博碩士論文 943207002 詳細資訊




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姓名 吳昇翰(Sheng-Han Wu)  查詢紙本館藏   畢業系所 光機電工程研究所
論文名稱 導電平板之定頻掃描方法研究
(The Research of Scanning on a Conducting Plate using Constant Frequency)
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摘要(中) 為了取得電極間的距離進而控制電鍍的程序因此進行了電鍍時的溶液電阻量測研究,我們發現使用頻率為90kHz或是更高頻率之交流測試訊號可以使得電雙層電容與極化電阻相對於存在於電極間之溶液電阻而言變得可以忽略。因此,溶液阻抗的量測變得可行。
當包覆在粗的塑脂絕緣鞘中的細電極在近距離面對導電平板,因為狹窄通道效應會限制了有效的導通區域為電極下的截面積,因此有效的溶液電阻與間距會呈現一負相關。對125uM直徑的電極而言,間距在150μm以下都會有通道效應。藉此關係可以進行精密的導體表面輪廓掃描。
當電極與平板陰極的距離大於150uM以上,或者當析出之針狀物高度大於這個值以後,容液電阻值與電極間距的關係不再明顯,而不像導線中帶電粒子有集中式的通道而呈現與長度有正比的關係。因而無法用溶液電阻值來反映電極間距。
摘要(英) Studying the measurement of solution resistance in electro-plating so as to derive the information on the distance between electrodes for the control of the electro-plating process, we found an AC test signal of frequency 90KHz or higher renders the impedence of the double layer capacitance and the polarization resistance negligible to the solution resistance between the electrodes. Therefore, the measurement of solution impedance becomes possible.
When a thin electrode is insulated by a thick epoxy sheath and with the tip face of the electrode brought very close to a flat conducting plate electrode, channel effect would constrain the effective conducting section to the area directly underneath the electrode tip. The effective solution resistance and distance between electrodes exhibit a negative correlation. As the gap distance becomes larger, the conducting cross section becomes wider and the solution resistance becomes smaller. For an electrode of 125uM, the channel effect is apparent in gap shorter than 150uM. Precision surface shape scanning was developed applying this discovery.
When the distance between the electrode and the plate electrode becomes bigger than 150uM, or when the height of the deposit grows longer than this value, the solution resistance becomes irrelevant to the distance between the electrodes. The channel for catalytic ions is distributed throughout the space around the electrodes, unlike the conducting wire constraining the conduction evenly in the cross section of the conductor. Therefore, it is ineffective to derive gap distance from the solution resistance.
關鍵字(中) ★ 溶液電阻
★ 電雙層電容
★ 極化電阻
★ 頻率響應
★ 電極間距
★ 微陽極電鍍
關鍵字(英) ★ micro anode guided electroplating
★ electrodes distance
★ frequency response
★ polarization resistance
★ solution resistance
★ double-layer capacitance
論文目次 論文摘要 I
致謝 II
目錄 III
圖目錄 V
表目錄 VIII
第一章 緒論 1
第一節 背景說明: 1
第二節 需求說明: 2
第三節 前案說明: 2
第四節 本文貢獻: 3
第五節 論文架構: 3
第二章 電化學交流阻抗理論 4
第一節 電化學槽之等效電路模型 4
2.1.1 Randles Cell 等效電路模型 6
2.1.2其他Schematic Diagram 7
第二節 電化學交流阻抗量測理論與方法 10
2.2.1交流阻抗量測理論 10
2.2.2量測方法介紹 13
第三章 系統架構 16
第一節 系統目的 16
第二節 系統架構與模組 16
第三節 系統規格: 18
第四節 系統各硬體模組說明: 18
3.4.1 PC端控制與數據處理模組 19
3.4.2 DSP核心控制模組 20
3.4.3 恆電位/電流儀 21
3.4.4 頻率響應分析儀 23
3.4.5 三軸微步進馬達驅動模組 26
第四章 實驗設計與討論 29
第一節 實驗設置 29
4.1.1 實驗器材准備 29
4.1.2 實驗測試流程 31
4.1.3 Dummy測試實驗 33
4.1.4 Dummy Cell等效元件改變量測 37
第二節 掃描測試: 39
4.2.1 電化學槽交流阻抗測試 39
4.2.2 電化學槽定頻交流掃描測試 41
4.2.3 未加工之導電平板高頻交流阻抗分析 50
4.2.4 穿孔加工之導電平板高頻交流阻抗分析 52
第五章 結論 59
第一節 本文貢獻 59
第二節 未來展望 59
參考文獻 60
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指導教授 葉則亮(Tse-Liang Yeh) 審核日期 2007-7-30
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