利用Hartmann-Shack波前量測儀重建波前像差

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姓名

李孟錡(Meng-Chi Li) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

利用Hartmann-Shack波前量測儀重建波前像差
(Wavefront Aberrations Reconstruction by Hartmann-Shack sensor)

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摘要(中)

1994年，Liang首次將Hartmann Shack波前量測技術應用在自適應光學。近年來，這項技術廣泛的使用在人眼屈光手術(LASIK)上，其精準度是值得本文來研究與探討。
本文主要分成兩部份，第一部份是利用光學軟體來模擬Hartmann-Shack波前量測儀並且加入架設儀器容易產生的誤差源來分析和討論系統誤差。第二部份是自行架設Hartmann-Shack波前量測儀，利用透鏡和反射鏡取代人眼，光波經過透鏡系統和Hartmann-Shack波前量測儀將波前聚焦在CCD上，分析CCD上的影像計算出Zernike係數重建出波前。最後我們將Hartmann-Shack波前量測儀波前重建之結果與Zygo干涉儀量測結果比較，兩波前的誤差RMS為0.035λ，然而考慮tilt是架設儀器產生的像差，將x和y方向的tilt扣除，其誤差RMS降低為0.025λ。

摘要(英)

The Hartmann-Shack wavefront measurement of adaptive optics was first brought up by Liang in 1994, and it was widely used in LASIK surgery recently. The accuracy of the Hartmann-Shack wavefront measurement technique was discussed in this research.
The analysis of Hartmann-Shack sensor errors was composed of two parts. The first part was simulted by software including man-made errors and system errors. The second part was the establishment of the whole system including HSS and one reflective mirror. The Hartmann-Shack sensor contained micro-lens array and CCD. In this setup, the light is reflected from the mirror, passing through the test lens and micro-lens array, and finally focused on CCD. We analyzed the images captured by CCD, calculated the Zernike coefficients and reconstructed to wavefront. The RMS error of the wavefront reconstructed by the system compared to Zygo interferometer was 0.035λ. Moreover, the RMS error can be reduced to 0.025λ after deducting the tilt aberration in the x and y directions.

關鍵字(中)

★ 波前像差
★ Hartmann-Shack波前量測儀
★ Zernike多項式

關鍵字(英)

★ Aberration
★ Hartmann-Shack sensor
★ Zernike polynomial

論文目次

摘要 I
ABSTRACT II
第一章緒論 1
1.1 研究動機 2
1.2 歷史回顧 3
1.3 研究範圍 7
第二章理論分析 8
2.1 像差幾何理論 8
2.2 ZERNIKE多項式 19
2.3 HS波前量測儀原理 24
第三章光學模擬 27
3.1 模擬波前重建演算法 27
3.2 光學模擬(ASAP) 34
3.3 模擬HSS重建結果 39
3.4 模擬結果討論 45
第四章儀器架設與實驗量測 46
4.1 實驗儀器架設 46
4.2 實驗量測 49
4.3 量測結果 51
第五章結論 58
參考文獻 60

參考文獻

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指導教授

李正中(Cheng-Chung Lee)

審核日期

2007-7-23

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