波長調制外差散斑干涉術之研究

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姓名

林坤億(Kun-yi Lin) 查詢紙本館藏

畢業系所

光機電工程研究所

論文名稱

波長調制外差散斑干涉術之研究
(Study of wavelength-modulated heterodyne speckle interferometry)

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摘要(中)

本論文提出一套奈米級面內位移量測技術－「波長調制外差散斑干涉儀」。
利用雷射二極體波長可調制的特性，以鋸齒波之電流調制，使其波長產生週期性的變化，再結合巧妙的光路設計，利用刻意製造的光程差，干涉後即產生外差光源，並利用此外差光作為主要的量測光源。
　　外差干涉術主要是將待測訊息載入光相位之中，擷取光相位以換算待測資訊。本論文以散斑干涉術、都卜勒移頻與光柵干涉術的理論基礎，設計出面內位移量測裝置。理論推導顯示，面內位移資訊確實能夠經由本實驗架構的設計載入干涉光之相位中。本研究開發出新的相位演算法，程式化後可以取代鎖相放大器，將系統成本大大降低。
　　根據理論推導，本系統之理論解析度為1 pm。實驗結果證實，考慮環境擾動的情況下，本系統之實際解析度約10 nm，量測靈敏度為0.802 °/nm，系統最大可量測速度為18 μm/sec。
　　本文中也對量測誤差進行討論，包含系統誤差與環境誤差。本研究架構對於環境誤差尚有改進之處，未來也將對於系統的缺失進行改善。
　　本系統利用光學量測的方式，可以精密地量測位移量，搭配價格低廉的架構與新的演算法，可取代昂貴的儀器設備，於精密定位系統的發展上，將是一套有發展潛力的精密量測技術。

摘要(英)

A wavelength-modulated heterodyne speckle interferometry for measurement of in-plane displacement is proposed. The heterodyne light source was made through direct modulation of a diode laser wavelength. The in-plane motion could be measured by means of using continuous wave illumination in a length imbalanced heterodyne speckle interferometer. We developed a new phase-extraction-algorithm to calculate the optical phase variation which results from the in-plane movement. The object displacement would be determined from the measured phase variation and by the speckle interferometry theorem.
The theoretical predication shows that the resolution is about 1 pm and the sensitivity is 0.801 °/nm. From the experimental results, the range of measurement system is up to 10 μm. The maximum velocity measuring ability is 18 μm/s, and the system resolution is about 10 nm. We also discussed the measurement errors in the study, such as system error and random error.

關鍵字(中)

★ 光學量測
★ 波長調制
★ 外差干涉術
★ 散斑干涉術
★ 相位擷取演算法
★ 位移量測

關鍵字(英)

★ in-plane displacement measurement
★ speckle interferometer
★ optical metrology
★ laser diode
★ heterodyne interferometry
★ wavelength-modulated

論文目次

摘要 i
Abstract ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
符號說明 ix
第一章緒論 1
1.1 研究背景 1
1.2 文獻回顧 2
1.2.1 波長調制外差干涉術之文獻回顧 2
1.2.2 散班干涉術之文獻回顧 5
1.3 研究目的 8
1.4 論文架構 9
第二章基礎理論 10
2.1 外差干涉術 10
2.2 波長調制外差干涉術 13
2.2.1 雷射二極體 13
2.2.2 波長調制外差干涉術 17
2.3 面內位移引進相位變化 20
2.3.1 散斑干涉術 20
2.3.2 都卜勒移頻 23
2.3.3 光柵干涉術 25
2.4 小結 27
第三章　系統架構 28
3.1 元件介紹 28
3.2 波長調制外差散斑干涉儀 30
3.2.1 波長調制外差光源系統 31
3.2.2 散斑干涉系統 32
3.3 訊號解調系統 33
3.4 小結 40
第四章實驗結果與討論 41
4.1 實驗數據 41
4.1.1 10 μm之弦波與三角波形式運動 42
4.1.2 1 μm之弦波與三角波形式運動 45
4.1.3 500 nm之弦波與三角波形式運動 48
4.1.4 100 nm之來回步階形式運動 51
4.1.5 50 nm之來回步階形式運動 53
4.1.6 10 nm之來回步階形式運動 54
4.2 實驗討論 56
4.2.1 量測重複性 56
4.2.2 解析度 57
4.2.3 靈敏度 57
4.2.4 量測速度極限 58
4.3 小結 62
第五章誤差分析 63
5.1 系統誤差 63
5.1.1 波長變化 64
5.1.2 幾何誤差 64
5.1.3 相位誤差 66
5.2 隨機誤差 70
5.2.1 環境擾動 70
5.2.2 溫度 71
5.3 小結 71
第六章結論與未來展望 72
6.1 結論 72
6.2 未來展望 73
Reference 75
附錄80

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指導教授

李朱育(Ju-yi Lee)

審核日期

2008-7-17

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