奈米壓印技術製作全介電幾何相位超穎表面

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：11

、訪客IP：3.129.247.196

姓名

陳家琦(Chia-CHI Chen) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

奈米壓印技術製作全介電幾何相位超穎表面
(Nanoimprint technology for manufacture all-dielectric geometric phase metasurface)

相關論文

★ 從「紅葉」到「黑鷹」：台灣棒球醜聞的文化再現	★ 基於音頻訊號隱藏技術之聲波數位傳輸
★ 金屬鹵化鈣鈦礦塊材之光致發光及光致變色特性研究	★ 混合式超穎介面於感光元件之應用
★ 以自製灰階曝光機製作各式微光學元件	★ 高效率低深寬比幾何相位超穎介面
★ 以雙面非等向性濕蝕刻製備單晶石英深穿孔	★ 奈米壓印技術製作全介電光學繞射元件
★ 全介電幾何相位超穎表面的設計、優化及簡化模型	★ 以超穎校正器提升三片式庫克鏡組光學品質之研究
★ 全介電幾何相位超穎表面的抗反射設計	★ 藉由散射強化輻射冷卻發電之研究
★ 以人工智慧模型修復超穎透鏡影像品質之研究	★ 基於波導共振之手鏡超穎介面之研究
★ 像素級超穎介面色彩路由器之設計與製作	★ 用於屏下螢幕顯示的相位共軛超穎表面設計

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

[檢視]

[下載]

本電子論文使用權限為同意立即開放。
已達開放權限電子全文僅授權使用者為學術研究之目的，進行個人非營利性質之檢索、閱讀、列印。
請遵守中華民國著作權法之相關規定，切勿任意重製、散佈、改作、轉貼、播送，以免觸法。

摘要(中)

本論文設計了一個結合非球面透與炫耀光柵的離軸聚焦超穎透鏡，將奈米壓印技術與超穎表面做結合，利用奈米壓印技術的便利性以及大面積製作等優點，成功的利用PDMS轉印矽基板上超穎表面至玻璃基板上的PI結構層，並探討其轉印過程中的損耗，本論文探討了壓印後超穎表面之奈米壓印片其光學性質，得到超穎表面之奈米壓印片的焦距:4.17 cm 、放大率:0.38 、Strehl ratio為0.34以及線偏振光合圓偏振光所對應到的最大繞射效率分別為0.0145% 和 0.0115%，低效率主要歸因於圖案轉移過程中矩形納米結構的圓化和相對較薄的厚度。我們發現我們所製作出來的樣品有著完整的成像能力以及部份的偏振轉換率。

摘要(英)

In this paper, an off-axis focusing metalens that combines aspheric transparent and dazzling gratings is designed, and the nanoimprint technology is combined with the metasurface. Taking advantage of the convenience of nanoimprint technology and the advantages of large-area fabrication, the successful The use of PDMS to transfer the metasurface on the silicon substrate to the PI structure layer on the glass substrate, and discuss the loss during the transfer process. This paper discusses the optical properties of the nanoimprinted metasurface after imprinting, The focal length: 4.17 cm, magnification: 0.38, Strehl ratio of 0.34, and the maximum diffraction efficiency corresponding to linearly polarized light and circularly polarized light are 0.0145% and 0.0115%, respectively. The low efficiency is mainly attributed to the rounding and relatively thin thickness of the rectangular nanostructures during pattern transfer. We found that the samples we produced had full imaging capability and partial polarization conversion.

關鍵字(中)

★ 幾何相位
★ 超穎透鏡
★ 超穎表面
★ 奈米壓印

關鍵字(英)

★ PB-phase
★ metalens
★ metasurface
★ nanoimprint

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vi
表目錄 ix
第1章緒論 1
1-1 研究背景 1
1-2 研究動機 3
1-3 文獻回顧 3
1-4 研究目標及規劃 10
第2章基本理論 12
2-1 超穎表面 12
2-2 光波的偏振 14
2-3 瓊斯向量 16
2-4 瑞利-索末菲繞射理論(Rayleigh-sommerfeld diffraction) 21
2-5 Pancharatnam−Berry phase 25
第3章製程 28
3-1 超穎透鏡設計 28
3-2 奈米轉印技術 30
3-3 製程 31
3-4 壓印製程 34
3-5 壓印損耗 37
第4章量測架構與數據分析 39
4-1 量測架構及量測方法 39
4-2 聚焦光斑及焦距分析 39
4-3 分析不同偏振態所對應之效率 41
4-4 分析成像及放大率 45
4-5 PI 壓印片量測結果之分析 48
第5章結論與未來展望 50
5-1 結論 50
5-2 未來展望 50
參考文獻 51

