高密度分波多工器(DWDM)濾光片的應力與溫飄特性研究

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：37

、訪客IP：3.138.114.198

姓名

郭倩丞(Chien-Cheng Kuo) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

高密度分波多工器(DWDM)濾光片的應力與溫飄特性研究
(Research of the Stresses and Thermal Stabilities in the Dense-Wavelength-Division-Multiplexing (DWDM) Filters)

相關論文

★ 半導體雷射控制頻率	★ 比較全反射受挫法與反射式干涉光譜法在生物感測上之應用
★ 193nm深紫外光學薄膜之研究	★ 超晶格結構之硬膜研究
★ 交錯傾斜微結構薄膜在深紫外光區之研究	★ 膜堆光學導納量測儀
★ 紅外光學薄膜之研究	★ 成對表面電漿波生物感知器應用在去氧核糖核酸及微型核糖核酸雜交反應檢測
★ 成對表面電漿波生物感測器之研究及其在生醫上的應用	★ 探討硫化鎘緩衝層之離子擴散處理對CIGS薄膜元件效率影響
★ 以反應性射頻磁控濺鍍搭配HMDSO電漿聚合鍍製氧化矽摻碳薄膜阻障層之研究	★ 掃描式白光干涉儀應用在量測薄膜之光學常數
★ 量子點窄帶濾光片	★ 以量測反射係術探測光學薄膜之特性
★ 嵌入式繼光鏡顯微超頻譜影像系統應用在口腔癌切片及活體之設計及研究	★ 軟性電子阻水氣膜之有機層組成研究

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

[檢視]

[下載]

本電子論文使用權限為同意立即開放。
已達開放權限電子全文僅授權使用者為學術研究之目的，進行個人非營利性質之檢索、閱讀、列印。
請遵守中華民國著作權法之相關規定，切勿任意重製、散佈、改作、轉貼、播送，以免觸法。

摘要(中)

高密度分波多工器(DWDM)濾光片已廣泛應用於光纖通訊的系統之中，由於其層數多膜層厚，所造成的應力比一般的鍍膜產品大，且為提高光纖通訊系統之可靠度，溫度對於其光學穩定性的影響就顯得越來越重要，符合國際規範的DWDM100GHz濾光片，其溫飄值必須要小於1pm/℃。Takashashi[3]首先為溫飄分析提供理論模型，但由於光纖通訊系統的要求越來越嚴格，使得膜層數增加，造成的應力變化越來越大，必須考慮應力改變對光學厚度的影響，本論文提出理論公式，用以模擬應力及溫度對窄帶濾光片之中心波長的影響，並了解基板的熱膨脹係數，薄膜的折射率、楊氏模數、帕松比、熱膨脹係數及歸一化折射率溫度係數對其影響的程度，並輔以實際100GHz濾光片產品的結果比較，對於應力及溫度造成光學特性上的變化有更深層的了解，並可應用在厚膜或是薄基板的產品中，預測應力及溫度所造成光學特性上的變化。

摘要(英)

Dense-wavelength-division-multiplexing (DWDM)filter is a very important component for optical fiber communication. DWDM filter fabricated by thin film coating is a type of narrow bandpass filter (NBPF). The stability and reliability of these applications are depended on the mechanical properties of the stresses, the Young’s modulus, Poisson ratio, Temperature coefficient of refractive index and the Coefficients of Thermal Expansion (CTE) of the thin films and their substrates. However if the substrate thicknesses were changed, the mechanical and optical properties of the thin films are also changed. Takashashi is first one to offer the theory model for the temperature stability of the center wavelength (TSCW). But the request for the optic fiber communication system is more difficult, the thickness of the DWDM filters increase. We must consider the effect of the stress changes on the DWDM filters.
In this paper we provide new formula to analyze the influence of the stresses and thermal stabilities in the Dense-Wavelength-Division-Multiplexing (DWDM) filters and compare the influence of Coefficients of Thermal Expansion (CTE) of the substrate, the Young’s modulus of thin film, Poisson ratio of thin film, Temperature coefficient of refractive index of thin film and the Coefficients of Thermal Expansion (CTE) of the thin films in real 100GHz filter result. We have more understanding to the influence of stress and temperature of the DWDM filters and can apply to the filters of thick thin film thickness or thin substrate. We can predict the change on the optics characteristic that the stress and temperature cause.

