博碩士論文 952206051 詳細資訊




以作者查詢圖書館館藏 以作者查詢臺灣博碩士 以作者查詢全國書目 勘誤回報 、線上人數:3 、訪客IP:18.207.240.35
姓名 蔡永勝(Yung-Sheng Tsai)  查詢紙本館藏   畢業系所 光電科學與工程學系
論文名稱 單頻位移與傾角量測干涉儀
(Quadrature Homodyne Displacement and Tilt Measuring Interferometer)
相關論文
★ 中小型光學鏡組之高密度全場波前量測★ 使用液晶空間光線調制器之相移式光柵-十字狹縫量測裝置
★ 全像場同時取像像差量測★ 廣角物鏡之相對照度探討及其設計應用
★ 新型零後焦長太陽能集光器的設計★ 相移式干涉儀之系統校正及量測軟體的撰寫
★ 非球面干涉儀之離軸對心校正★ 高數值孔徑顯微物鏡設計
★ Double Zernike Polynomial 校準光學系統★ 薄型化光展量疊加太陽能集光器
★ A Similarity-Guided Spots Sorting Method to Increase the Dynamic Range of a Shack Hartmann Sensor★ 雷射微型投影機波前量測技術
★ 旋轉掃描式非球面干涉儀之演算法開發及應用★ 校準低敏型Shack-Hartmann波前感測器
★ 利用Slanted-edge方法以及相位回復演算法量測光學系統的成像像差★ 非準直系統下Shack-Hartmann波前檢測器的校正補償
檔案 [Endnote RIS 格式]    [Bibtex 格式]    [相關文章]   [文章引用]   [完整記錄]   [館藏目錄]   [檢視]  [下載]
  1. 本電子論文使用權限為同意立即開放。
  2. 已達開放權限電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。
  3. 請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。

