微液滴對微熱點之 冷 卻

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姓名

車學義(Hsueh-Yi Che) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

微液滴對微熱點之冷卻
(Cooling of micro-hot-spot)

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至系統瀏覽論文 ( 永不開放)

摘要(中)

微小化是現今微電子及微光電系統的趨勢，然而隨著尺寸越來越小，其散熱之問題亦相形重要之。但是目前可應用於微熱點冷卻之各種冷卻方法，因受限於尺寸或是材質而難有理想之冷卻效率。
本研究乃採用微液滴主動冷卻微熱點的方式，即利用冷卻介質之相變化，直接帶走微熱點上的熱而達到冷卻目的，以期能在高效能的微小光機電元件之冷卻工程上有更新的突破。
由本實驗室之實驗結果顯示，當微熱點在80 ℃以下，使用單一微液滴冷卻時，微液滴皆可達到不錯的冷卻效果。但當微熱點在80 ℃以上，則會因為汽泡環(Bubble ring)造成冷卻效果下降。幸而一般的微小光電元件也很少會有如此的高溫，因此本實驗使用50 μm直徑之純水微液滴冷卻微熱點(尺寸為75 μm × 75 μm及50 μm × 50 μm)確是一可行的冷卻方法。

摘要(英)

It is the current trend of the micro-electronic and micro-optical systems to minimize the size. As the size of these micro-devices become smaller, the problem of heat dissipation would be more important. Although several methods have been applied for the Micro-hot-spot, such as Thermoelectric Cooling, Micro Heat Pipe, and Micro channel, these systems do not really get the cooling efficiency because of their limitation of size or material. The goal of our research, called Active micro-droplet cooling method, is going to make use the characters of phase change in our cooling liquid, to take heat away from the Micro-hot-spot directly. We hope this system could provide a higher efficiency in cooling engineering for the micro-electronic and micro-optical systems.

關鍵字(中)

★ 微熱點
★ 冷卻
★ 微液滴

關鍵字(英)

★ micro droplet
★ micro hot spot
★ cooling

論文目次

Ⅰ 摘要………………………………………………………………………….Ⅰ
Ⅱ 目錄………………………………………………………………………….Ⅱ
Ⅲ 表目錄………………………………………………………………………Ⅳ
Ⅳ 圖目錄………………………………………………………………………Ⅴ
第一章緒論…………………….…………………………………………….1
1-1前言…………………….……………………………………………1
1-2文獻回顧……………………………………………………………3
1-2 (1) 微尺度熱傳…………………….……………………………3
1-2 (2) 液滴之相關研究………………………………………………6
1-2 (2) A. 液滴撞擊之研究………………...……………………6
1-2 (2) B. 使用噴墨頭液滴之研究……………………………11
1-2 (2) C. 液滴蒸發之研究…………………...………………12
第二章實驗設備及方法……………………………………………15
2-1實驗設備………………………………………………………….15
2-1-1 微液滴控制系統……………………………………………...15
2-1-2 微熱點之模擬與溫度量測系統……………………………...16
2-1-3 影像擷取系統………………………………………………….18
2-1-4 微調定位系統 ………………………………………………...19
2-2實驗步驟……………………………………………….…...20
2-3實驗分析……………………………………………………..22
2-3-1 微液滴尺寸研究………………………………………………22
2-3-1 75 μm × 75 μm之感測器實驗分析(實驗一)…………23
2-3-2 50 μm × 50 μm之感測器實驗分析(實驗二)…………24
第三章結果與討論……………………………………………………….26
3-1實驗一 : 75μm × 75μm之微熱點冷卻…………...26
3-2實驗二 : 50μm × 50μm之微熱點冷卻…………...31
第四章總結………………………………………………………………….34
A.文獻回顧…………………………………………………………….……..36
B.附表…………………………………………………………………………..39
C.附圖…………………………………………………………………………..48

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指導教授

周復初(Fu-Chu Chou)

審核日期

2002-6-25

推文