參考文獻 |
[1] Chen, X.H., et al., "Fabrication and characterization of metallic glasses with a specific microstructure for micro-electro-mechanical system applications". Journal of Non-Crystalline Solids, 354(28): pp. 3308-3316, 2008.
[2] Kagaya, K., Y. Ōishi, and K. Yada, "Micro-electrodischarge machining using water as a working fluid—I: micro-hole drilling". Precision Engineering, 8(3): pp. 157-162, 1986.
[3] Ehrfeld, W. and H. Lehr, "Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics". Radiation Physics and Chemistry, 45(3): pp. 349-365, 1995.
[4] Sun, X.-Q., T. Masuzawa, and M. Fujino, "Micro ultrasonic machining and its applications in MEMS". Sensors and Actuators A: Physical, 57(2): pp. 159-164, 1996.
[5] Choi, S.S., et al., "Fabrication of microelectron gun arrays using laser micromachining". Microelectronic engineering, 41: pp. 167-170, 1998.
[6] Kupka, R., et al., "Microfabrication: LIGA-X and applications". Applied Surface Science, 164(1-4): pp. 97-110, 2000.
[7] KUO, C.-L.; MASUZAWA, T.; FUJINO, M. "A micropipe fabrication process". IEEE Micro Electro Mechanical Systems, pp. 80-85, 1991.
[8] Wang, A.C., et al., "Use of micro ultrasonic vibration lapping to enhance the precision of microholes drilled by micro electro-discharge machining". International Journal of Machine Tools and Manufacture, 42(8): pp. 915-923, 2002.
[9] Yang, C., S. Ho, and B.H. Yan. "Micro hole machining of borosilicate glass through electrochemical discharge machining (ECDM)". Key Engineering Materials, 190: pp. 149-166, 2001.
[10] T.Masuzawa, M.Yamamoto and M.Fujino, “A Micropunching System Using Wire-EDM”, Proc. Of Int’l Symposium for Electromachining(ISME-9), pp.86-89, 1989.
[11] T. Masuzawa, “An Approach to Micromachining through Machine Tool Technology”, Annals of the CIRP, 34, 1, pp. 419-425, 1985.
[12] Sheu, D.-Y., "Multi-spherical probe machining by EDM: Combining WEDG technology with one-pulse electro-discharge". Journal of materials processing technology, 149(1-3): pp. 597-603, 2004.
[13] SHEU, D.-Y., "Micro-spherical probes machining by EDM". Journal of micromechanics and microengineering, 15(1): pp. 185-189, 2005.
[14] Hou, K., et al., "The wear behaviour of electro-codeposited Ni–SiC composites". Wear, 253(9-10): pp. 994-1003, 2002.
[15] Liew, P.J., J. Yan, and T. Kuriyagawa, "Fabrication of deep micro-holes in reaction-bonded SiC by ultrasonic cavitation assisted micro-EDM". International Journal of Machine Tools and Manufacture, 76: pp. 13-20, 2014.
[16] Dong, S., Z. Wang, and Y. Wang, "Micro-EDM drilling of high aspect ratio micro-holes and in situ surface improvement in C17200 beryllium copper alloy". Journal of Alloys and Compounds, 727: pp. 1157-1164, 2017.
[17] Saxena, K.K., et al., "Characterization of circumferential surface roughness of micro-EDMed holes using replica technology". Procedia CIRP, 68: pp. 582-587, 2018.
[18] Wang, D., et al., "A study on micro-hole machining of polycrystalline diamond by micro-electrical discharge machining". Journal of Materials Processing Technology, 211(1): pp. 3-11, 2011.
[19] Li, G., W. Natsu, and Z. Yu, "Study on quantitative estimation of bubble behavior in micro hole drilling with EDM". International Journal of Machine Tools and Manufacture, 146: pp. 103437, 2019.
[20] Natsu, W. and H. Maeda, "Realization of High-speed Micro EDM for High-aspect-Ratio Micro Hole with Mist Nozzle". Procedia CIRP, 68: pp. 575-577, 2018.
[21] Dong, S., et al., "An Experimental Investigation of Enhancement Surface Quality of Micro-holes for Be-Cu Alloys Using Micro-EDM with Multi-diameter Electrode and Different Dielectrics". Procedia CIRP, 42: pp. 257-262, 2016.
