氮化銦鎵表面增強拉曼散射的製程優化

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姓名

胡道睿(Tao-Jui Hu) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

氮化銦鎵表面增強拉曼散射的製程優化
(Process optimization of InGaN-based surface-enhanced Raman scattering)

相關論文

★ 基於氮化銦鎵表面增強拉曼散射的 DNA檢測	★ DNA detection by Al-decorated nitride SERS substrate
★ 表面電荷密度對氮化銦鎵表面增強拉曼散射的影響	★ 生長奈米結構InGaN量子井用於表面增強拉曼散射
★ 氮化物表面增強拉曼光譜單分子檢測	★ 氮化銦鎵量子井銦含量對表面增強拉曼散射強度的影響

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摘要(中)

表面增強拉曼散射(surface enhanced Raman scattering, SERS)可大幅提升分子的拉曼散射訊號，已逐漸成為分子診斷的有效工具。在本研究中，我們以鍍金(Au)奈米顆粒的氮化銦鎵(InGaN)微米量子井，作為新型的SERS基板，並以此檢測單股去氧核醣核酸(single-stranded deoxyribonucleic acid, ssDNA)及葡萄糖(glucose)。透過製程上的優化，包括金屬厚度、包覆層厚度、氫氣的蝕刻、退火溫度，來增強分子的SERS訊號。這些製程條件的優化，是為了提升基板表面的局部表面電漿共振(localized surface plasmon resonance, LSPR)和電荷轉移共振(charge transfer resonance, CTR)的強度。我們發現以厚度50nm的金、300℃的退火溫度來製作金奈米顆粒，可以得到最佳檢測效果，以此條件製程的InGaN SERS基板，可檢測濃度低至10-4 M的ssDNA和1 g/L的glucose。

摘要(英)

Surface enhanced Raman scattering (SERS) can greatly enhance the Raman scattering signal of molecules, and has gradually become an effective tool for molecular diagnosis. In this study, we used indium gallium nitride (InGaN) quantum wells covered with gold (Au) nanoparticles as a new SERS substrate, and used this to detect single-stranded deoxyribonucleic acid (ssDNA) and glucose. Through optimization of the process, including metal thickness and annealing temperature, we aim to enhance SERS signal of the molecular. The optimization is to promote localized surface plasmon resonance (LSPR) and charge transfer resonance (CTR) on the SERS substrate. We found that the nanoparticles fabricated with 50 nm-thick gold and 300 ℃ annealing temperature produced the highest sensitivity. With these conditions, we were able to detect ssDNA and glucose with the concentrations down to 10-4 M and 1 g/L, respectively.

關鍵字(中)

★ 拉曼散射

關鍵字(英)

★ Raman scattering

論文目次

論文摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 V
第一章、緒論 1
1.1表面增強拉曼散射的源起與發展 1
1.2氮化銦鎵量子井應用於表面增強拉曼散射的優勢 3
1.3研究動機與章節架構 5
第二章、實驗原理、方法與儀器 7
2.1表面增強拉曼散射的原理 7
2.2製成步驟與設備 14
2.3磊晶結構 19
2.4拉曼光譜儀的量測原理與架構 21
第三章、分析與討論 22
3.1氮化銦鎵量子井對SERS的影響 22
3.2金屬厚度對SERS的影響 25
3.3包覆層(Cap layer)厚度對SERS的影響 28
3.4氫氣蝕刻對SERS的影響 31
3.5退火溫度對SERS的影響 34
3.6基板的檢測極限 37
3.7雷射波長對SERS的影響 39
第四章、結論與未來發展 41
4.1結論 41
4.2未來發展 42
參考文獻 43

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指導教授

賴昆佑簡汎清

審核日期

2020-7-24

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