摘要(中) 本論文描述一單頻雷射干涉儀,此干涉儀可同時量測待測物的鏡面位移量及傾角,並藉由一嶄新的非線性誤差補償方法,提高其位移量測精準度。
此干涉儀為一九十度相位差偵測系統架構,擁有更為簡易的架構以及更小之體積,不同以往的是只以單一雷射光束量測,達到同時量測位移與傾角的功能。
我們所發展的相位誤差補償方法,能有效消除干涉儀中的非線性特性,與傳統之橢圓擬合之方法相比,新的方法在訊號之相位變化較小及雜訊較大的情況之下,所求得之相位較舊的方法更為精確。
經實驗結果顯示,經過補償運算後,此干涉儀之非線性可以有效修正,可測得位移量測之準確度為0.6奈米。而用來感測待測鏡面之傾斜的四象限二極體的最小可解析之橫向位移量為2微米。
摘要(英) This thesis describes a homodyne interferometer that could measure the displacement and tilt of test mirrors. The accuracy of displacement measurement could be enhanced by a novel nonlinearity compensation method.
This interferometer adopts quadrature detection system with simpler setup and less system volume. It could measure not only the displacement as usual, but also the tilt motion of target by just a single laser beam.
The phase error compensation method developed in the dissertation could correct nonlinearity efficiently. Compare with the conventional ellipse fitting method, the new method could acquire more accurate result than conventional one under less phase variation and noisy conditions.
Experiment result demonstrates that after applying compensation, the nonlinearity could be compensated correctly. The precision of displacement measurement could achieve to 0.6nm, and the resolution of quadrant detector used for tilt measurement can reach to 2μm.
關鍵字(中) ★ 位移量測
★ 干涉儀
關鍵字(英) ★ interferometer
★ displacement measurement
論文目次 摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 viii
一、 緒論 1
1-1研究背景與目的 1
1-2 論文架構 2
二、雷射干涉儀基本原理及文獻回顧 3
2-1雙頻雷射干涉儀 3
2-2單頻雷射干涉儀 7
2-3 九十度相位差偵測系統 9
2-4雷射干涉儀之非線性 15
2-4-1雙頻雷射干涉儀之非線性 15
2-4-2單頻雷射干涉儀之非線性 19
2-4-3非線性之補償 24
三、相位分析方法 28
3-1 橢圓擬合法 28
3-2最小歸一化相位差法 29
3-3 誤差之修正 33
3-4最小歸一化相位差法與橢圓擬合法之比較 34
四、實驗架構 37
4-1 光源 37
4-2 偵測器 41
4-3 干涉儀光路 43
五、實驗結果 44
5-1條紋計數器 45
5-2相位量測 49
5-3 位移量測結果 50
5-4 傾角量測結果 55
六、結論與未來展望 59
6-1 結論 59
6-2 未來展望 60
參考文獻 61
參考文獻 [1]. Taeho Keem, Satoshi Gonda, Ichiko Misumi, Qiangxian Huang, and Tomizo kurosawa, Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems APPLIED OPTICS, 2004. 43(12): p. 2443-2448.
[2]. Hyunseung Choi, Kyihwan Park, Jongpil La, Novel phase measurement technique of the heterodyne laser interferometer. REVIEW OF SCIENTIFIC INSTRUMENT, 2005. 76(093105): p. 1-5.
[3]. Noh-BIn Yim , Cheon II Eom and Seung-Woo Kim, Dual mode phase measurement for optical heterodyne interferometery. Meas. Sci. Technol, 2000. 11: p. 1131-1137.
[4]. Suat Topcu , Luc Chassagne , Yasser Alayli , Patrick Juncar, Improving the accuracy of homodyne Michelson interfermometers using polarisation state measurement techniques. Optics Communications 2005. 247: p. 133-139.
[5]. Zygo. A Primer on Displacement Measuring Interferometers [cited; Available from: http://www.zygo.com/?/met/markets/stageposition/zmi/dmiprim.pdf.
[6]. Chien-ming Wu, Ching-shen Su, Nonlinearity in measurements of length by optical interferometry. Meas. Sci. Technol, 1996. 7: p. 62-68.
[7]. Cosijns Suzanne, Displacement laser interferometry with sub-nanometer uncertainty. 2004, Technische Universiteit Eindhoven.
[8]. TaeBong Eom, Tae Young Choi, KeonHee Lee, HyunSeung CHoi and Sunkyu Lee, A simple method for the compensation of the nonlinearity in the heterodyne interferometer. Meas. Sci. Technol, 2002. 13: p. 222-225.
[9]. Chien-ming Wu , Ching-shen Su and Gwo-Sheng Peng, Correction of nonlinearity in one-frequency optical interferometry. Meas. Sci. Technol 1996. 7: p. 520-524.
[10]. TaeBong Eom , JongYun Kim and Kyuwon Jeong, The dynamic compensation of nonlinearity in a homodyne laser interferometer. Meas. Sci. Technol, 2001. 12: p. 1734-1738.
[11]. Taeho Keem, Satoshi Gonda, Ichiko Misumi, Qiangxian Huang, and Tomizo kurosawa, Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system. APPLIED OPTICS, 2005. 44(17): p. 3492-3498.
[12]. Mark Chapman. Heterodyne and homodyne interferometry. [cited; Available from: http://www.renishaw.com/UserFiles/acrobat/UKEnglish/GEN-NEW-0117.pdf.
[13]. Eugene Hecht, 4thed. Optics. 4 ed. 2002, Addison Wesley.
[14]. Yariv, Amnon; Yeh, Pochi, Optical waves in crystal. 1983, 亞美書局.
[15]. Jerald Graeme. Photodiode Amplifiers: Op Amp Solutions. McGraw-Hill Professional.
[16]. Vincenzo Grreco, Giuseppe Molesini, and Franco Quercioli, Accurate polarization interferometer. REVIEW OF SCIENTIFIC INSTRUMENT, 1995. 66(7): p. 3729-3734.
[17]. Neal Brock, John Hayes, Brad Kimbrough, James MIllerd, Michael North-Morris, Matt Novak and James C. Wyant, Dynamic Interferometry. Proc. of SPIE, 2005. 5875.
[18]. Matt Novak, James Millerd, Neal Brock, Michael North-Morris, John Hayes, and James Wyant, Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer. APPLIED OPTICS, 2005. 44(32): p. 6861-6868.
[19]. Matthew Jarrod Novak, Micropolarizer Phase- Shifting Array For Use In Dynamic Interferometry. 2005, The University Of Arizona.
[20]. Qian Kemao, Wu Xiaoping, and Anand Asundi, Grating-based real-time polarization phase-shifting interferometry: error analysis. APPLIED OPTICS, 2002. 41(13): p. 2448-2453.
[21] BENGT EDLEN, The Refractive Index of Air. Metrologia, 1966. 2(2): p. 71-80.
指導教授 梁肇文(Chao-Wen Liang) 審核日期 2009-7-14
推文 facebook   plurk   twitter   funp   google   live   udn   HD   myshare   reddit   netvibes   friend   youpush   delicious   baidu   
網路書籤 Google bookmarks   del.icio.us   hemidemi   myshare   

若有論文相關問題,請聯絡國立中央大學圖書館推廣服務組 TEL:(03)422-7151轉57407,或E-mail聯絡  - 隱私權政策聲明