脈衝電化學加工之微電極製作參數分析

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姓名

王正育(Cheng-Yu Wang) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

脈衝電化學加工之微電極製作參數分析
(The Analysis and Investigation on the Micro-electrode Fabrication by Pulses Electrochemical Machining)

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摘要(中)

在發展微機電系統過程中，製作微結構產品的加工方法是重要且必須的，其中微電化學加工具有可加工任何金屬材料，工件表面無殘留應力，工具電極不損耗等優勢。在微電化學加工中，需要更微細工具電極，方可製造微結構元件，故本文將以製作圓柱狀的微電極為目標。
　　本文利用單一因子法分析加工參數(如：操作電壓、電解液濃度、脈衝頻率、加工能率、電解液溫度、電極旋轉速度)，再以單一因子法分析的結果；作為第二部份線性變化(如：操作電壓、加工能率)的實驗依據。
　　最後本文利用510 μm的鎢棒，以線性遞減操作電壓和加工能率的方式，成功的製作出刃長為2㎜、3㎜、4㎜，電極直徑為100 μm的圓柱狀微電極。

摘要(英)

The development of MEMS (Micro Electro-Mechanical System), it is important and necessary to manufacture the micro-structure. In numerous of micro machining, the electrochemical micro machining has advantage that can machining any metal material, the work piece after machining will not have any residual stress remained on its surface, the tool electrode would not break. In the electrochemical micro machining, it needs the smaller electrode to manufacture the micro electrode. On the basis of advantage of electrochemical machining, we applied in the form of pulsed electrochemical polishing to fabricate the cylindrical microelectrode. We discussed the working parameters (ex. applied voltage, electrolyte concentration, frequency, duty, temperature, rotation) on fabricating microelectrode, and then it could fabricate the 100 μm cylindrical tungsten microelectrode by linear decay of applied voltage or duty at different length.

關鍵字(中)

★ 微電化學加工
★ 鎢棒
★ 脈衝電壓
★ 微電極

關鍵字(英)

★ Tungsten rod
★ Micro electrode
★ pulsed voltage
★ Electrochemical micromachining

論文目次

摘要 I
Abstract II
表目錄 VI
圖目錄 VII
符號說明 XI
第一章緒論 1
1-1 前言 1
1-2 電化學加工 4
1-2-1 電化學拋光 6
1-3 文獻回顧 7
1-3-1 微電極製作 7
1-3-2 電化學加工 10
1-4 研究目的 14
第二章理論基礎 17
2-1 電化學加工基本理論 17
2-1-1 電流分佈 18
2-1-2 電流效率與電流密度 18
2-1-3 液相質傳動力學 19
2-1-4 電解液導電度 22
2-1-5 電化學拋光原理 23
2-2 電化學反應式 26
2-3 極化(polarization) 28
2-4 旋轉圓柱電極之極限電流 30
第三章實驗裝置與步驟 32
3-1實驗設備 32
3-1-1 機台結構設計 32
3-1-2 刀具進給控制系統 33
3-1-3 脈衝電源供應系統 34
3-1-4 伺服馬達 34
3-2 實驗材料 35
3-2-1 陰極導引片 35
3-2-2 陽極電極刀具 35
3-2-3 氫氧化鈉粉末 36
3-3 實驗步驟及注意事項 36
4-1 操作電壓 43
4-2 電解液濃度 46
4-3 脈衝頻率 48
4-3-1 脈衝週期(固定脈衝放電時間，改變脈衝週期) 48
4-3-2 脈衝頻率(固定加工能率，改變脈衝頻率) 50
4-4 加工能率(Duty) 52
4-4-1 高加工能率 52
4-4-2 低加工能率 55
4-5 電解液溫度 58
4-6 電極旋轉速度 59
4-7 操作電壓之線性變化加工 63
4-8 加工能率之線性變化加工 65
4-9 實驗成果 66
第五章結論 70
5-1 結論 70
5-2 未來展望 71
參考文獻 73
附表 77
附圖 78

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指導教授

洪勵吾(Lih-Wu Hourng)

審核日期

2008-6-25

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