參考文獻

[1] R. l. Chern et al., "surface and bulk modes for periodic structures of negative index materials," Physical Review B, vol.74, p.155101(2006)
[2] J. B. Pendry et al., "Magnetism from conductors and enchanced nonlinear phenomena," IEEE Transactions on Microwave Theory and Techniques, vol.47,pp.2075-2084(1999)
[3] S. Larouche et al., "Infrared metamaterial phase holograms", Nature Materials, vol 11, pages450–454 (2012)
[4] W. T. Chen et al., "High-Efficiency Broadband Meta-Hologram with Polarization-Controlled Dual Images", Nano Letters, vol. 14, no. 1, pp. 225-230. (2014)
[5] M. Khorasaninejad, et al., "Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging," Science, vol. 352, no. 6290, pp. 1190-1194 (2016)
[6] K. L. Kelly et al., "The optical properties of metal nanoparticles: The influence of size, shape, and dielectric environment," Journal of Physical Chemistry B, vol. 107, no. 3, pp. 668-677. (2003)
[7] D. Chanda et al., "Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing," Nature Nanotechnology, vol. 6, no. 7, pp. 402-407. (2011)
[8] N. I. Zheludev et al., "Lasing spaser," Nature Photonics, vol. 2, no. 6, pp. 351-354. (2008)
[9] S. L. Sun et al., "High-Efficiency Broadband Anomalous Reflection by Gradient Meta-Surfaces," Nano Letters, vol. 12, no. 12, pp. 6223-6229. (2012)
[10] H. H. Hsiao, et al., "Fundamentals and Applications of Metasurfaces," Small Methods, vol. 1, no. 4, Art. no. 1600064. (2017)
[11] X. Q. Zhang et al., "Broadband Terahertz Wave Deflection Based on C-shape Complex Metamaterials with Phase Discontinuities," Advanced Materials, vol. 25, no. 33, pp. 4567-4572. (2013)
[12] B. H. Chen et al., "GaN Metalens for Pixel-Level Full-Color Routing at Visible Light," Nano Letters, vol. 17, no. 10, pp. 6345-6352. (2017)
[13] Y. Xin. Guo , "微影製程再進化!複雜電路的祕密,"科技大觀園,.(2011)
[14] H. Tan et al., “Roller nanoimprint lithography”, American Vacuum Society, vol. 16, No. 1, pp.3926-3928. (1998)
[15] S. Y. Chou et al., "Nanoimprint lithography. ", Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena, 14: 4129–4133(1996)
[16] M. D. Austin, et al., "Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography". Applied Physics Letters, 84 (26): 5299–5301(2004)
[17] P. K. Wei et al., "The Application of Nanoimprint Technology for Surface Plasmon Biosensing Arrays", 生醫光電特刊,第一一二期,(2010)
[18] G. Y. Lee et al., "Metasurface eyepiece for augmented reality," Nature Communications, 9,4562(2018)
[19] N. Yu. et al., "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction", Science 334, 333-337 (2011).
[20] J. W. Goodman, "Introduction to Fourier Optics", 2nd ED.
[21] R. C. Jones, J. Opt. Soc. Am. 31, 488; 31, 500. (1941)
[22] Z. Bomzon et al., "Space-variant Pancharatnam–Berry phase optical elements with computer-generated subwavelength grating", Optics Letters, Vol. 27, Issue 13, pp. 1141-1143, (2002)
[23] S. Y. Chou, et al., "Sub-10 71 nm imprint lithography and applications," Journal of Vacuum Science and Technology B, vol. 15, No. 6, pp. 2897-2904(1997)
[24] T. Bailey, et al., "Step and flash imprint lithography: Temple surface treatment and detect analysis", Computer Science Journal of Vacuum Science & Technology B (2001)
[25] Y. Xia, et al., "Soft lithography", Annual Review of Materials Science, vol. 28:153-184(1998)
[26] Y. Stephen et al., "Ultrafast and direct imprint of nanostructures in silicon", Nature, vol. 417(20), pp.835-837, (2002)

指導教授

王智明(Chih Ming Wang)

審核日期

2022-1-26

推文