雷射干涉儀於共焦顯微系統之軸向定位控制

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姓名

臧志仁(Chih-Jen Tsang) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

雷射干涉儀於共焦顯微系統之軸向定位控制
(Using Interferometer to Control Axial Position in Confocal Microscope)

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摘要(中)

本文架設一套差動式共焦顯微系統，並設計一模糊滑動控制器來抑制共焦顯微系統中掃描平臺的軸向擾動量。系統以麥克森干涉儀為感測器的位置回授裝置，實驗驗證，控制器可有效抑制12dB軸向擾動量，使掃描平臺動態定位穩態誤差小於25nm以下。
共焦顯微系統系統的縱向位移反應曲線斜率為2.03/?m，在考慮0.3%光源雜訊下，具有4nm的軸向解析度。本文選用鋁鍍膜試片作為樣本，經由自行架設的共焦顯微系統，經光強度-階高換算測得試片表面階高為369.4nm。

摘要(英)

In thesis , A differential co confocal microscopy, which with a fuzzy controller for suppressing the longitudinal disturbance of scanner in confocal microscopy, was developed. The system use Michelson interferometer as position control sensor. The experimental result shows that the fuzzy controller is effective in 12dB of the longitudinal disturbance suppression. And the system’’s position error is within 25nm.
The experimental result shows that the slop of the intensity versus longitudinal displacement (SILD) curve is enhanced to 2.03/?m. To consider 0.3% noise in the system, a depth resolution as high as 4 nm has been achieved. A al-coating step height was measured. According to the difference of intensity and the SILD, a 369.4 nm step height was obtained.

關鍵字(中)

★ 共焦顯微術
★ 干涉術
★ 模糊滑動控制
★ 精密定位控制

關鍵字(英)

★ Confocal microscope
★ Interferometry
★ Fuzzy slidi

論文目次

中文摘要………………………………………………………………I
英文摘要………………………………………………………………II
致謝…………………………………………………………………III
目錄…………………………………………………………………….IV
圖目錄………………………………………………………………..VIII
表目錄………………………………………………………………..X
第一章諸論……………………………………………………………1
1-1前言…………………………………………………………1
1-2研究動機與目標……………………………………………2
1-3文獻回顧……………………………………………………4
1-4論文架構……………………………………………………6
第二章共焦顯微鏡掃描平臺軸向定位設計原理……………………7
2-1共焦顯微術…………………………………………………7
2-2雷射干涉儀定位控制系統架構……………………………13
2-3共焦顯微鏡及掃描平臺定位系統架構……………………17
2-3-1 系統元件規格…..……………………………20
2-3-2 掃描系統……………………………………..22
第三章控制系統原理與方法…………………………………………25
3-1 模糊滑動控制架構………………………………………26
3-2 滑動平面規劃……………………………………………27
3-2-1 滑動模態控制理論…………………………………27
3-2-2 滑動條件……………………………………………30
3-2-3 等效控制……………………………………………30
3-2-4 迫近條件……………………………………………31
3-3 模糊控制……………………………………………………34
3-3-1 模糊控制系統架構…………………………………34
3-3-2 定義變數……………………………………………35
3-3-3 模糊化機構…………………………………………36
3-3-4 模糊知識庫…………………………………………38
3-3-5 決策邏輯……………………………………………40
3-3-6 解模糊化機構………………………………………42
3-3-7 參數、設定…………………………………43
第四章系統鑑別與控制模擬………………………………………44
4-1 ARX模型……………………………………………44
4-2 系統鑑別實驗……………………………………………51
4-2-1 鑑別實驗裝置………………………………………51
4-2-2 鑑別過程與結果分析………………………………52
4-3 模糊滑動控制模擬………………………………………55
4-3-1 模糊滑動控制器計……………………………………55
4-3-2 控制力模擬…………………………………………57
第五章實驗步驟與結果討論……………………………………63
5-1量測與控制步驟流程……………………………………63
5-2共焦系統軸向解析力分析………………………………66
5-3 定位控制結果分析………………………………………72
5-3-1 軸向擾動量…………………………………………72
5-3-2 軸向擾動定位控制…………………………………74
5-4試片量測結果與分析……………………………………79
第六章結論………………………………………………………87
參考文獻……………………………………………………………..88
附錄一掃描平臺系統鑑別程式……………………………………90
附錄二作者相關著作……………………………………………….91

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指導教授

李朱育(Ju-Yi Lee)

審核日期

2006-9-20

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