博碩士論文 106327029 詳細資訊




以作者查詢圖書館館藏 以作者查詢臺灣博碩士 以作者查詢全國書目 勘誤回報 、線上人數:8 、訪客IP:3.236.228.250
姓名 王騏宥(Chi-Yu Wang)  查詢紙本館藏   畢業系所 光機電工程研究所
論文名稱 波長調制共焦干涉術應用於厚度與折射率之量測
(Wavelength-modulated confocal interferometry for thickness and refractive index measurements)
相關論文
★ MOCVD晶圓表面溫度即時量測系統之開發★ MOCVD晶圓關鍵參數即時量測系統開發
★ 全場相位式表面電漿共振技術★ 波長調制外差式光柵干涉儀之研究
★ 攝像模組之影像品質評價系統★ 雷射修整之高速檢測-於修整TFT-LCD SHORTING BAR電路上之應用
★ 光強差動式表面電漿共振感測術之研究★ 準共光程外差光柵干涉術之研究
★ 波長調制外差散斑干涉術之研究★ 全場相位式表面電漿共振生醫感測器
★ 利用Pigtailed Laser Diode 光學讀寫頭在角度與位移量測之研究★ 複合式長行程精密定位平台之研究
★ 紅外波段分光之全像集光器應用★ 太陽光譜分光器之設計
★ 波長調制旋光外差干涉術應用於表面電漿共振偵測★ 疊紋自動對焦技術
檔案 [Endnote RIS 格式]    [Bibtex 格式]    [相關文章]   [文章引用]   [完整記錄]   [館藏目錄]   至系統瀏覽論文 (2021-8-8以後開放)
摘要(中) 本論文開發一套,可同時量測物體厚度及折射率之量測系統,應用於檢測窗鏡片加工製程、生物醫學檢測及透鏡的厚度與折射率量測等。本論文系統架構為波長調制共焦干涉儀(WMCI),本系統相較於傳統的共焦顯微鏡系統或是干涉儀系統,之間的差異為傳統的共焦顯微鏡系統及干涉儀,皆需已知物體厚度或折射率其中一個參數,才能量測出另一個參數,而波長調制共焦干涉儀可藉由本系統的核心數學模型,同時求出厚度與折射率。
本系統基於共焦顯微鏡及波長調制干涉術之原理,建立一套全新的數學模型,藉由共焦及干涉所量測到的兩個厚度參數,可以解出物體的真實厚度及折射率。以市售雷射窗鏡為待測樣品,作為本系統的量測能力測試,分別量測兩種不同厚度以及三種不同折射率的物體,並與游標卡尺及廠商表訂規格做比較。實驗結果顯示,厚度量測範圍能達到毫米等級,厚度量測解析度為5 μm;折射率量測解析度為0.0045。本系統搭配電控位移平台,以自行開發的系統控制與訊號處理程式,可達到自動化量測,對於精密機械加工、產品製程及生物醫學上有極大的潛力。
摘要(英) This study develops a measuring system that can measure the thickness and refractive index of an object simultaneously. It can be applied to inspect the manufacturing process of window lens, biomedical detection, lens thickness and refractive index measurement. The system’s architecture is a wavelength-modulated confocal interference system. The difference is that the conventional confocal microscope system and the interferometer system need to first know either the thickness or refraction of the object in order to obtain the other parameter. And the wavelength-modulated confocal interference system can measure two parameters at the same time by the core mathematical model of this system.
Based on the principle of confocal microscope and wavelength modulation interferometry, this system establishes a new mathematical model. The two thickness parameters measured by confocal and interference can solve the true thickness and refractive index of the object. The commercially available laser window mirror is used as the test object to examine the measurement capability of the system, two different thickness and three different refractive index objects are measured separately. And compared with the digital caliper and the manufacturer′s specification, the experimental results show that the thickness measurement range can reach millimeter level. And the thickness measurement’s resolution is 5 μm. The refractive index measurement’s resolution is 0.0045. This system is equipped with an electronically controlled displacement platform. With self-developed control program and signal processing, the system can achieve automated measurement. The system has great potential for precision measurement, product process and biomedicine.
