條紋式塗佈製造彩色濾光片研究

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姓名

陳欣志(Hsin-Chih Chen) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

條紋式塗佈製造彩色濾光片研究
(Stripe Coating for Manufacturing Color Filter)

相關論文

★ 化學機械研磨流場模擬實驗研究	★ 變轉速之旋轉塗佈實驗研究
★ 微小熱點之主動式冷卻	★ 大尺寸晶圓厚膜塗佈
★ 科氏力與預塗薄膜對旋轉塗佈之影響	★ 微液滴對微熱點之冷卻
★ 大尺寸晶圓之化學機械研磨實驗研究	★ 液晶顯示器旋轉塗佈研究
★ 流體黏度對旋塗減量之影響	★ 微熱點與微溫度感測器製作
★ 高溫蓄熱器理論模擬	★ 熱氣泡式噴墨塗佈
★ 注液模式對旋轉塗佈之影響	★ 磁流體旋塗不穩定之研究
★ TFT-LCD狹縫式塗佈研究	★ 彩色濾光片噴塗研究

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至系統瀏覽論文 ( 永不開放)

摘要(中)

本研究主要目地是改進現有的彩色濾光片的製程，將結合狹縫式塗佈與噴墨式塗佈之特性，開發出條紋式塗佈設備及研究，用以研發出製造彩色濾光片之新塗佈方法。主要以條紋式塗佈法來製造彩色濾光片，開發出條紋式塗佈機台，採用精密加工自行設計製造塗佈模組及微機電製程製造Black Matrix。在實驗過程中利用塗佈模組產生塗佈條紋於Black Matrix上，使其披覆實驗所產生的條紋，在適當實驗條件控制下，便可成功得到以微小條紋塗佈彩色濾光片之研究結果。除此之外，在建立條紋式塗佈視窗上，利用不同幾何條件的塗佈模組進行研究，進而定義出塗佈缺陷，如過量、斷線等，完成塗佈流率-塗佈速度塗佈視窗及理論塗膜厚度-塗佈速度塗佈視窗。透過條紋式塗佈及塗佈視窗研究，希冀能有效提高產能，廣泛應用於彩色濾光片的製程，或相關高科技產業。

摘要(英)

In this study, a method of stripe coating combining the characteristics of slot coating and ink-jet printing is investigated to improve the production of color filters. And a mechanism for stripe coating is developed through the experiments. At first, to construct the machine for stripe coating, a module of coating system is made by precision machinery and a glass substrate is produced with MEMS techniques. Experimentally, micro stripes could be coated well on the substrate under appropriate conditions. Moreover, coating windows are figured with parameters of flow rate, coating speed, and theoretical film thickness to define the defects. With the investigation of the feasibility according to coating windows, the method of stripe coating could be applied in a better manufacturing process of color filter for the industry of TFT-LCD.

關鍵字(中)

★ 彩色濾光片
★ 條紋式塗佈
★ 彩色光阻液

關鍵字(英)

★ Color filter
★ Stripe coating

論文目次

中文摘要 I
英文摘要 II
誌謝 III
目錄 IV
表目錄 VI
圖目錄 VII
符號說明 X
壹序論 1
1-1 研究背景 1
1-2 研究動機 3
貳文獻回顧 4
2-1 彩色濾光片製程技術相關研究 4
2-2 濕式塗佈技術相關研究 7
2-3 噴墨塗佈原理相關研究 10
2-4 條紋式塗佈相關研究 13
参實驗設備及步驟 14
3-1 實驗設備 14
3-1-1條紋式塗佈模組 14
3-1-2塗佈液 15
3-1-3供液系統 16
3-1-4 Black Matrix 16
3-1-5移動塗佈模組系統 17
3-1-6手動微調定位系統 17
3-1-7影像擷取系統 18
3-2 實驗步驟 19
肆結果與討論 20
4-1 比較塗佈模組幾何不同液珠型態 21
4-1-1觀察噴孔表面幾何對於塗佈液珠成長的影響 21
4-1-2觀察塗佈模組與BM間之塗佈液珠型態 22
4-2 塗佈缺陷觀察 23
4-3 比較幾何條件不同之塗佈模組對塗佈視窗影響 23
4-3-1平齒塗佈模組之塗佈視窗 23
4-3-2比較凸齒與平齒不同在塗佈視窗的影響 24
4-4 比較不同實驗模式下塗佈模組之塗佈視窗 26
4-5 凸齒塗佈模組之計算塗佈膜厚研究 26
伍結論 28
參考文獻 30
附表 33
附圖 36

參考文獻

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指導教授

周復初(Fu-Chu Chou)

審核日期

2006-7-1

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