以介電質放電技術轉化四氟甲烷及六氟乙烷之初步探討

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游生任(ShengJen Yu) 查詢紙本館藏

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論文名稱

以介電質放電技術轉化四氟甲烷及六氟乙烷之初步探討

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關鍵字(中)

★ 介電質電漿
★ 全氟化物
★ 觸媒
★ 四氟甲烷
★ 六氟乙烷

關鍵字(英)

★ DBD
★ plasma
★ PFC
★ CF4
★ C2F6
★ catalyst

論文目次

第一章前言………………………………………………………………………….1
1-1 研究緣起…………………………………………………………………………1
1-2 研究內容…………………………………………………………………………2
第二章文獻回顧……………………………………………………………………4
2-1 氟氯碳化物之特性………………………………………………………………4
2-1-1 氟氯碳化物及全氟化物之簡介………………………………………….….4
2-1-2氟氯碳化物及全氟化物對於環境之影響………………………….….…….5
2-1-3氟氯碳化物及全氟化物之排放…………………………………………..….6
2-1-4 四氟甲烷及六氟乙烷之基本特性……………………………………….….8
2-2 電漿反應……………………………………………………………….………9
2-2-1 電漿基本理論及特性…………………………………………………….…10
2-2-2 電漿生成方式………………………………………………………………12
2-2-3 介電質放電技術之頻率效應………………………………………………16
2-3 CFCs、PFCs之管制及PFCs之現行處理技術………………………………..21
2-3-1 CFCs、PFCs之管制源由…………………………………………………...21
2-3-2 PFCs之現行處理技術………………………………………………………23
2-4 四氟甲烷及六氟乙烷在介電質放電程序中之轉化反應……………………28
2-4-1 四氟甲烷之反應機制………………………………………………………28
2-4-2 六氟乙烷之反應機制………………………………………………………32
2-4-3 觸媒反應機制………………………………………………………………36
第三章實驗設備及方法………………………………………………………….40
3-1 實驗設備……………………………………………………………………….40
3-1-1 氣體供應系統………………………………………………………………40
3-1-2 操作參數控制系統…………………………………………………………42
3-1-3 介電質放電系統……………………………………………………………43
3-1-4 反應物及終產物之分析系統………………………………………………46
3-2 實驗方法……………………………………………………………………….47
3-2-1 研究規劃……………………………………………………………………47
3-2-2 操作參數之擇取……………………………………………………………50
3-2-3 轉化效率之表示式…………………………………………………………52
3-3 統計分析………………………………………………………………………54
第四章結果與討論……………………………………………………………….57
4-1 影響四氟甲烷轉化率因子之探討……………………………………………57
4-1-1 四氟甲烷進流濃度對轉化率之影響………………………………………57
4-1-2 氧氣含量對四氟甲烷轉化率之影響………………………………………60
4-1-3 供電頻率對四氟甲烷轉化率之影響………………………………………61
4-1-4 結合觸媒反應對四氟甲烷轉化率之影響…………………………………63
4-1-5 氣體流量(停留時間)對四氟甲烷轉化率之影響………………………….66
4-1-6 四氟甲烷轉化反應之產物分析……………………………………………68
4-1-7 四氟甲烷之再現性分析……………………………………………………77
4-1-8 四氟甲烷經轉化後對環境影響之評估……………………………………83
4-2 影響六氟乙烷轉化率因子之探討…………………………...………………85
4-2-1 六氟乙烷進流濃度對轉化率之影響………………………………………85
4-2-2 氧氣含量對六氟乙烷轉化率之影響………………………………………87
4-2-3 供電頻率對六氟乙烷轉化率之影響…………………....…………………89
4-2-4 結合觸媒反應對六氟乙烷轉化率之影響…………………………………91
4-2-5 氣體流量(停留時間)對六氟乙烷轉化率之影響………………………….94
4-2-6 六氟乙烷轉化反應之產物分析……………………………………………96
4-2-7 六氟乙烷之再現性分析…………………………………………………..104
4-2-8 六氟乙烷經轉化後對環境影響之評估…………………………………..109
4-3 系統耗能探討……………………………………………………………....111
4-3-1 氧氣含量對系統耗能之影響……………………………………………..111
4-3-2 供電頻率對系統耗能之影響……………………………………………..112
4-3-3 結合觸媒反應對系統耗能之影響………………………………………..113
4-3-4 反應器與系統耗能之比較………………………………………………..115
4-3-5 能量效率評估……………………………………………………………..116
第五章結論與建議……………………………………………………………119
5-1結論……………………………………………………………………………..119
5-2建議……………………………………………………………………………..121
參考文獻…………………………………..……………………………………123

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指導教授

張木彬(Moo-Been Chang)

審核日期

2000-6-20

推文