[22] Yu, Z.Y., et al., "High aspect ratio micro-hole drilling aided with ultrasonic vibration and planetary movement of electrode by micro-EDM". CIRP Annals, 58(1): pp. 213-216, 2009.
[23] Hsue, A.W.-J. and Y.-F. Chang, "Toward synchronous hybrid micro-EDM grinding of micro-holes using helical taper tools formed by Ni-Co/diamond Co-deposition". Journal of Materials Processing Technology, 234: pp. 368-382, 2016.
[24] Lu, J., et al., "Fabrication of a resin-bonded ultra-fine diamond abrasive polishing tool by electrophoretic co-deposition for SiC processing". Precision Engineering, 47: pp. 353-361, 2017.
[25] Simović, K., et al., "Electrophoretic deposition of thin alumina films from water suspension". Colloids and Surfaces A: Physicochemical and Engineering Aspects, 209(1): pp. 47-55, 2002.
[26] Tsui, H.-P., et al., "Fabrication of a Microtool in Electrophoretic Deposition for Electrochemical Microdrilling and in Situ Micropolishing". Materials and Manufacturing Processes, 26(5): pp. 740-745, 2011.
[27] Tsui, H.-P., et al., "A study on stainless steel mirror surface polishing by using the electrophoretic deposition method". International Journal of Machine Tools and Manufacture, 47(12-13): pp. 1965-1970, 2007.
[28] Tani, Y., et al., "Infeed Grinding of Silicon Wafers Applying Electrophoretic Deposition of Ultrafine Abrasives". CIRP Annals, 47(1): pp. 245-248, 1998.
[29] Huang, H. and J. Yan, "Microstructural changes of Zr-based metallic glass during micro-electrical discharge machining and grinding by a sintered diamond tool". Journal of Alloys and Compounds, 688: pp. 14-21, 2016.
[30] Huang, H. and J. Yan, "On the surface characteristics of a Zr-based bulk metallic glass processed by microelectrical discharge machining". Applied Surface Science, 355: pp. 1306-1315, 2015.
[31] Kuriakose, S., P.K. Patowari, and J. Bhatt, "Machinability study of Zr-Cu-Ti metallic glass by micro hole drilling using micro-USM". Journal of Materials Processing Technology, 240: pp. 42-51, 2017.
[32] Liu, C., et al., "Experimental investigation and numerical simulation of micro-EDM of bulk metallic glass with focus on crater sizes". Procedia Manufacturing, 34: pp. 275-286, 2019.
[33] Yeo, S.H., et al., "Processing of Zirconium-Based Bulk Metallic Glass (BMG) Using Micro Electrical Discharge Machining (Micro-EDM)". Materials and Manufacturing Processes, 24(12): pp. 1242-1248, 2009.
[34] Hsieh, S.-F., et al., "Crystallization and carbonization of an electrical discharge machined Zr-based bulk metallic glass alloy". Journal of Materials Research, 28(22): pp. 3177-3184, 2013.
[35] 陳世瑋,不同製程對鋯-銅-鋁非晶質合金內析出 ZrCu B2 相分布及其機械性質影響之研究,國立中央大學機械工程系,碩士論文,2014。
[36] Xu, B., et al., "Micro-electrical discharge machining of 3D micro-molds from Pd40Cu30P20Ni10metallic glass by using laminated 3D micro-electrodes". Journal of Micromechanics and Microengineering, 26(3): pp. 035004, 2016.
[37] 倉藤上雄、風誠三郎著,鄒大鈞譯,放電加工,復漢出版社。
[38] 許世勳,大面積放電加工技術之研究,國立中央大學機械工程系,碩士論文,2012。
[39] 陳正德,碳化矽的電泳沈積現象探討,國立中央大學機械工程系,碩士論文,2002。
[40] 許笙載,運用電泳沉積法於不鏽鋼鏡面拋光之研究,國立中央大學機械工程系,碩士論文,2007。
[41] Kumar, K., et al., "Experimental Study on Diametric Expansion and Taper Rate in EDM Drilling For High Aspect Ratio Micro Holes in High Strength Materials". Materials Today: Proceedings, 5(2): pp. 7363-7372, 2018. |