博碩士論文 93323058 詳細資訊




以作者查詢圖書館館藏 以作者查詢臺灣博碩士 以作者查詢全國書目 勘誤回報 、線上人數:8 、訪客IP:18.204.56.104
姓名 蔡政芳(Cheng-Fang Tsai)  查詢紙本館藏   畢業系所 機械工程學系
論文名稱 狹縫式塗佈液珠對覆膜之影響
(Slot coating Bead Effect om the Film)
相關論文
★ 化學機械研磨流場模擬實驗研究★ 變轉速之旋轉塗佈實驗研究
★ 微小熱點之主動式冷卻★ 大尺寸晶圓厚膜塗佈
★ 科氏力與預塗薄膜對旋轉塗佈之影響★ 微液滴對微熱點之 冷 卻
★ 大尺寸晶圓之化學機械研磨實驗研究★ 液晶顯示器旋轉塗佈研究
★ 流體黏度對旋塗減量之影響★ 微熱點與微溫度感測器製作
★ 高溫蓄熱器理論模擬★ 熱氣泡式噴墨塗佈
★ 注液模式對旋轉塗佈之影響★ 磁流體旋塗不穩定之研究
★ TFT-LCD狹縫式塗佈研究★ 彩色濾光片噴塗研究
檔案 [Endnote RIS 格式]    [Bibtex 格式]    [相關文章]   [文章引用]   [完整記錄]   [館藏目錄]   至系統瀏覽論文 ( 永不開放)
摘要(中) 摘要
狹縫式塗佈技術過去廣泛的使用在各種不同產品的製造,包括膠帶、底片、軟性印刷電路板等方面,近年來由於液晶電視的需求量大增,帶動了國內外各大廠致力於LCD相關零組件的產品研發,其中LCD的彩色濾光片製程就是以狹縫式塗佈(Slot Coating)技術來完成光阻的塗佈,如何能使彩色濾光片的光阻使用量降低且提升其良率,這也是本實驗所研究的重點。為達到光阻減量及良率提升的目標,就必須找出狹縫式塗佈最佳的注液模式,藉由改變各種不同的塗佈參數如:操作參數、模具幾何設計參數及流體參數,以建立完整的塗佈視窗(Coating Window)。在塗佈的過程中,經由塗佈液珠(Coating Bead)的觀測,可以了解整個塗佈過程的行為及機制,而塗佈缺陷發生是判斷塗佈視窗的塗佈上限及塗佈下限的重要依據,本實驗所觀察到的塗佈缺陷有兩種,分別是肋形紋(Rivulet)及水窪(Pool)。在肋形紋及水窪缺陷發生前分別找出塗佈視窗的塗佈上限及下限,並觀察不同塗佈參數改變對塗佈液珠寬度的影響,最後觀察不同流率下輸入不同速度時好膜的缺陷長度。
摘要(英) Abstract
Slot coating is a common method in the manufacture of a wide variety of products, including tape, film, soft printing circuit board. Because the demand for the liquid crystal TV is heightened in recent years, every large company is devoted to the research and development of products of the relevant spare parts of LCD. The process of the color filter of LCD is completed by the slot coating. The goal of the research is to reduce to the photoresist and rise the yield rate. In order to reach the reduction of the photo resisting and raise the yield rate, it must find out the best injection model of the slot coating. By changing the variety of different coating parameter such as operate parameter, slot die parameter , and fluid parameter is to set up the intact coating window. We can realize that the whole behavior and mechanism in the coating process by observing the coating bead. The coating defects are the important characteristic to judge the upper and lower limit of the coating window. There are two kinds of coating defects in this experiment involving rivulet and pool. Before the rivulet and pool defects take place, we find out the upper limit and lower limit of the coating window. And observe he effect of the width of the coating bead in different coating parameter. Finally, we observe the fine defect length under the different coating speed and flow rate.
