博碩士論文 92246002 詳細資訊


姓名 郭倩丞(Chien-Cheng Kuo)  查詢紙本館藏   畢業系所 光電科學與工程學系
論文名稱 高密度分波多工器(DWDM)濾光片的應力與溫飄特性研究
(Research of the Stresses and Thermal Stabilities in the Dense-Wavelength-Division-Multiplexing (DWDM) Filters)
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摘要(中) 高密度分波多工器(DWDM)濾光片已廣泛應用於光纖通訊的系統之中,由於其層數多膜層厚,所造成的應力比一般的鍍膜產品大,且為提高光纖通訊系統之可靠度,溫度對於其光學穩定性的影響就顯得越來越重要,符合國際規範的DWDM100GHz濾光片,其溫飄值必須要小於1pm/℃。Takashashi[3]首先為溫飄分析提供理論模型,但由於光纖通訊系統的要求越來越嚴格,使得膜層數增加,造成的應力變化越來越大,必須考慮應力改變對光學厚度的影響,本論文提出理論公式,用以模擬應力及溫度對窄帶濾光片之中心波長的影響,並了解基板的熱膨脹係數,薄膜的折射率、楊氏模數、帕松比、熱膨脹係數及歸一化折射率溫度係數對其影響的程度,並輔以實際100GHz濾光片產品的結果比較,對於應力及溫度造成光學特性上的變化有更深層的了解,並可應用在厚膜或是薄基板的產品中,預測應力及溫度所造成光學特性上的變化。
摘要(英) Dense-wavelength-division-multiplexing (DWDM)filter is a very important component for optical fiber communication. DWDM filter fabricated by thin film coating is a type of narrow bandpass filter (NBPF). The stability and reliability of these applications are depended on the mechanical properties of the stresses, the Young’s modulus, Poisson ratio, Temperature coefficient of refractive index and the Coefficients of Thermal Expansion (CTE) of the thin films and their substrates. However if the substrate thicknesses were changed, the mechanical and optical properties of the thin films are also changed. Takashashi is first one to offer the theory model for the temperature stability of the center wavelength (TSCW). But the request for the optic fiber communication system is more difficult, the thickness of the DWDM filters increase. We must consider the effect of the stress changes on the DWDM filters.
In this paper we provide new formula to analyze the influence of the stresses and thermal stabilities in the Dense-Wavelength-Division-Multiplexing (DWDM) filters and compare the influence of Coefficients of Thermal Expansion (CTE) of the substrate, the Young’s modulus of thin film, Poisson ratio of thin film, Temperature coefficient of refractive index of thin film and the Coefficients of Thermal Expansion (CTE) of the thin films in real 100GHz filter result. We have more understanding to the influence of stress and temperature of the DWDM filters and can apply to the filters of thick thin film thickness or thin substrate. We can predict the change on the optics characteristic that the stress and temperature cause.
關鍵字(中) ★ 高密度分波多工器濾光片
★ 應力
★ 溫飄
關鍵字(英) ★ DWDM
★ stress
★ temperature stability of the center wavelength (
論文目次 摘要.....................................................................................................................Ⅰ
目錄....................................................................................................................Ⅳ
圖目錄.................................................................................................................Ⅵ
表目錄.................................................................................................................Ⅸ
第一章 緒論………………………………………………………….………..1
1-1 研究動機……………...………………………………...……………1
1-2 研究方法 5
1-3 論文架構………………………………………………..……..……..6
第二章 基本理論 7
2-1 DWDM濾光片理論及其設計和規格 7
2-1-1 Fabry-Perot之DWDM濾光片原理 7
2-1-2 DWDM濾光片設計 10
2-1-3 DWDM濾光片規格……………………………………….11
2-2 薄膜應力 14
2-3 薄膜應力文獻回顧………………………………………………..16
2-4 薄膜中的雙軸應力 18
2-5 多層膜之應力…………….……………………………………….21
2-6 光學厚度與應力及溫度的關係……………………………….….26
2-7 理論比較…………………………………………………………..29
2-7-1 與Takashashi[3]比較………………………………..……..29
2-7-2 與Kim及Hwangbo[27]比較……………………………….31
第三章 實驗架構.............................................................................................34
3-1 溫飄光譜量測系統 34
3-1-1 量測系統架構…………………………….………………34
3-1-2 光路調整方法……….…………………………………....35
3-1-3 光學系統要求…………………………………………….38
3-2 應力量測系統……………………………...……………………..41
3-2-1 顯微鏡干涉儀(MHT-Ⅲ WYKO)工作原理 41
3-2-2 WYKO系統架構與曲率量測 43
3-3 電子槍蒸鍍系統………..……………………………………...…45
3-4 DWDM濾光片製造流程……………………………………..…48
第四章 實驗結果與分析……………………...……………………………50
4-1 中心波長溫度飄移量與基板熱膨脹係數的關係…………….….50
4-2中心波長溫度飄移量與薄膜設計的關係…………………………58
4-3 光學厚度變化與應力的關係………………………...………....…62
第五章 結論 67
參考文獻 69
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指導教授 李正中(Cheng-Chung Lee) 審核日期 2007-7-23
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