硼矽玻璃的磁場輔助電化學放電加工技術研究

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姓名

許玉山(Yu-shan Hsu) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

硼矽玻璃的磁場輔助電化學放電加工技術研究
(A study on improvement Pyrex glass machinability by using magnetism assisted electrochemical discharge machining)

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摘要(中)

本實驗主要研究磁力輔助對電化學放電加工(Electrochemical Discharge Machining, ECDM)非導體元件之硼矽玻璃(Pyrex)的成形精度與穩定性探討，電化學放電加工可運用於非導電硬脆材料的加工上，但在實際製程的應用上，其輪廓及尺寸精度控制乃ECDM製程實用化之關鍵門檻，而與製程精度及重現性有直接關係的是放電電流密度與放電火花分布特性，其中最主要的影響因子為氣泡層的幾何外形與尺寸，及絕緣氣膜層的穩定性。本研究針對絕緣氣膜層之成長機制，及其所對應的加工精度與穩定性做一系列的探討與分析。
實驗結果顯示，當電壓能量為38 V、電解液濃度為6 M時將圓柱電極改為扁平電極能使微孔的加工品質有較佳的改善效果，其擴孔量有4 %的改善率。最後再增加輔助磁場進行加工，結果發現在穩定的放電電流狀態下，其微孔可獲得極佳的品質改善效果，擴孔量有26.7 %的改善率，加工效率也能有效的提升72 %。

摘要(英)

Electrochemical Discharge Machining (ECDM) can be use for manufacture non-conductors brittle material, but the forming contours and dimension precision will effect industry application, a purpose on improve Pyrex glass forming precision and stability, using magnetism assisted in the experiment is new technology for ECDM. In the study, we find the discharge current density and spark distributable will effect forming precision and reliability but the most important key point is bubble geometry and dimension which will influence the stability of insulation gas film.
According to the result, when voltage arrival 38 V、electrolyte concentrate at 6 M, and change electrode geometry from cylindrical tool to flat sidewall-flat front tool can improve microhole reaming arrival 4 %, and than combination of magnetism to increase the machining precision and reliability, improve microhole reaming achieve 26.7 %, machining efficiency achieve 72 %.

關鍵字(中)

★ 電化學放電加工
★ Pyrex玻璃
★ 氣泡層
★ 絕緣氣膜層
★ 磁場
★ 微孔品質

關鍵字(英)

★ magnetism
★ insulation gas film
★ bubble
★ ECDM
★ Pyrex glass

論文目次

摘要 i
目錄 iii
圖目錄 vi
表目錄 ix
第一章緒論 1
1-1 研究動機 1
1-2文獻回顧 4
1-3 研究目的 11
第二章基本原理 13
2-1 ECDM配置 13
2-2 ECDM的電化學反應 15
2-3 ECDM的放電火花產生過程 17
2-4 ECDM的材料去除機制 19
2-5 線放電研磨加工原理 22
第三章實驗材料、設備與步驟 27
3-1 實驗材料 27
3-1-1 電解液 27
3-1-2 碳化鎢電極 28
3-1-3 石墨輔助電極 29
3-1-4 硼矽玻璃 29
3-1-5 釹鐵錋磁鐵 31
3-2 實驗設備 35
3-2-1 電化學放電加工設備 35
3-2-2 電極修整設備 37
3-2-3 電源供應器 39
3-2-4 顯微量測系統 40
3-2-5 去離子水系統 40
3-2-6 超音波洗淨機 41
3-2-7 掃描式電子顯微鏡 42
3-2-8 示波器 42
3-2-9 電流測試探棒 43
3-2-10 表面真空蒸鍍機 43
3-2-11 精密電子天平 44
3-3 實驗流程 45
3-4 實驗參數設定 46
3-5 實驗步驟 47
3-5-1 碳化鎢電極修整 47
3-5-2 電解液濃度之調配 51
3-5-3 ECDM機構設備的調整 51
3-5-4 輸入不同實驗參數值 51
3-5-5 試片清洗 51
3-5-6 孔徑表面觀察 52
第四章結果與討論 53
4-1 電壓能量於氣膜結構與加工精度之影響 55
4-2 電解液濃度之轉折電壓與加工特性 62
4-3 加工深度對ECDM加工品質的影響 66
4-4 輔助磁場對ECDM加工品質的影響 76
第五章結論 85
第六章參考文獻 86

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指導教授

顏炳華、黃豐元
(Biing-Hwa Yan、Fuang-Yuan Huang)

審核日期

2008-7-16

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