關鍵字(中) ★ 共焦顯微術
★ 波長調制干涉術
★ 波長調制共焦干涉術
★ 厚度與折射率量測
關鍵字(英) ★ confocal microscope
★ wavelength modulation interferometry
★ wavelength modulated confocal interferometry
★ thickness and refractive index measurement
論文目次 摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VII
表目錄 X
第一章 緒論 1
1-1 研究背景 1
1-2 文獻回顧 2
1-2-1 共焦顯微術 3
1-2-2 光學干涉術 6
1-2-3 折射率與厚度同時量測 8
1-3 研究動機與目的 10
1-4 論文架構 11
第二章 系統原理 12
2-1 共焦顯微術 12
2-1-1 光學顯微鏡系統原理 13
2-1-2 光學繞射理論與顯微鏡系統橫向解析度 14
2-1-3共焦顯微術原理 19
2-2 外差干涉術 26
2-3 波長調制干涉術 27
2-3-1 雷射二極體 27
2-3-2 波長調制干涉術 29
2-4 共焦干涉術之數學模型 33
2-4-1 共焦顯微術之物體厚度量測 33
2-4-2 干涉術之物體厚度量測 35
2-4-3 共焦干涉術之厚度與折射率量測 36
2.5 小結 37
第三章 系統架構 38
3-1 波長調制共焦干涉術系統元件 38
3-2 波長調制共焦干涉術系統架構 40
3-2-1 光學共焦顯微鏡系統 41
3-2-2 波長調制共焦干涉術 45
3-3 光學頻率同調掃描(Optical frequency coherence scanning) 48
3-4 系統程式與人機介面 56
3-5 小結 57
第四章 實驗結果與討論 58
4-1 量測樣品與輔助工具 58
4-1-1 量測輔助工具 58
4-1-2 量測樣品規格 59
4-2 平板量測實驗 60
4-2-1 BK7-1 mm平板量測 60
4-2-2 BK7-2 mm平板量測 63
4-2-3 B270-2 mm平板量測 66
4-2-4 KBr-2 mm平板量測 69
4-2-5 實驗結果分析 72
4-3 系統性能分析 74
4-3-1 量測解析度 74
4-3-2 系統量測範圍 77
4-3-3 量測時間與其改善方法 78
4-4 小節 78
第五章 誤差分析 79
5-1 系統誤差 79
5-1-1 雷射光非平行光入射 79
5-1-2 電控位移平台定位控制誤差 81
5-1-3系統架構餘弦誤差 83
5-2 隨機誤差 84
5-2-1 環境溫度 84
5-2-2 環境擾動及機械振動 85
5-2-3 電子雜訊 85
5-3 小結 85
第六章 結論與未來展望 86
6-1 結論 86
6-2 未來展望 86
參考文獻 87
參考文獻 [1] Z. Tian, S. S-H. Yam, and H. P. Loock, “Refractive index sensor based on an abrupt taper Michelson interferometer in a single-mode fiber,” Opt. Lett. 33, 1105-1107 (2008).
[2] R. G. Heideman, R. P. H. Kooyman, and J. Greve, “Performance of a highly sensitive optical waveguide Mach-Zehnder interferometer immunosensor,” Sensors and Actuators B: Chemical, 209-217 (1993).
[3] D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical Coherence Tomography,” Science, 254(5035), 1178-1181 (1991).
[4] 李浩瑋,「結合數位微鏡晶片之全域式彩色共焦顯微量測系統研發」,國立臺北科技大學,碩士論文,民國100年。
[5] A. Miks, J. Novak, and P. Novak, “Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor,” Appl. Optics, 49(17), 3259-3264 (2010).
[6] T. Boettcher, M. Gronle, and W. Osten, “Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT),” Opt. Express 25, 10204-10213 (2017).
[7] X. Wang, C. Zhang, L. Zhang, L. Xue, and J. G. Tian, “Simultaneous refractive index and thickness measurements of bio-tissue by optical coherence tomography,” J. Biomed. Opt. 7(4) (2002).
[8] T. Tanaami, S. Otsuki, N. Tomosada, Y. Kosugi, M. Shimizu, and H. Ishida, “High-speed 1-frame/ms scanning confocal microscope with a microlens and Nipkow disks,” Appl. Optics, 41(22), 4704-4708 (2002).
