磁流體旋塗不穩定之研究

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張昌霖(Chang-Lin Chang) 查詢紙本館藏

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機械工程學系

論文名稱

磁流體旋塗不穩定之研究

相關論文

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★ 彩色濾光片噴塗研究	★ 科氏力對不穩定手指狀之影響及光阻減量研究

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摘要(中)

摘要
半導體製程中，對於矽晶圓表層覆膜大多採用旋轉塗佈的方式進行，液體在旋轉塗佈的過程，因為離心力的作用，使得不穩定手指狀流會在連續薄膜波前處產生，如何針對不穩定手指狀流的產生機制加以控制更是目前的重點。
本實驗採用磁性流體作為實驗流體，觀察磁性流體與矽油兩者在旋轉塗佈製程上的差異性，實驗結果發現磁性流體如矽油一般，臨界半徑會隨 Boω 增加而呈現先遞減後增加的趨勢。但是，針對磁性流體而言，這種開口向上拋的曲線之反曲點卻有提前發生的現象；而兩實驗流體隨著Boω > 50 之後逐漸地有匯集的現象。此外，針對磁性流體外加磁場的實驗中發現，磁性流體液膜之臨界半徑特徵長度隨磁場增加而有減少的趨勢。而不穩定手指狀流的數目則隨磁場增加而有增加的現象。

關鍵字(中)

★ 旋轉塗佈
★ 不穩定

關鍵字(英)

論文目次

目錄
摘要……………………………………………………………………Ⅰ
致謝……………………………………………………………………Ⅱ
目錄……………………………………………………………………Ⅲ
表目錄…………………………………………………………………Ⅴ
圖目錄…………………………………………………………………Ⅵ
符號說明表……………………………………………………………XI
第一章緒論 ………………………………………………………1
1-1 前言 …………………………………………………………1
1-2 文獻回顧 ……………………………………………………2
1-2.1 旋轉塗佈相關文獻回顧 ………………………………2
1-2.2 風剪效應相關文獻回顧 ………………………………5
1-2.3 不穩定手指狀流相關文獻回顧 ………………………6
1-2.4 磁性流體相關文獻回顧 ………………………………10
第二章實驗設備與方法 ……………………………………………13
2-1 旋塗轉速控制系統 …………………………………………13
2-2 影像擷取系統 ………………………………………………15
2-3 垂直磁場產生系統 …………………………………………16
2-4 實驗方法 ……………………………………………………17
第三章結果與討論 …………………………………………………21
3-1 磁性流體與矽油之旋轉塗佈比較……………………………21
3-2 不同轉速對磁場作用下的磁流體旋塗之影響………………25
3-2.1 磁場的測定 ……………………………………………25
3-2.2 靜止狀態下磁場對磁流體液膜表面的影響 …………26
3-2.3 改變轉速對垂直磁場旋轉塗佈的影響 ………………27
3-3 固定轉速下垂直磁場大小對旋塗臨界半徑的影響…………29
第四章結論 …………………………………………………………32
參考文獻………………………………………………………………34
附表……………………………………………………………………39
附圖……………………………………………………………………41

參考文獻

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指導教授

周復初(Fu-Chu Chou)

審核日期

2005-7-11

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