以可重構之SU-8聚合物披覆層對氮化矽微環形共振腔進行色散調製

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姓名

王上溥(Shang-Pu Wang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

以可重構之SU-8聚合物披覆層對氮化矽微環形共振腔進行色散調製
(Dispersion Engineering of Silicon Nitride Microring Resonators via Reconstructable SU-8 Polymer Cladding)

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★ 低限制氮化矽波導之高品質因子微環形共振腔製程研究	★ 氮化矽微環型干涉儀製程與穿透頻譜調製
★ 6 吋晶圓製程整合奈米光學應用和均勻性分析研究

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摘要(中)

矽光子技術利用積體光路取代傳統電路，提供了一個高傳輸速度、寬頻寬、低損耗的資料傳輸渠道。而群速度色散在光通訊、非線性光學、超快光學等領域中扮演一個重要的角色。本論文透過在氮化矽波導上疊加不同比例之聚合物披覆層，以達到靈活調製色散的目的。首先，利用有限元法來模擬不同波導截面設計之波導色散，並觀察在不同寬度、高度和披覆層材料下波導色散的變化。第二部分為色散量測系統之建立，在本論文研究中利用光纖之馬赫－陳爾德干涉儀來作為參考頻譜，以確認可調式雷射在掃描時穩定度，並且建立一個解析度優於雷射之頻率軸。
在實驗上，將空氣、氧化物和聚合物披覆層疊加在共振腔上，並對波導色散進行比較。在波導上疊加聚合物披覆層後，可以將波導色散從−143 ps/nm-km調製成−257 ps/nm-km。除此之外，透過去除聚合物的方法來實現可重構之聚合物披覆層，波導色散會還原至初始色散大小，以及對品質因子而言也沒有明顯的影響。接著利用微影技術在環形波導上疊加不同覆蓋比例之披覆層。測得的色散與覆蓋比例呈線性相關，與模擬數據具有良好的一致性。因此可以通過控制聚合物披覆層的覆蓋比例，使得波導色散在上述色散變化區間內進行調製。最後，將波導高度提升至700 nm的波導，其色散為66 ps/nm-km，為異常色散。接著在波導上疊加聚合物披覆層，其波導色散大小為-508 ps/nm-km，為正常色散。因此可以透過疊加聚合物披覆層的方式來使得具異常色散之共振腔調製成正常色散。
本論文研究提供一個靈活、新穎的方法來製造一具多功能性的積體光路，以滿足不同應用對色散的要求。

摘要(英)

In silicon photonics, integrated optical circuit replaces electrical circuit, and it provide a data transmission channel with high transmission speed, wide bandwidth, and low loss. Moreover, group velocity dispersion (GVD) is an important physical quantity in many photonic applications, such as optical communication, nonlinear optics, and ultrafast optics. In this thesis, we propose a flexible way to engineer waveguide dispersion with patterning different coverage ratios of polymer cladding layer on silicon nitride waveguides. First, the finite element method is used to simulate the waveguide dispersion of different waveguide cross-section designs and to observe the changes of the waveguide dispersion under different widths, heights, and cladding materials. The second part is the establishment of the dispersion measurement system. Fiber-based Mach-Zehnder interferometer is used as the reference spectrum to confirm the stability of the tunable laser during scanning and to build a calibrated frequency axis, which has a better resolution than that of the laser.
Experimentally, air, oxide and polymer cladding layers are coated on the microring resonaters and the waveguide dispersion is measured accordingly. The waveguide dispersion can be tuned from −143 ps/nm-km to −257 ps/nm-km by integrating the SU-8 polymer as the outer cladding layer. In order to realize the reconstructability of polymer cladding, we remove the polymer cladding layer. After stripping the polymer layer, the waveguide dispersion can be recovered to the original value, and there is no obvious impact on the quality factor. In addition, different coverage ratios of cladding layer are patterned on the microrings with traditional UV contact lithography. The measured dispersion shows linear dependence to the coverage ratio, showing good agreement with the simulated data. Thus, the waveguide dispersion can be engineered within a varied dispersion range by controlling the coverage ratio of the polymer cladding layer. Last, by increasing the waveguide height to 700 nm, the measured dispersion is tailored to be 66 ps/nm-km, which is in anomalous dispersion. After 100% coverage ratio of polymer cladding layer is patterned on microring, the measured dispersion is tuned to be -508 ps/nm-km, which is in normal dispersion. This provides a flexible way to engineer the dispersion. The dispersion can be tuned from anomalous to normal by superimposing different coverage ratios of polymer cladding layer on the waveguide.
The research presented in this thesis provides a flexible and novel approach to fabricate a multifunctional integrated optical circuit to meet the dispersion requirements of different applications.

關鍵字(中)

★ 微環形共振腔
★ 色散調製
★ 聚合物披覆層

關鍵字(英)

★ Microring resonator
★ Dispersion engineering
★ Polymer cladding

論文目次

口試委員會審定書
誌謝 i
摘要 ii
ABSTRACT iii
目錄 v
圖目錄 viii
表目錄 xii
第一章緒論 1
1-1 色散基礎背景 1
1-2 微環形共振腔 3
1-3 論文概要 5
第二章波導色散模擬 7
2-1 模擬工具介紹 7
2-1-1 有限元法(FEM)計算原理 7
2-1-2 MPB計算原理 9
2-1-3 模擬結果比較 11
2-2 不同結構設計的波導色散模擬 11
2-2-1 波導高度與色散的關係 12
2-2-2 波導寬度與色散的關係 13
2-2-3 添加披覆層對色散的影響 13
2-3 不同披覆層比例的波導色散計算 15
第三章色散量測系統建立 18
3-1 色散量測方法 18
3-2 量測系統與架設圖 19
3-3 光纖之馬赫－陳爾德干涉儀 21
3-3-1 干涉儀原理與建立目的 22
3-3-2 干涉頻譜量測結果 25
3-4 波導色散量測與模擬結果比對 28
3-4-1 量測結果比對 29
3-4-2 干涉儀之色散對波導色散量測結果影響 30
3-4-3 光纖長度誤差對波導色散影響 31
3-4-4 高階模態對波導色散計算影響 33
第四章微環形共振腔之製程與色散量測結果 36
4-1 微環形共振腔製程 36
4-1-1 製程流程 36
4-1-2 共振之品質因子 38
4-1-3 元件之傳輸頻譜與品質因子 41
4-2 色散與自由光譜區(free spectral range)關係 42
4-3 色散量測結果 44
4-3-1 不同材料披覆層之波導色散比較 44
4-3-2 去除聚合物披覆層之波導色散分析 46
4-3-3 疊加不同比例之聚合物披覆層對波導色散影響 49
4-3-4 不同高度之共振腔色散量測 53
第五章結論與未來展望 58
參考文獻 59

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指導教授

王培勳(Pei-Hsun Wang)

審核日期

2022-8-22

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