[9] A. R. Rouse, H. Makhlouf, A. A. Tanbakuchi, and A. F. Gmitro, “A multipoint scanner for high frame rate confocal microendoscopy,” Proc. SPIE, 7558, 755809-1 (2010).
[10] A. Miks, J. Novak, and P. Novak, “Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor,” Appl. Optics, 49(17), 3259-3264 (2010).
[11] H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18, 9429-9434 (2010).
[12] M. H. Chiu, J. Y. Lee, and D. C. Su, “Refractive-index measurement based on the effects of total internal reflection and the uses of heterodyne interferometry,” Appl. Opt. 36, 2936-2939 (1997).
[13] M. Born, and E. Wolf, “Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (7th Edition),” Cambridge University Press. (1999).
[14] T. Boettcher, M. Gronle, and W. Osten, “Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT),” Opt. Express 25, 10204-10213 (2017).
[15] C. S. Liu, T. Y. Wang, and Y. T. Chen, “Novel system for simultaneously measuring the thickness and refractive index of a transparent plate with two optical paths,” Applied Physics B. 124. 10.1007/s00340-018-7052-4 (2018).
[16] 趙凱華、鐘錫華,光學,儒林圖書 (1992)。
[17] M. Born, and E. Wolf, “Principles of Optics,” Ch. 7, 8 (2011).
[18] 朱士維,「光學顯微技術的新進展」,台大物理系系刊,76-81 (2008)。
[19] T. Wilson1, and A. R. Carlini, “Size of the detector in confocal imaging systems,” Opt. Lett., 12(4), 227-229 (1987).
[20] Rayleigh criterion,
取自 http://hyperphysics.phy-astr.gsu.edu/hbase/phyopt/Raylei.html。
[21] 傳統光學顯微鏡與共焦顯微鏡所觀察的影像圖,
取自 http://abrc.sinica.edu.tw/icm/app_out/main/theorem.php。
[22] Z Stack,
取自 https://cam.facilities.northwestern.edu/588-2/z-stack/。
[23] 陳柏菁,「共焦顯微術系統之設計與裝置」,國立台灣大學,碩士論文,民國91年。
[24] Scanning and resolution,
取自 https://myscope.training/legacy/confocal/confocal/image/resolution.php。
[25] C. C. Wu, C. C. Hsu, J. Y. Lee, H. Y. Chen, and C. L. Dai, “Optical heterodyne laser encoder with sub-nanometer resolution,” Meas. Sci. Technol, 19, 045305 (2008).
[26] 丁勝懋,雷射工程導論,中央圖書出版社,台北市,台灣 (1995)。
[27] 雷射二極體規格圖,
取自 https://www.thorlabs.com/thorproduct.cfm?partnumber=HL6544FM。
[28] R. Onodera, and Y. Ishii, “Phase-shift-locked interferometer with a avelength-modulated laser diode,” Appl. Opt., 24, No.1, 91-96 (2003).
[29] M. H. Chiu, J. Y. Lee, and D. C. Su, “Refractive index measurement based on the effects of the total internal refraction and the uses of the heterodyne interferometry,” Appl. Opt., 36, 2936-2939 (1997).
[30] D. C. Su, J. Y. Lee, and M. H. Chiu, “New type of liquid refractometer,” Opt. Eng., 37, 2795-2797 (1998).
[31] J. Y. Lee, and D. C. Su, “A method for measuring Brewster’s angle by circularly polarized heterodyne interferometry,” J. Opt., 29, 349-353 (1998).
[32] 待測樣品元件規格表,
取自 https://www.edmundoptics.com.sg/。
[33] 方承彥等人,量測不確定度與統計概念研討會,財團法人工業技術研究院量測技術發展中心 (報告編號:0790-CB036),未出版 (2001)。
指導教授 李朱育(Ju-Yi Lee) 審核日期 2019-8-13
推文 facebook   plurk   twitter   funp   google   live   udn   HD   myshare   reddit   netvibes   friend   youpush   delicious   baidu   
網路書籤 Google bookmarks   del.icio.us   hemidemi   myshare   

若有論文相關問題,請聯絡國立中央大學圖書館推廣服務組 TEL:(03)422-7151轉57407,或E-mail聯絡  - 隱私權政策聲明