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姓名 周季賢(Chi-Hsien Chou) 查詢紙本館藏 畢業系所 物理學系 論文名稱
(High-Harmonic Generation beyond the Traditional Phase-Matching Cutoff Energy)相關論文 檔案 [Endnote RIS 格式]
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摘要(中) 要產生短波長的高相干性光源，由雷射和氣體作用產生的高階諧波是一種有效的方法。要提升高階諧波輸出階數，突破傳統相位匹配截止能量，使用離子作為交互作用介質是一種可行的方式。在這份論文中，我們成功達成這個目標，使用氬氣離子將輸出波長推進至 17 nm，超過傳統相位匹配截止能量所對應的 27.6 nm。我們也對此高階諧波產生過程中的相位匹配條件進行了完整的測量，其結果能輔助未來達成高效率之相位匹配高階諧波產生。 摘要(英) To construct a short-wavelength coherent light source, high-harmonic generation from the interaction of lasers and gases is an effective method. To increase the output photon energy beyond the traditional phase-matching cutoff energy, using ions as the interaction medium is a promising way. In this thesis, we succeeded in achieving this goal by using argon ions as the interacting medium to push the output wavelength to 17 nm, beyond 27.6 nm, corresponding to its conventional phase-matching cutoff energy. We have also measured the complete phase-matching conditions of the generation process. The results can assist in achieving effcient phase-matched high-harmonic generation in the future. 關鍵字(中) ★ 高階諧波產生
★ 極紫外光
★ 截止能量
★ 相位匹配
★ 內在偶極相位變化關鍵字(英) ★ High-Harmonic Generation
★ Extreme Ultraviolet
★ Cutoff Energy
★ Phase Matching
★ Intrinsic Dipole Phase Variation論文目次 摘要ix
Abstract xi
Dedication xiii
Contents xviii
List of Figures xix
List of Figures xxviii
List of Tables xxix
List of Tables xxx
Explanation of Symbols xxxi
1 Introduction 1
1.1 High-Harmonic Generation (HHG) . . . . . . . . . . . . . . . . . . . . . . 1
1.1.1 Three-Step Model of HHG . . . . . . . . . . . . . . . . . . . . . . . 1
1.1.2 Phase Matching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Experimental Goal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2 Theoretical Calculation 11
2.1 Dipole Phase Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.2 Absorption of Harmonics in the Medium . . . . . . . . . . . . . . . . . . . 14
Contents
3 Experimental Setup 19
3.1 Experimental Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.1.1 Main Beam . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.1.2 Probe Beam . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.1.3 Gas Jet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.1.4 2D EUV Spectrometer . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.2 Diagnosis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.2.1 Direct Imaging System . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.2.2 Main Beam Relay Imaging System . . . . . . . . . . . . . . . . . . 24
3.2.3 Transverse Wavefront Sensor and Probe Beam Relay Imaging System 26
3.2.3.1 Analysis of Gas and Plasma Density . . . . . . . . . . . . 29
3.2.4 2D EUV Spectrometer (FFS) . . . . . . . . . . . . . . . . . . . . . 30
3.3 Experimental Parameters Control . . . . . . . . . . . . . . . . . . . . . . . 30
3.3.1 Laser Energy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
3.3.2 Focal Spot Size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
3.3.3 Gas Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
3.3.4 Image Plane of Main Beam Relay Imaging System . . . . . . . . . 32
4 Experimental Results 35
4.1 Experiment Using Ar Gas Jet . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.1.1 Driving Beam Characteristics . . . . . . . . . . . . . . . . . . . . . 35
4.1.2 Probe Beam Relay Imaging System . . . . . . . . . . . . . . . . . . 39
4.1.3 HHG from Atoms and Ions . . . . . . . . . . . . . . . . . . . . . . 40
4.1.3.1 HHG from Atoms . . . . . . . . . . . . . . . . . . . . . . 40
4.1.3.2 HHG from Ions . . . . . . . . . . . . . . . . . . . . . . . . 45
4.1.4 Phase-Matching Condition Analysis . . . . . . . . . . . . . . . . . . 48
4.1.4.1 Phase Mismatch Caused by Neutral Gas Dispersion Δϕgas
and Plasma Dispersion Δϕplasma . . . . . . . . . . . . . . 48
4.1.4.2 Phase Mismatch Caused by Gouy Phase ΔϕGouy . . . . . 48
4.1.4.3 Phase Mismatch Caused by Dipole Phase Δϕdipole . . . . 49
