以電漿表面預處理法
在塑膠基板上製鍍抗反射膜

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：13

、訪客IP：3.16.51.3

姓名

王宣文(Shuan-Wen Wang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

以電漿表面預處理法在塑膠基板上製鍍抗反射膜
(Anti-Reflection Coating on Plastic Substrate Treated by Low Pressure Plasma )

相關論文

★ 半導體雷射控制頻率	★ 比較全反射受挫法與反射式干涉光譜法在生物感測上之應用
★ 193nm深紫外光學薄膜之研究	★ 超晶格結構之硬膜研究
★ 交錯傾斜微結構薄膜在深紫外光區之研究	★ 膜堆光學導納量測儀
★ 紅外光學薄膜之研究	★ 成對表面電漿波生物感知器應用在去氧核糖核酸及微型核糖核酸雜交反應檢測
★ 成對表面電漿波生物感測器之研究及其在生醫上的應用	★ 探討硫化鎘緩衝層之離子擴散處理對CIGS薄膜元件效率影響
★ 以反應性射頻磁控濺鍍搭配HMDSO電漿聚合鍍製氧化矽摻碳薄膜阻障層之研究	★ 掃描式白光干涉儀應用在量測薄膜之光學常數
★ 量子點窄帶濾光片	★ 以量測反射係術探測光學薄膜之特性
★ 嵌入式繼光鏡顯微超頻譜影像系統應用在口腔癌切片及活體之設計及研究	★ 軟性電子阻水氣膜之有機層組成研究

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

[檢視]

[下載]

本電子論文使用權限為同意立即開放。
已達開放權限電子全文僅授權使用者為學術研究之目的，進行個人非營利性質之檢索、閱讀、列印。
請遵守中華民國著作權法之相關規定，切勿任意重製、散佈、改作、轉貼、播送，以免觸法。

摘要(中)

近年來，塑膠基板在光學元件中的應用，日漸增加，凸顯了塑膠基板鍍膜的重要性，但是薄膜材料與塑膠基板間的附著性不佳，為目前主要待克服的問題點。
為了克服此問題，本研究選擇了電漿表面預處理法作為研究方向，來增加薄膜與基板的附著力。重點在探討以不同氣體與預處理功率及不同處理時間的情況下，對塑膠基板的表面粗糙度、化學鍵結與光學特性產生之變化。除此之外，也以預處理過的基板繼續鍍上Ta2O5單層膜，來探討基板與薄膜材料間中間層﹙interface layer﹚折射率不連續之現象，以及測試Ta2O5之附著性。
研究結果顯示，基板經電漿表面預處理後，在基板表面有中間層產生，且薄膜與基板的附著改善的程度，與電漿的功率及處理時間有關。功率高時，處理時間短，便可得到附著力增進的效果；功率低時，所需處理時間就比較長。
但是高功率電漿處理由於電漿反應較為劇烈，容易使基板表面之性質改變以及因高溫所累積的熱而產生形變，故改採長時間、低功率電漿處理，同時加上電極冷卻，以避免熱的因素。
本研究以模擬中間層的厚度與折射率設計膜層，並經優化修正後，已可鍍出於可見光區﹙420~670nm﹚反射率小於1%且附著佳的抗反射膜。

摘要(英)

The application of plastic substrates in optical components increased recently. The limitation in using plastic substrates for optical components was the poor adherence between thin films and substrates. This research focused on plasma surface treatment to enhance the adhesion.
The change of surface roughness, chemical bonding, substrate transmittance with different gas and pre-treatment power was investigated. In addition, we coated Ta2O5 single layer on substrates after pre-treatment to find out the phenomenon of the inhomogeneity as well as the adhesion degree between Ta2O5 and plastic substrate.
The results revealed that the improvement of adhesion related to plasma power and pre-treatment time. It took shorter time to reach good adhesion under high plasma power, while longer time under low plasma power. But, high power plasma treatment caused substrate overheated due to the volatile interaction between plasma and substrates. So we chose low power treatment with longer time as well as cathode cooling.
Finally, it is found that by refining the design of anti-reflection coating with an interface layer, an anti-reflection coating on plastic substrates with good adhesion can be made.

