陰影疊紋式力-位移量測技術之研究

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姓名

徐英凱(Ying-Kai Hsu) 查詢紙本館藏

畢業系所

光機電工程研究所

論文名稱

陰影疊紋式力-位移量測技術之研究

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摘要(中)

近年來，機械手臂逐漸普及於人類生活，因此各項感測元件亦漸受重視。本論文提出了一種新的角度與力-位移即時測量技術。本技術以陰影疊紋原理為基礎，透過所設計的感測片表面結構，搭配疊紋相位移測量的4步相移法，可即時取得感測片上各點的位移資訊。本研究首先根據光柵週期、入射光角度與觀測角設計出具四階結構或斜面結構的感測片，並架設陰影疊紋系統進行位移、角度與力-位移的疊紋拍攝。再將取得的疊紋影像，以Matlab撰寫程式進行位移分析，以驗證此創新構想的可行性。最後，將誤差分析列入考量，討論可能造成預期結果與實驗結果不同之主因。
所提出的技術的優點包括:本技術可大幅減少信號線數目且對電磁波和振動的敏感性低，並且藉由感測片的設計，將傳統陰影疊紋的移相裝置去除。實驗結果顯示，本技術的位移量測系統精密度為6µm，並且可區別出0g~300g的力-位移，擁有10g的解析能力，在本文的最後探討了各種誤差來源。此系統應用層面廣，可架設於自動化工廠中的各類夾具上以即時回饋位移情形。

摘要(英)

In recent years, mechanical arms come into our life everywhere, such that many kinds of sensors have been developed. This thesis presents a new technique for angular and force-displacement measurement. We improve the traditional shadow moiré system by designing a target surface structure. Combine the 4-step phase shift method and the measurement of moiré shifting, we can obtain the displacement information of the target. Firstly, the targets with the fourth-order structure and the ramped structure are designed according to the effective grating pitch. The shadow moiré system is set up to measure the displacement, angular and force-displacement. The captured image of the moiré will be analyzed by Matlab to verify the feasibility of this innovative concept. Finally, the experimental results and the tolerances were analyzed and discussed.
The merits of the proposed technique consist of few signal wires and less susceptibility to electromagnetic waves and vibrations. The experimental results show that the proposed design has good relative relationship between the force and the displacement, leading to various applications, such as tactile sensors.

關鍵字(中)

★ 陰影疊紋
★ 位移量測
★ 力-位移量測

關鍵字(英)

★ Shadow moire
★ displacement measurement
★ force-displacement measurement

論文目次

摘要 I
Abstract II
致謝 III
目錄 IIIV
第一章緒論 1
1.1 研究背景 1
1.2 文獻回顧 3
1.2.1光學式觸覺感測器文獻回顧 3
1.2.2疊紋效應文獻回顧 6
1.3 研究目的 13
1.4 論文架構 14
第二章基礎理論 15
2.1疊紋效應 15
2.1.1疊紋量測基本原理 15
2.1.2疊紋位移理論 18
2.1.3疊紋縮放理論 19
2.2陰影疊紋原理 21
2.3等間距相移演算法 22
2.3.1三步相移理論 23
2.3.2四步相移理論 24
2.3.3 Carré相移理論 25
2.3.4五步相移理論 26
2.4 瞬時四步移相結構設計原理 27
2.5小結 29
第三章系統架構與模擬 30
3.1元件介紹 30
3.2 設計感測片 31
3.2.1 表面四階結構: 32
3.2.2 表面斜面結構: 33
3.3陰影疊紋系統 36
3.3.1 位移量測架構: 36
3.3.2角度量測系統: 37
3.3.3壓力量測系統: 38
3.3疊紋相位分析 38
3.3.1疊紋灰階標準化 39
3.3.2疊紋相位纏繞展開技術 39
3.3.3疊紋相位位移判斷流程 41
3.3.4疊紋旋轉與壓力計算 43
3.4陰影疊紋系統模擬 44
3.4.1位移量測模擬 44
3.4.2角度量測模擬 46
3.4.3壓力量測模擬 48
3.5小結 50
第四章實驗結果與討論 51
4.1 實驗架構設置與校正 51
4.1.1 雷射系統校正 51
4.1.2雷射測距儀 52
4.2 位移實驗結果 54
4.2.1單點往復位移 55
4.2.2固定步階位移 59
4.2.3整面往復位移 61
4.3 旋轉角度實驗結果 64
4.2.1固定旋轉角度中心點位移 64
4.2.2即時整面旋轉角度 66
4.4 壓力實驗結果 69
4.2.1不同負載表面形貌變化 69
4.4.2不同負載壓力量測 71
4.4.3不同位置受壓量測 72
4.4.4不同框架壓力量測 74
4.5 小結 75
第五章誤差分析 76
5.1 系統誤差 76
5.1.1入射光夾角影響 77
5.1.2 觀測角度影響 78
5.1.3 光源均勻度影響 80
5.1.4 光柵週期誤差 80
5.2隨機誤差 83
5.2.1環境雜訊 83
5.2.1溫度變化 84
5.3小結 85
第六章結論與未來展望 86
參考文獻 88

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指導教授

韋安琪

審核日期

2019-8-7

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