4.1.4.4 Total Phase Mismatch Δϕtotal . . . . . . . . . . . . . . . 51
4.1.5 Modulation of Δϕdipole to HHG from Atoms . . . . . . . . . . . . . 53
4.1.5.1 Change of Focal Spot Size and Parameter Control . . . . 53
Contents
4.1.5.2 Harmonics Yield Analysis . . . . . . . . . . . . . . . . . . 58
4.1.5.3 Phase Mismatch Analysis . . . . . . . . . . . . . . . . . . 64
4.1.6 Modulation of Δϕdipole to HHG from Ions . . . . . . . . . . . . . . 67
4.1.6.1 Change of Focal Spot Size and Parameter Control . . . . 67
4.1.6.2 Harmonics Yield Analysis . . . . . . . . . . . . . . . . . . 72
4.1.6.3 Phase Mismatch Analysis . . . . . . . . . . . . . . . . . . 75
4.1.7 Estimation of Absorption of Harmonics in the Medium . . . . . . . 77
4.2 Experiment Using Ne Gas Jet . . . . . . . . . . . . . . . . . . . . . . . . . 79
5 Discussion, Conclusion, and Perspective 81
5.1 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
5.1.1 Alignment of the Nozzle in x-Direction . . . . . . . . . . . . . . . . 81
5.1.2 A More Rigorous Model for the Intensity Interpolation . . . . . . . 82
5.1.3 The Next Step to Achieve Phase Matching . . . . . . . . . . . . . . 82
5.1.4 The Exact Time when the Generation of Harmonics Occurs . . . . 83
5.1.5 The Use of Waveguide . . . . . . . . . . . . . . . . . . . . . . . . . 83
5.2 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
5.3 Perspective . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
A Gratings for the EUV Spectrometer 85
A.1 Mechanically Ruled Aberration-Corrected Concave Grating . . . . . . . . . 85
A.2 Hitachi’s 001-0450 Grating Ruling Parameters Deduction . . . . . . . . . . 87
B Gate Valve for the Foil Filter 91
B.1 Design of Adapters of the Foil Filter . . . . . . . . . . . . . . . . . . . . . 91
B.2 Design of the Gate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
B.3 Design of the Rectangular Flange . . . . . . . . . . . . . . . . . . . . . . . 96
C Objective Selection Guide 99
C.1 Main Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
C.1.1 Classification According to Medium . . . . . . . . . . . . . . . . . . 99
C.1.2 Classification According to Propagation of Light Inside of Objective 100
C.1.3 Classification According to Existence of Focus . . . . . . . . . . . . 100
C.1.4 Classification According to Aberration Correction . . . . . . . . . . 100
Contents
C.2 Glossary of Terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
C.3 Selection Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
D Abel Inversion 105
D.1 Principle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
D.2 Experiment and Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
E Experimental Parameters Control 107
E.1 Energy Tuner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
E.2 Tunable Aperture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
F Energy and Conversion Efficiency of Harmonics 113
G Experiment Using Ne Gas Jet 115
G.1 Driving Beam Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . 115
G.2 Probe Beam Relay Imaging System . . . . . . . . . . . . . . . . . . . . . . 119
G.3 Ne-Based HHG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
G.4 Modulation of Focal Spot Size . . . . . . . . . . . . . . . . . . . . . . . . . 123
G.4.1 Experimental Parameters . . . . . . . . . . . . . . . . . . . . . . . 123
G.4.2 Harmonics Yield Analysis . . . . . . . . . . . . . . . . . . . . . . . 128
G.4.3 Phase Mismatch Analysis . . . . . . . . . . . . . . . . . . . . . . . 131
G.5 Modulation of Backing Pressure . . . . . . . . . . . . . . . . . . . . . . . . 134
G.5.1 Experimental Parameters . . . . . . . . . . . . . . . . . . . . . . . 134
G.5.2 Harmonics Yield Analysis . . . . . . . . . . . . . . . . . . . . . . . 139
G.5.3 Phase Mismatch Analysis . . . . . . . . . . . . . . . . . . . . . . . 141
G.6 Theoretical Harmonics Yield and Modification of Intensity Evolution . . . 144
G.7 Estimation of Absorption of Harmonics in the Medium . . . . . . . . . . . 150
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