以氬離子雷射對玻璃材料加工之研究

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姓名

許畯珽(Chun-ting Hsu) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

以氬離子雷射對玻璃材料加工之研究
(laser micromachining of glass with argon laser)

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摘要(中)

本論文以波長為514奈米的氬離子連續波雷射，搭配數值孔徑（NA）為0.55的物鏡，對「GLS玻璃」、「BIN850玻璃」進行雷射加工，利用改變雷射偏極化方向、平台移動速度、雷射脈衝寬度、雷射加工方式及雷射光功率來探討各種雷射加工製程對樣品產生的影響。
在雷射加工過程中發現，該雷射對「GLS玻璃」產生凹陷的結構變化，而「BIN850玻璃」則是產生突起的結構變化，其中「GLS玻璃」的臨界損壞值為17kJ/cm2，「BIN850玻璃」的臨界損壞值為15kJ/cm2。不同加工方式對樣品造成的截面形狀也有所差異。在分析折射率改變的過程，以波長為1550奈米的雷射光斜向入射至加工與未加工之「GLS玻璃」，並量測其反射光強，再藉由菲涅耳方程式（Fresnel equation）計算其折射率。而加工過程對於「GLS玻璃」造成負的折射率變化為-0.406～-0.449。

摘要(英)

In this thesis, argon ion continuous wave laser with wavelength at 514nm is focused on the surface of the GLS glass and BIN850 glass by an objective lens (NA=0.55) to do laser-machining. The performances of laser-machining is discussed by various light sources and conditions, such as polarization state, pulse width, average power of the laser, and the speeds of the 3D scanning stage.In the process of the laser-machining, the results are different between GLS glass and BIN850 glass, in which the former generates valleys and the latter bumps, and the damage threshold of GLS glass is 17kJ/cm2, the damage of BIN850 glass is 15kJ/cm2. And dissimilar methods of laser-machining produce dissimilar cross sections. In order to determine the difference of index of refraction produced by laser-machining, the laser (wavelength is 1550nm) oblique incident to GLS glass and machined GLS glass. And we measure the reflected power. Then we calculate the index of refraction by Fresnel equation. We find the process of laser-machining cause negative index change to GLS glass is -0.406～-0.449。

關鍵字(中)

★ 雷射加工
★ 玻璃

關鍵字(英)

★ glass
★ laser micromachining

論文目次

摘要......................................................I
Abstract.................................................II
目錄....................................................III
圖目錄....................................................V
表目錄.................................................IX
第一章緒論………………………………………………………… 1
1-1 前言…………………………………………………………… 1
1-2 研究背景………………………………………………………3
1-2.1文獻回顧……………………………………………………3
1-2.2雷射加工的發展背景………………………………………6
1-3 動機……………………………………………………………9
1-4 論文大綱與架構………………………………………………9
第二章雷射加工原理及方式………………………………………10
2-1 雷射加工的機制………………………………………………10
2-2 雷射加工尺度的影響因素……………………………………14
2-3 雷射加工方式…………………………………………………21
2-3.1 雷射直寫…………………………………………………21
2-3.2 雷射自寫…………………………………………………23
第三章樣品製作與結果分析………………………………………26
3-1 材料介紹………………………………………………………26
3-1.1 BIN850玻璃………………………………………………26
3-1.2 鎵鑭硫化物玻璃…………………………………………27
3-2 製作流程………………………………………………………31
3-3 結果分析………………………………………………………32
3-3.1 偏極化方向分析…………………………………………33
3-3.2 移動速度分析……………………………………………35
3-3.3 雷射脈衝寬度分析………………………………………38
3-3.4 加工方式分析……………………………………………39
3-3.5 臨界損壞值分析…………………………………………40
第四章結論…………………………………………………………44
參考文獻………………………………………………………………45

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指導教授

戴朝義(Chao-Yi Tai)

審核日期

2007-7-21

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