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姓名 陳緯峻(Wei-Chun Chen) 查詢紙本館藏 畢業系所 光電科學與工程學系 論文名稱 Shack-Hartmann波前檢測器與雷射菲佐式干涉儀在大型鏡面量測領域量測的應用比較
(The Comparison between the High Dynamic Range Shack-Hartmann Wavefront Sensor and the Fizeau Interferometer in Large Optics Testing Application)相關論文 檔案 [Endnote RIS 格式]
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至系統瀏覽論文 (2025-8-1以後開放)
摘要(中) 在大型精密光學系統檢測中，常使用干涉儀作檢測工具，利用參考光與待測光的光程差（Optical Path Difference, OPD）產生干涉條紋，並以其干涉條紋變化量來重建波前並分析樣待測系統資訊。另一種量測方法為波前量測，其Shack-Hartmann波前檢測器即為其中一種，紀錄參考光與待測光通過微透鏡陣列聚焦到感光元件上的光點位置，計算兩者的位移量即可得到該透鏡所擷取到的波前斜率，並以此重建待測波前分析像差。
儘管干涉儀以高量測精度聞名，且因Shack-Hartmann波前檢測器量測空間解析度受微透鏡陣列所限制，故干涉儀空間解析度也比Shack-Hartmann波前檢測器優良許多，但因其本身體型巨大以及較低的動態範圍限制，在某些大型光學系統量測中並不適用，且在實際使用上，依照不同的待測元件，干涉儀需更換不同的標準鏡以匹配該元件，若待測元件為雙曲面或橢圓面等非球面鏡，還須搭配Null Optics才能量測，在使用彈性及方便度這方面Shack-Hartmann波前檢測器更勝一籌。
因此，為評估Shack-Hartmann波前檢測器應用於中大型光學系統檢測之可行性，本論文利用本實驗室開發的高動態範圍Shack-Hartmann波前檢測器量測中大型光學鏡片及已光機整合之光學系統，並利用相機曝光控制達到高動範圍取像，並將其重建波前資料與Fizeau干涉儀H2000比對，也額外量測商業鏡頭並以重建波前輸出全域MTF，並與MTF儀作性能比較。摘要(英) In the detection of medium and large optical systems, two of the most representative measuring devices are the interferometer and Shack-Hartmann wavefront sensor. The interferometer works by merging two or more sources of light to create an interference pattern for accessing information of the optical system by analysis the pattern. The Shack-Hartmann wavefront sensor (SHWFS) is a simple yet effective device to measure the optical wavefront. SHWFS can record the spot locations which cause by the reference wavefront and aberration wavefront passing through the micro lens array (MLA), respectively. It relies on the difference between the two locations to analyze the optical aberration.
Even though the interferometer is well known for its superior precision and the resolution is more pronounced than SHWFS, it is applicable to limited situation due to its large shape and lower dynamic range.
Thus, we use SHWFS combined high dynamic range technique (HDR-SHWFS) to measure medium and large optical systems like large concave mirror and collimator system and compare these data with interferometer. In this study, we also measure the aspherical lens which is unmeasurable through interferometer, and we compare the data with the simulator. At last, we measure the full frequency MTF of some business lens and compare with the MTF measurement equipment.關鍵字(中) ★ 高動態範圍
★ Shack-Hartamnn波前檢測器
★ 光學檢測關鍵字(英) ★ High Dynamic Range
★ Shack-Hartamnn Wavefront Sensor
★ Optical Testing論文目次 中文摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 viii
一、緒論 1
1-1 研究背景 1
1-2 文獻回顧 2
1-3 研究動機 3
二、研究內容與方法 4
2-1 光學像差理論 4
2-1-1 單色像差 5
2-1-2 Seidel多項式 6
2-1-3 Zernike多項式 8
2-2 Shack-Hartmann波前檢測器 10
2-2-1 原理介紹 10
2-2-2 高動態範圍Shack-Hartmann波前檢測器 11
2-2-3 點指派（Spot Assignment）12
2-2-4 光點質心運算 14
2-2-5 點光源位置量測 15
2-2-6 波前重建 16
2-2-7 重建波前轉換全域MTF 17
三、實驗方法 20
3-1 實驗目的 20
3-2 硬體架構 21
3-3 球面參考波前建立 23
3-4 光學系統校正評估 26
3-5 自動化高動態範圍量測 29
四、實驗結果與分析 35
4-1 HDR-SHWFS於大型球面鏡量測 35
4-1-1垂直量測 35
4-1-2水平量測 39
4-2 HDR-SHWFS於準直儀量測 43
4-3 HDR-SHWFS非球面鏡量測 45
4-4 HDR-SHWFS全頻域MTF量測 49
4-5 HDR-SHWFS自動化量測介面 56
4-5-1 使用者介面設計 56
4-5-2 程式流程 58
五、結論 60
參考文獻 61參考文獻 ［1］. Bruning, J.H., et al., "Digital wavefront measuring interferometer for testing optical surfaces and lenses". Applied optics. 13(11), p. 2693-2703, 1974.
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［5］. Platt, B.C. and R. Shack, "History and principles of Shack-Hartmann wavefront sensing". Journal of refractive surgery. 17(5), p. S573-S577, 2001.
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［7］. Ares, J., T. Mancebo, and S. Bara, "Position and displacement sensing with Shack–Hartmann wave-front sensors". Applied Optics. 39(10), p. 1511-1520, 2000.
［8］. Yoon, G.Y., et al., "Shack Hartmann wave-front measurement with a large F-number plastic microlens array". Applied optics. 35(1), p. 188-192, 1996.
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［10］. Wyant, J.C. and K. Creath, "Basic wavefront aberration theory for optical metrology". Applied optics and optical engineering. 11(part 2), p. 28-39, 1992.
［11］. Groening, S., et al., "Wave-front reconstruction with a Shack–Hartmann sensor with an iterative spline fitting method". Applied optics. 39(4), p. 561-567, 2000.
［12］. 潘淑芳, "A Similarity-Guided Spots Sorting Method to Increase the Dynamic Range of a Shack Hartmann Sensor", 國立中央大學，碩士論文, 民國102年.
［13］. Jiang, Z., S. Gong, and Y. Dai, "Monte-Carlo analysis of centroid detected accuracy for wavefront sensor". Optics & Laser Technology. 37(7), p. 541-546, 2005.
［14］. Vyas, A., M. Roopashree, and B. Prasad, "Optimization of existing centroiding algorithms for Shack Hartmann sensor". arXiv preprint arXiv:0908.4328, 2009.
［15］. Nightingale, A.M. and S.V.J.O.E. Gordeyev, "Shack-Hartmann wavefront sensor image analysis: a comparison of centroiding methods and image-processing techniques". 52(7), p. 071413, 2013.
［16］. Southwell, W.H., "Wave-front estimation from wave-front slope measurements". JOSA. 70(8), p. 998-1006, 1980.
［17］. Goodman, J.W., Introduction to Fourier optics. Roberts and Company Publishers. p. 127-167. 2005.指導教授 梁肇文(Chao-Wen Liang) 審核日期 2020-7-28 推文 plurk
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