電校式電阻感測器校正方法之研究

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姓名

張明化(Ming-Hua Chang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

電校式電阻感測器校正方法之研究
(Research of microbolometer calibration by electrical calibration method.)

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摘要(中)

熱型紅外線感測器與量子型紅外線感測器相比，雖然反應時間較慢、靈敏度較低，但其可操作在室溫環境下，因此可以擺脫低溫冷卻系統，降低其系統的製作成本、體積及功率消耗。近年來隨著製程、微機電及材料科技的進步，使得熱型紅外線感測器的效能得以提升，增加其應用價值。
在本論文中將介紹以microbolometer 為偵測器的熱型紅外線感測系統及讀取電路架構，並進行讀取電路之設計，此設計是以Wheatstone bridge與Feedback balance circuit方式來讀取感測器所吸收紅外線的能量。
吾人採用友力微系統製造公司提供的50μm×50 microbolometer，操作電壓為單電源0.5伏特，所欲讀取之microbolometer的電阻約為220kΩ，TCR 為-0.02/K，讀取電路輸出結果為29.53μV/℃左右。

摘要(英)

Thermal detectors have slow response time and low sensitivity compared with photo detectors, but they can operate in room temperature. For this reason, thermal detectors can get rid of the expensive cryogenic cooling system and reduce the system cost, volume and power consumption. In recent years, by the progressing of fabrication, micromachining and material technologies, these will improve the performance of thermal detectors and increase their applications.
In this thesis, we will present a thermal detecting system and the architecture of its readout circuit, which utilizes the microbolometer detector. The readout circuit is designed by using Wheatstone bridge and Feedback balance configuration to read out the infrared energy that is absorbed by the microbolometer.
Based on the microbolometer provided by UNIMEMS. A single power supply of 0.5V is used in these two circuits. The microbolometer with resistance of 220 kΩ and TCR of -0.02/K is used in detecting , and the output result of the readout circuit is about 29.53μV/℃.

關鍵字(中)

★ 讀取電路
★ 微輻射感測器

關鍵字(英)

★ Read out circuit
★ Microbolometer.

論文目次

摘要.............................................I
致謝........................................... IV
目錄.............................................V
圖目錄........................................VIII
表目錄..........................................XI
第一章序論......................................1
1.1 前言...................................1
1.2 研究目的與動機.........................1
1.3 論文架構...............................3
第二章紅外線感測系統............................4
2.1 輻射理論.....................................4
2.2 紅外線之簡介.................................9
2.3 紅外線感測器................................10
2.3.1 紅外線感測器之分類.......................10
2.3.2 熱型紅外線感測器之種類與比較.............11
2.3.3 為輻感測器之介紹.........................13
2.4 熱輻射傳導之推導............................17
2.5 系統架構....................................18
2.6 電校式原理..................................19
第三章讀取電路之設計...........................21
3.1 訊號讀取原理及設計考量......................21
3.2 基本讀取電路................................22
3.3 非理想效應之考量............................26
3.4 惠斯頓電橋工作原理..........................30
3.5 Feedback平衡電路工作原理...................31
3.6 放大電路設計................................32
3.7 電校式電路..................................35
第四章實驗與量測...............................37
4.1 實驗裝置....................................37
4.1.1 鎖相放大器原理...........................38
4.1.2 真空腔體.................................38
4.1.3 熱電致冷片...............................40
4.1.4 PID溫度控制原理.........................42
4.1.5 黑體爐...................................45
4.2 量測方法與結果..............................46
4.2.1 惠斯頓電橋...............................46
4.2.2 Feedback平衡電路........................50
4.3 量測結果分析................................53
第五章結論與未來展望...........................57
5.1 實驗結論....................................57
5.2 未來展望....................................57
參考文獻.................58

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指導教授

歐陽盟(Mang Ou-Yang)

審核日期

2007-10-10

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