關鍵字(中)

★ 塑膠基板
★ 表面處理
★ 電漿
★ 抗反射膜

關鍵字(英)

★ plastic substrate
★ anti-reflection coating
★ plasma

論文目次

第一章前言........1
1-1 研究動機.......1
1-2 塑膠基板的種類 ...1
第二章基本理論... 4
2-1 電漿原理...... 4
2-1-1 射頻電漿預處理....... 5
2-2 濺鍍原理...... 6
2-2-1 直流濺鍍.... 6
2-2-2 磁控濺鍍.... 7
第三章量測儀器... 9
3-1 可見光-近紅外光光譜儀...9
3-2 原子力顯微鏡﹙Atomic Force Microscopy﹚..10
3-3 傅氏轉換紅外線光譜儀﹙Fourier Transform Infrared Spectroscopy﹚...12
第四章研究目標與實驗裝置及流程...13
4-1 研究目標...13
4-2 實驗裝置...13
4-3 實驗流程與方法 ...15
第五章結果與討論...17
5-1 低功率氬氣電漿預處理...17
5-1-1 基板穿透率變化...17
5-1-2基板處理後續鍍Ta2O5之穿透率變化...19
5-2 低功率氧氣電漿預處理...20
5-2-1 基板穿透率變化...20
5-2-2 基板處理後續鍍Ta2O5之穿透率變化...22
5-3 高功率氬氣電漿預處理...23
5-3-1 基板穿透率變化...23
5-3-2 基板處理後續鍍Ta2O5之穿透率變化...24
5-4 高功率氧氣電漿預處理...25
5-4-1 基板穿透率變化...25
5-4-2 基板處理後續鍍Ta2O5之穿透率變化...26
5-5 FTIR量測基板經由電漿處理後之變化...27
5-5-1 高功率氬氣電漿處理後之變化...27
5-5-2 高功率氧氣電漿預處理後之變化...29
5-6 AFM量測基板經由電漿處理後之表面粗糙度變化...30
5-6-1 高功率氬氣電漿處理後之變化...30
5-6-2 高功率氧氣電漿處理後之變化...32
5-7 附著力測試結果...34
5-8 抗反射膜之製鍍 ...35
5-8-1 四層抗反射膜 ...35
5-9 電漿預處理方式之改良...36
5-9-1 氦氣電漿預處理...36
5-9-2 以Quartz基板將電漿區與基板隔開...37
5-9-3 電極冷卻以氦氣與氬氣混合預處理 ...38
5-9-4 修正中間層後製鍍四層抗反射膜...39
第六章結論...42
第七章參考文獻...44

