡國立中央大學圖書館推廣服務組 TEL:(03)422-7151轉57407,或E-mail聯絡  - 隱私權政策聲明