導波共振光學元件應用於生物感測器之研究

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姓名

黃馨諄(Hsin-Chun Huang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

導波共振光學元件應用於生物感測器之研究
(Study of Si-based guided-mode resonance element for optical biosensor)

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摘要(中)

摘要
生物感測器雖然發展已久，但仍有幾個極大的問題待解決--標定、平行處理、以及微小化的問題。於本文中我們提出一新型之光學生物感測晶片—導波共振光學元件。此生物感測晶片是利用半導體製程，製作出奈米級之次波長光柵，並利用導波共振光學元件的窄帶高反射率之效果，以及其對表面之敏感性，作為偵測生物分子親合力作用之過程。此生物感測器不但不需要標定、並且可以做到微小化、高通量、即時偵測、而且導波共振光學元件是在矽晶圓上製作，易與其他半導體元件結合。
在本文中，我們製作出窄帶及高反射的導波共振光學元件，其半高寬約為2.15nm、反射率約為80%，並利用導波共振光學元件對表面變化的敏感性，將其應用於生物感測器領域。我們偵測二氧化矽多層膜沉積於導波共振光學元件之上，並由實驗中得到可做定量推算二氧化矽膜厚的公式，且我們所設計的導波共振光學元件對二氧化矽的靈敏度為0.875nm，也就是說，若有0.875nm厚的二氧化矽在導波共振光學元件上，即可偵測出來。再者，我們也對DNA雜交過程做偵測，先於導波共振光學元件表面進行表面改質的動作，並於導波共振光學元件表面接上三段DNA (Capture DNA, Target DNA, Probe DNA)，另外也探討DNA有雜交和DNA沒有雜交的反應，在DNA有雜交的情形下，導波共振光學元件所量測到的穿透頻譜之波長位移量為2.14nm，並且在DNA沒有雜交的情形下，波長位移量為0.1nm，由此可見，DNA有雜交偵測結果為DNA沒有雜交偵測結果的21倍之多，因此，我們所設計的導波共振光學元件以可以清楚的辨別DNA的雜交反應。在本文的最後，我們也證實了我們所設計的導波共振光學元件，可以達到三次重複偵測DNA的雜交，更加強了我們所設計的導波共振光學元件之可靠性。

關鍵字(中)

★ 次波

關鍵字(英)

★ guided-mode resonance
★ DNA hybridization
★ biosensor
★ subwavelength grating

論文目次

目錄
目錄…………………………………………………………………….....i
圖目錄…………………………………………………………………...iii
表目錄………………………………………………….....……………..vi
第一章緒論……………………………………………………………1
1.1 導波共振……………………………………………………...1
1.2 研究動機……………………………………………………...3
第二章 GMR生物感測器之原理……………………………………...6
2.1 GMR理論簡介………………………………………………..6
2.2 嚴格耦合波理論……………………………………………...8
2.3 波長飄移之機制…………………………………………….11
第三章 GMR元件之設計與製作…………………………………….13
3.1 GMR元件設計………………………………………………13
3.2 GMR元件模擬………………………………………………14
3.3 GMR元件製作………………………………………………15
3.4 GMR元件量測………………………………………………18
3.4.1 量測系統……………………………………………..18
3.4.2 GMR量測結果……………………………………….18
3.4.3 偏振量測及角度容忍度……………………………..19
第四章 GMR生物感測器…………………………………………….21
4.1偵測二氧化矽多層膜沉積…………………………………….21
4.1.1偵測二氧化矽多層膜沉積……………………………..21
4.1.2 分析與討論……………………………………………22
4.2 偵測DNA雜交……………………………………………...24
4.2.1 DNA雜交過程偵測………………………………….25
4.2.2 DNA雜交與不雜交偵測比較……………………….28
4.2.3 DNA雜交之重複性偵測…………………………….30
第五章結論與未來展望……………………………………………..34
5.1 總結………………………………………………………….35
5.2 未來展望…………………………………………………….35
參考文獻……..…………………………………………………………36
附錄……………………………………………………………………..40
圖目錄
圖2.1 GMR結構圖…………………………………………………...41
圖2.2 繞射光柵模型………………………………………………….41
圖3.1 GMR元件之頻譜圖…………………………………………...42
圖3.2 生物分子在GMR表面之分布模擬情形……………………...42
圖3.3 0 nm至10 nm之DNA在GMR表面之模擬頻譜圖………….43
圖3.4 DNA在GMR表面之厚度與波長飄移量關係圖…………….43
圖3.5 0 nm至100 nm之DNA在GMR表面之模擬頻譜圖………..44
圖3.6 DNA在GMR表面之厚度與波長飄移量關係圖…………….44
圖3.7 待測物之折射率與波長飄移的關係圖……………………….45
圖3.8 待測物之厚度與波長飄移的關係圖………………………….45
圖3.9 GMR元件製作步驟…………………………………………...46
圖3.10 GMR元件之SEM圖…………………………………………47
圖3.11 GMR元件中光柵區域之SEM圖……………………………47
圖3.12 光柵側壁之SEM圖………………………………………….48
圖3.13 GMR元件成型圖…………………………………………….48
圖3.14 GMR量測系統……………………………………………….49
圖3.15 GMR元件量測與模擬之頻譜……………………………….50
圖3.16 GMR元件TE及TM之頻譜……………………………….50
圖3.17 GMR元件TM之頻譜……….……………………………….51
圖3.18 GMR元件TE之頻譜………..……………………………….51
圖3.19 斜向入射GMR元件之示意圖……………………………….52
圖3.20 GMR元件之角度容忍度(半高寬)………………………….52
圖3.21 GMR元件之角度容忍度(角度最小變異量)….…………….53
圖4.1 不同厚度之SiO2於GMR表面之穿透頻譜圖………………54
圖4.2 SiO2厚度對波長飄移之關係圖……………………………...54
圖4.3 SiO2沉積於週期為1.6μm之光柵…………………………..55
圖4.4 SiO2沉積於週期為0.8μm之光柵…………………………..55
圖4.5 SiO2厚度對波長飄移之量測與模擬關係圖………………...56
圖4.6 取對數之厚度與波長位移之關係圖………………………...56
圖4.7 DNA附著於GMR表面之過程……………………………...57
圖4.8 各DNA基因片段與其連結之示意圖……………………….57
圖4.9 偵測DNA附著步驟之頻譜圖……………………………….58
圖4.10 偵測DNA有雜交之頻譜圖………………………………….59
圖4.11 偵測DNA無雜交之頻譜圖………………………………….59
圖4.12 DNA雜交重複性實驗之流程……………………………….60
圖4.13 DNA雜交重複性實驗之量測結果………………………….61
圖4.14 DNA雜交重複性之波長飄移與時間關係圖……………….61
圖4.15 波長飄移和時間之斜率與DNA雜交重複性之關係圖…….62
圖5.1 GMR結合微流道系統設計………………………………….63
圖5.2 GMR微流道陣列多工系統設計…………………………….63

參考文獻

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指導教授

張正陽(Jeng-Yang Chang)

審核日期

2005-7-19

推文