關鍵字(中)

★ 高密度分波多工器濾光片
★ 應力
★ 溫飄

關鍵字(英)

★ DWDM
★ stress
★ temperature stability of the center wavelength (

論文目次

摘要.....................................................................................................................Ⅰ
目錄....................................................................................................................Ⅳ
圖目錄.................................................................................................................Ⅵ
表目錄.................................................................................................................Ⅸ
第一章緒論………………………………………………………….………..1
1-1 研究動機……………...………………………………...……………1
1-2 研究方法 5
1-3 論文架構………………………………………………..……..……..6
第二章基本理論 7
2-1 DWDM濾光片理論及其設計和規格 7
2-1-1 Fabry-Perot之DWDM濾光片原理 7
2-1-2 DWDM濾光片設計 10
2-1-3 DWDM濾光片規格……………………………………….11
2-2 薄膜應力 14
2-3 薄膜應力文獻回顧………………………………………………..16
2-4 薄膜中的雙軸應力 18
2-5 多層膜之應力…………….……………………………………….21
2-6 光學厚度與應力及溫度的關係……………………………….….26
2-7 理論比較…………………………………………………………..29
2-7-1 與Takashashi[3]比較………………………………..……..29
2-7-2 與Kim及Hwangbo[27]比較……………………………….31
第三章實驗架構.............................................................................................34
3-1 溫飄光譜量測系統 34
3-1-1 量測系統架構…………………………….………………34
3-1-2 光路調整方法……….…………………………………....35
3-1-3 光學系統要求…………………………………………….38
3-2 應力量測系統……………………………...……………………..41
3-2-1 顯微鏡干涉儀(MHT-Ⅲ WYKO)工作原理 41
3-2-2 WYKO系統架構與曲率量測 43
3-3 電子槍蒸鍍系統………..……………………………………...…45
3-4 DWDM濾光片製造流程……………………………………..…48
第四章實驗結果與分析……………………...……………………………50
4-1 中心波長溫度飄移量與基板熱膨脹係數的關係…………….….50
4-2中心波長溫度飄移量與薄膜設計的關係…………………………58
4-3 光學厚度變化與應力的關係………………………...………....…62
第五章結論 67
參考文獻 69

