博碩士論文 93226018 詳細資訊




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姓名 盧立瑋(Li-Wei Lu)  查詢紙本館藏   畢業系所 光電科學與工程學系
論文名稱 相位移動器校正之研究
(Calibration of the phase-shifting adapter)
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摘要(中) 相移精度於相移干涉術之量測,是最可代表樣品資料之可靠度。對利用相移干涉術來量測樣品之干涉儀而言,不準確之相移會在計算物體相位上產生誤差。本系統之相位移動器係由三個壓電致動器所構成,因為壓電致動器本身之差異與結構上受到不同應力之影響,在移動的過程中會產生移動不均的問題,意即在推進過程中改變參考面之法線向量,最直接的觀察方式為推動一週期後比較前後之干涉圖,干涉條紋有旋轉與間隔改變之現象,此現象亦反應在相位移之標準差。
針對此問題之解決方式,本論文提出一種校正相位移動器的方式,從理論推導出壓電致動器位移與條紋斜率之關係,從此關係中找出一特殊情況來校正,此方式利用條紋之變化來對壓電致動器之差異進行個別調校,從比對第一張與最後一張影像之差異變化,可發現利用此方法所得到之權重比例,的確改善了移動不均之現象。
摘要(英) The error of the movements of the phase-shifting adapter(PSA) determines the accuracy of measurement to a large degree. For large-apeture and weighty optical elements, we usually use an adapter with three PZTs to hold the tested optical element. It is very important to keep the adapter stretched as a flat. Otherwise, the shifting fringe patterns will rotate, and the distance between fringes will be changed. These phenomena will decrease the precision of phase-shifting interferometry.
In this thesis, a method to calibrate a phase-shifting adapter with three piezoelectric ceramics based on the relationship between the displacement of PZT and the slope of interference fringe is proposed to increase the testing precision of phase-shifting interferometer. Observing the first and the last interferograms, the unequal movement of the PSA is improved by this method.
關鍵字(中) ★ 相位移動器
★ 相位移校正
★ 壓電材料
關鍵字(英) ★ phase-shifting adapter
★ phase-shifting calibration
★ piezoelectric ceramic
論文目次 摘要.............................................................................................................I
致謝..........................................................................................................III
目錄..........................................................................................................IV
圖目錄.....................................................................................................VII
表目錄......................................................................................................XI
第一章 緒論..............................................................................................1
1.1 前言.....................................................................................................1
1.2 研究動機與目的.................................................................................2
第二章 理論與工作原理..........................................................................4
2.1 干涉儀工作原理.................................................................................4
2.1.1 光干涉原理....................................................................................4
2.1.2 相移干涉術....................................................................................7
2.1.3 各式相移演算法............................................................................8
2.1.3.1 三步相移演算法.......................................................................9
2.1.3.2 四步相移演算法.......................................................................9
2.1.3.3 Carré演算法.............................................................................10
2.1.3.4 五步相移演算法.....................................................................11
2.1.4 相位重建技術..............................................................................14
2.2 壓電致動器工作原理.......................................................................16
2.2.1 壓電材料......................................................................................17
2.2.2 壓電現象......................................................................................19
2.2.3 壓電材料之應用..........................................................................20
2.3 干涉圖像之處理...............................................................................22
2.3.1 中值濾波器................................................................................22
2.3.2 低通濾波器..................................................................................23
2.3.3 一種直線干涉圖之優化..............................................................23
2.3.4 二值化處理..................................................................................25
2.3.5 細線化處理..................................................................................26
2.3.6 計算斜率......................................................................................26
第三章 文獻探討....................................................................................28
3.1 採用適當之演算法...........................................................................28
3.1.1 線性誤差......................................................................................28
3.1.2 非線性誤差..................................................................................29
3.2 校正相位移動裝置...........................................................................31
3.2.1 光學條紋投射器之步進馬達......................................................31
3.2.2 干涉儀之相位移動器..................................................................32
3.3 直接計算相位變化...........................................................................34
第四章 相位移動器校正之理論............................................................36
4.1 建立PZT空間分佈...........................................................................36
4.1.1 一般分佈情況..............................................................................36
4.1.2 特殊分佈情況..............................................................................42
4.2 校正相位移動器之方法...................................................................44
第五章 模擬干涉條紋............................................................................46
5.1 模擬干涉條紋...................................................................................46
5.1.1 由光程差模擬干涉條紋..............................................................46
5.1.2 由條紋間隔與方向模擬干涉條紋..............................................46
5.2 模擬與實際比較...............................................................................47
5.3 模擬五步相移...................................................................................49
第六章 實驗與分析................................................................................50
6.1 實驗系統...........................................................................................50
6.2 實驗步驟...........................................................................................54
6.3 實驗結果...........................................................................................63
第七章 結論與未來展望........................................................................69
7.1 結論...................................................................................................69
7.2 未來展望...........................................................................................70
參考文獻..................................................................................................71
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[27]曾垂拱,葉格銘,“菲索干涉儀與壓電材料之晶圓表面量測”,國立台灣科技大學機械工程技術研究所碩士學位論文,民國九十二年。
指導教授 歐陽盟(Mang Ou-Yang) 審核日期 2006-7-23
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