單頻位移與傾角量測干涉儀

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姓名

蔡永勝(Yung-Sheng Tsai) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

單頻位移與傾角量測干涉儀
(Quadrature Homodyne Displacement and Tilt Measuring Interferometer)

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摘要(中)

本論文描述一單頻雷射干涉儀，此干涉儀可同時量測待測物的鏡面位移量及傾角，並藉由一嶄新的非線性誤差補償方法，提高其位移量測精準度。
此干涉儀為一九十度相位差偵測系統架構，擁有更為簡易的架構以及更小之體積，不同以往的是只以單一雷射光束量測，達到同時量測位移與傾角的功能。
我們所發展的相位誤差補償方法，能有效消除干涉儀中的非線性特性，與傳統之橢圓擬合之方法相比，新的方法在訊號之相位變化較小及雜訊較大的情況之下，所求得之相位較舊的方法更為精確。
經實驗結果顯示，經過補償運算後，此干涉儀之非線性可以有效修正，可測得位移量測之準確度為0.6奈米。而用來感測待測鏡面之傾斜的四象限二極體的最小可解析之橫向位移量為2微米。

摘要(英)

This thesis describes a homodyne interferometer that could measure the displacement and tilt of test mirrors. The accuracy of displacement measurement could be enhanced by a novel nonlinearity compensation method.
This interferometer adopts quadrature detection system with simpler setup and less system volume. It could measure not only the displacement as usual, but also the tilt motion of target by just a single laser beam.
The phase error compensation method developed in the dissertation could correct nonlinearity efficiently. Compare with the conventional ellipse fitting method, the new method could acquire more accurate result than conventional one under less phase variation and noisy conditions.
Experiment result demonstrates that after applying compensation, the nonlinearity could be compensated correctly. The precision of displacement measurement could achieve to 0.6nm, and the resolution of quadrant detector used for tilt measurement can reach to 2μm.

關鍵字(中)

★ 位移量測
★ 干涉儀

關鍵字(英)

★ interferometer
★ displacement measurement

論文目次

摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 viii
一、緒論 1
1-1研究背景與目的 1
1-2 論文架構 2
二、雷射干涉儀基本原理及文獻回顧 3
2-1雙頻雷射干涉儀 3
2-2單頻雷射干涉儀 7
2-3 九十度相位差偵測系統 9
2-4雷射干涉儀之非線性 15
2-4-1雙頻雷射干涉儀之非線性 15
2-4-2單頻雷射干涉儀之非線性 19
2-4-3非線性之補償 24
三、相位分析方法 28
3-1 橢圓擬合法 28
3-2最小歸一化相位差法 29
3-3 誤差之修正 33
3-4最小歸一化相位差法與橢圓擬合法之比較 34
四、實驗架構 37
4-1 光源 37
4-2 偵測器 41
4-3 干涉儀光路 43
五、實驗結果 44
5-1條紋計數器 45
5-2相位量測 49
5-3 位移量測結果 50
5-4 傾角量測結果 55
六、結論與未來展望 59
6-1 結論 59
6-2 未來展望 60
參考文獻 61

參考文獻

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指導教授

梁肇文(Chao-Wen Liang)

審核日期

2009-7-14

推文