參考文獻

[1] J. Minowa and Y. Fujii, “Subnanometer bandwidth interference filter for optical fiber communication systems”, Appl. Opt., 27, pp.1385-1386, 1988.
[2] H. Takashashi, “Temperature stability of thin-film narrow-bandpass filters produced by ion-assisted deposition”, SPIE Vol. 2253, pp. 1343-1353, 1994.
[3] H. Takashashi, “Temperature stability of thin-film narrow-bandpass filters produced by ion-assisted deposition”, Appl. Opt., 34, pp. 667-675, 1995.
[4] A. Zoller, R. Gotzelmann, K. Matl, and D. Cushing, “Temperature-stable bandpass filters deposited with plasma ion-assisted deposition”, Appl. Opt., 35, pp. 5609-5612, 1996.
[5] A. Zoller, R. Gotzelmann, and K. Matl, “Shift free interference coatings deposited with plasma ion assisted deposition”, presented at the OIC 95, Tucson, Arizona, 1995.
[6] “Generic Requirements for Fiber Optics Branching Components”, Bellcore GR-1209-CORE, Issue 2, February 1998.
[7] R. W. Hoffman, in Physics of Thin Films, Vol. 3, Academic Press: New York, p.211, 1966.
[8] 李正中, “薄膜光學與鍍膜技術” ,第五版, 藝軒圖書出版社, p.214-231,(2006).
[9] 朱正煒, “DWDM干涉濾光片之設計及製作”,光學工程第六十八期, 88年12月, P.40-45.
[10] R. W. Hoffman, in physics of nonmetallic Thin Films, edited by C. H. S.Dupuy and A. Cachard, Plenum Press: New York, p.273, 1976.
[11] K. L. Chopra, Mechanical effects in thin films, in Thin Film Phenomena, p.266, McGRAW -HILL: New York, 1969.
[12] G. Gore, “On the Properties of Electro-deposited Antimony”, Trans. Roy.Soc. (London), Part 1, p.185, 1858.
[13] E. J. Mills, “On Electrostriction”, Proc. Roy. Soc, 26, p.504, 1877.
[14] G. G. Stoney. “The tension of metallic films deposited by electrolysis”, Proc.Roy. Soc., A82, pp.172-175, 1909.
[15] K. G. Soderberg and A. K. Graham, “Stress in electro-deposits –Its significance”, Proc. Am. Electroplater’s Soc., 34, p.97, 1947.
[16] R. H. D. Barklie and H. J. Davies, “The effect of surface conditions and electrodeposited metal on the resistance of materials to repated stress”, Proc. Inst. Mech. Eng.,p.2731,1930.
[17] C.E. Heussner, A. R. Balden, and L. M. Morse, “Stress Data on Copper Deposits from Alkaline Baths”, Plating ,35, p.719, 1948.
[18] A. Brenner and S. Senderoff, “Calculation of stress in electrodeposits from the curvature of a plated strip “, J. Research of the Nat’l. Bureau of U. S. Standards, 42 (Research paper RP1954), pp. 105-123, 1949.
[19] N. N. Davidenkov, “Measurement of residual stress in electrolytic deposits”, Sov. Phys., 2, pp.1595-1598, 1961.
[20] C. H. Hsueh and A. G. Evans, “Residual Stresses in Metal/Ceramic Bonded Strips”, J. Am. Ceram. Soc., 68, pp.241-248, 1985.
[21] P. H. Townsend and D. M. Barnett, “Elastic relationships in layered composite media with approximation for the case of thin films on a thick substrate”, J. Appl. Phys. 62, pp.4438-4444, 1987.
[22] Claude A. Klein, “How accurate are Stoney’s eqution and recent modifications”, J. Appl. Phys. 88, pp. 5487-5489, 2000.
[23] C. H. Hsueh, “Modeling of elastic deformation of multilayer due to residual stresses and external bending”, J. Appl. Phys. 91, pp.9652-9656, 2002.
[24] N. H. Zhang and J. J. Xing, “An alternative model for elastic bending deformation of multilayered beams”, J. Appl. Phys. 100, pp. 103519, 2006.
[25] J. Jiang, J. J. Pan, J. Guo and G. Keiser, “Model for Analyzing Manufacturing-Induced Internal Stresses in 50-GHz DWDM Multilayer Thin-Film Filters and Evaluation of Their Effects on Optical Performances” J. Lightwave. Tech. 23, pp.495-503, 2005.
[26] C. Wang and Q. Ren, “Influence of stress on the transmission characteristics of multilayer thin films”, Appl. Opt. 45, pp.7858-7862, 2006.
[27] S. H. Kim and C. K. Hwangbo, “Derivation of the center-wavelength shift of narrow-bandpass filters under temperature change”, Opt. Exp. 12, pp.5634-5639, 2004.
[28] Steven L. Prins, Alan C. Barron, William C. Herrmann, John R. McNeil, “Effect of stress on performance of dense wavelength division multiplexing filters: optical properties”, Appl. Opt.43, 626-632(2004).
[29] Vittorio Bertogalli,E.U. Wagemann,EMMERICH Müller,Edgar Leckel, “Testing passive DWDM components：uncertainties in swept-wavelength measurement system”,OFC 2000.
[30] Paul J. Caber, Stephen J. Martinek, Robert J.Neimann, “A new interferometric profiler for smooth and rough surfaces”, WYKO Corporation 2650 E. Elvira Road Tucson,AZ 857

指導教授

李正中(Cheng-Chung Lee)

審核日期

2007-7-23

推文