博碩士論文 92226050 詳細資訊


姓名 丁于真(Yu-Chen Ting)  查詢紙本館藏   畢業系所 光電科學與工程學系
論文名稱 氮化鎵光子晶體共振腔
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摘要(中) 本論文中,以有限差分時域法與平面波展開法模擬分析氮化鎵光子晶體結構與特性,利用電子束微影技術定義出所設計尺寸,再以乾蝕刻方式將圖樣轉移至氮化鎵材料上,成功製作出氮化鎵二維光子晶體結構,在此利用二維光子晶體結構在平面上當作共振腔,有效抑制二維平面上之自發輻射,使光有效侷限於結構中缺陷的位置,並架設微光致螢光系統,量測氮化鎵二維光子晶體共振腔之光致螢光光譜,由最後結果可發現經由二維光子晶體共振腔的製作,其光致螢光光譜之譜線與未做光子晶體結構之氮化鎵光致螢光光譜譜線之明顯差異,
在此論文中成功量得氮化鎵光子晶體之缺陷模態。在共振波長的光譜強度明顯有增益現象並且半高寬縮小至約為3nm左右。
關鍵字(中) ★ 共振腔
★ 光子晶體
★ 氮化鎵
關鍵字(英) ★ GaN
★ resonator
★ Photonic crystal
論文目次 ? 摘要 I
? 圖目錄 IV
? 表目錄 XI
第一章 緒論 1
1.1 光子晶體簡介 1
1.2 光子晶體共振腔相關文獻 5
1.3 研究動機與目的 9
第二章 基本原理 10
2.1 平面波展開法 10
2.2 有限差分時域法 13
2.3 有效折射率計算方法 16
2.4 光子晶體共振腔Q值計算方法 19
第三章 氮化鎵光子晶體結構設計與模擬 20
3.1 有效折射率計算 20
3.2 氮化鎵光子晶體能帶結構 21
3.2 缺陷模態 27
3.4 Q值計算 39
3.5 模擬結果分析 49
第四章 氮化鎵光子晶體結構製程流程與分析 53
4.1 實驗製作流程 53
4.2 元件製程結果與分析 56
第五章 氮化鎵光子晶體量測與分析 60
5.1 光致螢光原理 60
5.2 量測系統架設-微光致螢光系統 60
5.3 室溫量測micro PL結果與討論 62
第六章 結論與未來工作 74
參考文獻 77
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指導教授 陳啟昌(Chii-Chang Chen) 審核日期 2005-6-29
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