混合式超穎介面於感光元件之應用

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姓名

林榮勝(Rong-Sheng Lin) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

混合式超穎介面於感光元件之應用
(Application of meta-pigment-hybrid metasurafce for CMOS imaging sensor)

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摘要(中)

本論文將利用金屬介電混合超穎介面對目前感光元件系統進行優化。我們分別優化了感光元件的紅外光濾波元件與感光像素的光學效率。
紅外光濾波元件的部分，我們設計了有紅外濾波效果之超穎介面，為金屬介電混合結構，並且與一般紅外光濾波元件使用的有機材吸收材料做結合，而後進行分析。在加上我們設計的超穎介面後，在相同有機吸收材料的使用厚度下，我們將濾波效果波段由850 nm的窄頻，提升至1100 nm，包含了整個矽的能隙範圍。而RGB三個波段的對比度，在有機材料使用厚度1000 nm至300 nm範圍內，提升了2%至11%，從結果來說我們可以減少約100 nm厚的有機材料使用，就達到相似的濾波效果。
第二部分為像素光學效率的優化，我們設計了一介電超穎介面，用來優化以拜耳濾色器方式排列的感光元件光學效率。感光元件再加上設計過的超穎介面後，RGB三波段之光學效率增加了90%、24.4%、36%。

摘要(英)

We optimize the current sensor system using a metal-dielectric hybrid metasurface. We have optimized the optical efficiency of the infrared filter and the optical efficiency of the sensor pixels.
For the infrared filter, we have designed a metasurface with an infrared filtering effect, a metal-dielectric hybrid structure, combined it with the organic absorber material used in normal infrared filters, and then analyzed it. With the addition of our design, we have increased the filtering effect from a narrow band of 850 nm to 1100 nm, covering the entire energy gap of silicon, with the same thickness as organic absorber material. The contrast between the three RGB bands has been improved by 2% to 11% over the range of 1000 nm to 300 nm of organic material thickness, which means that we can achieve a similar filtering effect with 100 nm less organic absorber material.
The second part is the optimization of the pixel optical efficiency, where we designed a dielectric metasurface to optimize the optical efficiency of the sensor arranged in a Bayer filter. With the addition of the designed metasurface, the optical efficiency of the RGB tri-band is increased by 90%, 24.4%, and 36%.

關鍵字(中)

★ 超穎介面
★ 感光元件

關鍵字(英)

★ metasurafce
★ imaging sensor

論文目次

摘要 i
Abstract vi
致謝 vii
目錄 viii
圖目錄 x
表目錄 xiii
第1章緒論 1
1-1 研究背景 1
1-2 超穎介面 2
1-3 彩色濾波器之文獻回顧 3
1-4 研究目標 12
第2章金屬介電混合結構之設計原理 15
2-1 結構選用 15
2-2 金屬材料選用 16
2-3 模擬參數設定 17
第3章金屬介電混合結構之光譜分析 24
3-1 有機吸收層光譜 24
3-2 改變週期對穿透光譜之影響 25
3-3 改變直徑對穿透光譜之影響 28
3-4 改變介電質厚度對穿透光譜之影響 30
3-5 金屬介電有機染料混合結構之效率對比 33
3-6 樣品量測值與模擬值對比 34
第4章色彩路由器 43
4-1 色彩路由器簡介 43
4-2 色彩路由器之文獻回顧 45
4-3 色彩路由器結構設計 48
4-4 色彩路由器結果分析 50
第5章結論 60
參考文獻 62

參考文獻

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指導教授

王智明(Chih-Ming Wang)

審核日期

2022-6-8

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