參考文獻

1. Chi-Ming Chan, Polymer Surface Modification and Characterization, Hanser publishers,c1993
2. K.L. Mittal, A. Pizzi., Adhesion promotion techniques, New York :M. Dekker,c1999
3. F. Sarto, M. Alvisi, E. Melissano, A. Rizzo, S.Scagline, L. Vasanelli., “Adhesion enhancement of optical coatings on plastic substrate via ion treatment”, Thin Solid Films 346 (1999) , pp. 196-201
4. Takuji Oyama, Tomohiro Yamada, “Light absorbing wide-band AR coatings on PET films by sputtering”, Vacuum 59 (2000) pp. 479-483
5. Jung-Hwan Lee, Jun-Sik Cho, Seok-Keun Koh, Donghwan Kim, “Improvement of adhesion between plastic substrates and antireflection layers by ion-assisted reation”, Thin Solid Films 449 (2004) , pp. 147-151
6. W. Petasch, E. Rauchle, M. Walker, P. Elsner, “Improvement of the adhesion of low-energy polymers by a short-time plasma treatment”, Surface and Coating Tech. 74-75 (1995) , pp. 682-688
7. J.E. Klemberg-Sapieha, L. Martinu, N.L.S. Yamasaki, C.W. Lantman,
“Tailoring the adhesion of optical films on polymethyl-methacrylate
by plasma-induced surface stabilization”, Thin Solid Films 476 (2005), pp. 101–107
8. Oh-June Kwon, Shen Tang, Sung-Woon Myung, Na Lu, Ho-Suk Choi
“Surface characteristics of polypropylene film treated by an
atmospheric pressure plasma”, Surface & Coatings Technology 192 (2005) , pp. 1– 10
9. David R. Lide, “CRC Handbook of Chemistry and Physics”, CRC Press, c2001.
10. A. Bergeron, J.E. Klemberg-Sapieha, L. Martinu, “Structure of the interfacial region between polycarbonate and plasma depositred SiN1.3 and SiO2 optical coatings studied by ellipsometry” J.Vac. Sci. Technol. A 16(6), 1998, pp. 3227-3234
11. J.E. Klemberg-Sapieha, D. Poitras, L. Martinu, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma” J.Vac Sci Technol.A 15(3), 1997, pp.985-991
12. S. Vallon, B. Drevillon, F. Poncin-Epaillard, J.E. Klemberg-Sapieha, L. Martinu, “Argon plasma treatment of polycarbonate: In situ spectroellipsometry study and polymer characterizations”J. Vac. Sci. Technol. A 14(6), 1996, pp. 3194-3201.
13. 賴耿陽編譯, “塑膠材料技術讀本”, 台灣復文, 1996
14. J.A.Brydson著, 范啟明譯, “塑膠材料”, 大中國出版社, 1989
15. 楊思廉編著, “新材料塑膠”, 高立圖書經銷, 1995
16. During, James R.著, 陳守一譯, “紅外線光譜分析法在化學、生物和工業方面之應用”, 國立編譯館, 1996
17. M.R. Wertheimer, A.C. Fozza, A. Hollander, “Industrial processing of polymers by low-pressure plasmas: the role of VUV radiation”, Nuclear Instruments and Methods in Physics Research B 151, (1999), pp.65-75
18. A.C. Fozza, J. Roch, J.E. Klemberg-Sapieha, A. Kruse, A. Hollander, M.R. Wertheimer, “Oxidation and ablation of polymers by vacuum-UV irradiation from low pressure plasmas” Nuclear Instruments and Methods in Physics Research B 131, (1997), pp.205-210
19. A.C. Fozza, J.E. Klemberg-Sapieha, M.R. Wertheimer, “Vacuum Ultraviolet irradiation of Polymers”, Plasmas and Polymers, Vol. 4, No.213, 1999, pp.183-204
20. Dr. H. Walter Class, 楊錦章譯,“基礎濺鍍電漿”, 電子發展月刊第68期, 民國72 年, pp.13-40,
21. 李正中, “薄膜光學與鍍膜技術”, 台北, 藝軒出版社(第三版), 2002.
22. U. Schulz, Uwe B. Schallenberg, and N. Kaiser, “Symmetrical periods in
antireflective coatings for plastic optics”, Applied Optics 42, 2003,
pp.1346-1351
23. F. Sarto, M. Alvisi, E. Melissano, A. Rizzo , S. Scaglione , L.
Vasanelli, ”Adhesion enhancement of optical coatings on plastic substrate via ion treatment”, Thin Solid Films 346, 1999, pp.196-201,
24. A. V. Tikhonravov, M. K. Trubetskov, Brain T. Sullivan, J. A. Dobrowolski, “Influence of small inhomogeneities on the spectral characteristics of single thin films”, Applied Optics, Vol. 36, No. 28, 1999, pp.7188-7198
25. Daniel Poitras, Ludvik Martinu, “Interphase in plasma-deposited films on plastics: effect on the spectral properties of optical filters”, Applied Optics, Vol. 39, No. 7, 2000, pp.1168-1173
26. Mariana D. Duca, Carmina L. Plosceanu & Tatiana Pop, “Surface modifications of polyvinylidene fluoride(PVDF) under rf Ar plasma”, Polymer Degradation and Stability 61, 1998, pp.65-72
27. N. Sprang, D. Theirich, J.Engemann, “Plasma and ion beam surface treatment of polyethylene” Surface and Coatings Technology 74-75, 1995, pp. 689-695.
28. Ulrike Schulz, Peter Munzert, Norbert Kaiser, “Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion” Surface and Coatings Technology 142-144, 2001, pp.507-511
29. A. S. da Silva Sobrinho, N. Schuhler, J. E. Klemberg- Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): A multitechnique study of the interphase regions”, J. Vac. Technol. A 16(4), 1998, pp.2021-2030
30. S. Vallon, B.Drevillon, F. Poncin-Epaillard, J. E. Klemberg-Sapieha, L. Martinu, “Argon plasma treatment of polycarbonate: In situ spectroellipsometry study and polymer characterizations, J.Vac. Technol. A 14 (6), 1996, pp.3194-3201

指導教授

李正中(Cheng-Chung Lee)

審核日期

2005-7-20

推文