關鍵字(中) ★ 塗佈液珠
★ 塗佈視窗
★ 狹縫式塗佈
關鍵字(英) ★ coating bead
★ coating window
★ slot coating
論文目次 目錄
摘要 I
英文摘要 II
致謝辭 III
目錄 IV
表目錄 VI
圖目錄 VII
符號表 X
第一章 緒論 1
1-1 前言 1
1-2 研究動機 2
1-3 文獻回顧 4
1-3-1 液晶顯示器 4
1-3-2 彩色濾光片 7
1-3-3 濕式塗佈技術相關研究 9
1-3-4 狹縫式塗佈相關研究 10
第二章 實驗設備與方法 16
2-1 狹縫式塗佈機系統 16
2-2 狹縫式注液系統 20
2-3 影像擷取分析系統 21
2-4 實驗方法 22
第三章 實驗結果與討論 28
3-1 狹縫式塗佈缺陷觀察 29
3-2 狹縫式塗佈之塗佈視窗建立 31
3-2-1 流體黏度(μ)之影響 31
3-2-2 塗佈間隙(H)之影響 32
3-2-3 模具狹縫間隙(W)之影響 33
3-3 狹縫式塗佈液珠寬度觀察 34
3-3-1 塗佈速度(V)對塗佈液珠寬度(L)之影響 34
3-3-2 流體黏度(μ)對塗佈液珠寬度(L)之影響 35
3-3-3 塗佈間隙(H)對塗佈液珠寬度(L)之影響 36
3-3-4 模具狹縫間隙(W)對塗佈液珠寬度(L)之影響 37
3-4 狹縫式塗佈缺陷長度觀察 39
第四章 結論 40
參考文獻 42
參考文獻 參考文獻
1.P. Haaland , J. MacKibben ,and M. Parodi, “Art and Science of Thin Film Coating: a Progress Report”, Solid State Technology, Vol. 38, pp. 83-85 (1995)
2.S. Bagen, H. Melgaard, C. Minnich , C. Newquist, and G. Gibson , “Novel Low Cost Process Technologies for Application and Curing of Polyimide Films”, Int. J. of Microcircuits and Electronic Packaging, Vol. 19, pp.418-426 (1996)
3.石岱勳, 林景川和林惠儒, “平面顯示器技術未來趨勢 Flat Panel Display”, 龍璟文化業股份有限公司, pp. 6-17 (2002)
4.林金雀和黃國維, “我國平面顯示器用化學材料發展機會之探討”, 工業技術研究院產業經濟與資訊服務中心, pp. 1-35 (2002)
5.黃仲龍和廖顯杰, “次世代平面顯示器產品及生產技術發展策略研究”, 工業技術研究院產業經濟與資訊服務中心, pp. 1-10 (2002)
6.F. P. Fehlner, “Thin Films on Glass for Liquid Crystal Displays”, J. of Non-Crystaline Solids, Vol. 218, pp. 360-367 (1997)
7.M. Katayama, “TFT-LCD Technology”, Thin Solid Films, Vol. 341, pp. 140-147 (1999)
8.梁素真, “探索中、日、韓大型彩色濾光片產業現況與未來佈局”, 工業技術研究院產業經濟與資訊服務中心, pp. 1-9 (2002)
9. L. Landau and B. Levich, “Dragging of a Liquid by a Moving Plate”, Acta Physicochim. URSS, Vol.17, pp. 42-54 (1942)
10. K. J. Ruschak, “Limited Flow in a Pre-metered Coating Device”, Chemical Engineering Science, Vol.31, pp. 1057-1060 (1976)
11. B. G. Higgins and L. E. Scriven, “Capillary Pressure and Viscous Pressure Drop Set Bounds on Coating Bead Operability”, Chemical Engineering Science, Vol.35, pp. 673-682 (1980)
12. K. Y. Lee, L. D. Liu ,and T. J. Liu, “Minimum Wet Thickness in Extrusion Slot Coating”, Chemical Engineering Science, Vol.47, pp. 1703-1713 (1992)
13. E. B. Gutoff and C. E. Kendrick, “Low Flow Limits of Coatability on a Slide Coater”, AICHE J., Vol.33, pp.141-145 (1987)
14. T. M. Sullivan and S. Middleman, “ Film Thickness in Blade Coating of Viscous and Viscoelastic Liquids”, J. of Non-Newtonian Fluid Mech., Vol.21, pp. 13-38 (1986)
15. 朱文彬, “低黏度牛頓流體之預調式塗佈分析”, 國立清華大學化學工程研究所碩士論文 (1997)
16. 蔡境哲, “低黏度牛頓流體與含高分子添加劑水溶液之預調式塗佈分析”, 國立清華大學化學工程研究所碩士論文 (1998)
17. 林庭瑜, “高黏度塗佈液塗佈視窗之測定與分析”, 國立清華大學化學工程研究所碩士論文 (1999)
18. S. Bagen, H. Melgaard, C. Minnich, C. Newquist ,and G. Gibson, “Novel Low Cost Process Technologies for Application and Curing of Polyimide Films”, Int. J. of Microcircuits and Electronic Packaging, Vol.19, pp. 418-426 (1999)
19. Y. D. Shikhmurzaev, “Discrete Coating :How Does It Start? ”, 10th International Coating Science and Technology Symposium, (2000)
20. H. Nagai and L. E. Scriven, “Start-up of Slot Coating”, 10th International Coating Science and Technology Symposium, (2000)
21. R. H. Beck and F. N.J. Haven, “Extrusion Apparatus and Processes of Extruding ”, U.S. Patent 2,901,770 (1959)
22. K. A. Mainstone, “Internal and External Combining System for Slot Die Co-extrusion”, AGARD Conference Proceedings, Vol.65, pp. 47-52 (1978)
23. N. Chino, Y. N. Shibata, T. Hiraki ,and T. Sato, “Extrusion Type Coating Head for Coating A Magenic Recording Medium,” U.S. Patent 5,072,688 (1991)
24. M.Haberer, G. Zak, C. B. Park, M. Paraschivoiu ,and B. Benhabib, “Fluid Mechanics of Slot-Coating in Photopolymer-Based Rapid Composites Manufacturing”, Journal of Mechanical Engineering Science, Vol.217, pp. 65-80 (2003)
25. S. F. Kistler and P. M. Schweizer, “Liquid Film coating ”, London : Chapman and Hall, Chapter 6 (1997)
26. 吳亭侑,“TFT-LCD狹縫式塗佈研究”,國立中央大學機械工程研究所碩士論文 (2005)
指導教授 周復初(Fu-Chu Chou) 審核日期 2006-6-28
推文 facebook   plurk   twitter   funp   google   live   udn   HD   myshare   reddit   netvibes   friend   youpush   delicious   baidu   
網路書籤 Google bookmarks   del.icio.us   hemidemi   myshare   

若有論文相關問題,請聯絡國立中央大學圖書館推廣服務組 TEL:(03)422-7151轉57407,或E-mail聯絡  - 隱私權政策聲明