| 摘要(英) |
Recovery Investigation Of The Chemical Mechanical Polishing Slurry And Slurry Empty Drum
Abstract
The increasing demand of CMP slurry tanks or drums is proportion to the increasing demand of CMP process capacity. General speaking, there are two types of slurry containers. One is 200-liter PE plastic drum with small opening. Another one is 1000-liter cubic-frame drum. The acid or base slurries are pumped out to a large central supply tank and then supplied to the CMP tools for process. The treatment of these empty drums and residual slurries is the research target.
The research method is to proceed with the recovery operation procedure on-site for 12 weeks to gather data and statistics. The mass balance demonstrates the recovery is practicable. The inner of empty slurry drums are well cleaned first. And then the residual slurries are collected and recovered as raw materials by adding and mixing. The major conclusion of the research is as following: The empty drums and residual slurries are 78.8 tons, which empty drums are 38 tons, residual slurries are 40.8 tons. After the recovery operation procedure on-site, 26.4 tons of slurries are recovered, and produced 22.01 tons of potassium silicate, 174.7tons of waste water and 3.6 tons of sludge at the same time. In the research, 5% aluminum oxide in acid slurries can not react and generate something useful. So the residual aluminum oxide solution are drained to sludge tanks and dewatered, then the sludge are filled in containers waiting for treatment. The search result shows the cleaned empty drum can meet the product filling requirements, and recovered slurry can meet the industrial specifications. So the reuse of empty slurry drums and the recovery of residual slurries are practicable, and they are positive in industrial waste reduction and resource recovery. |
| 參考文獻 |
參考文獻
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