博碩士論文 963207007 詳細資訊




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姓名 黃思翰(Szu-Han Huang)  查詢紙本館藏   畢業系所 光機電工程研究所
論文名稱 複合式長行程精密定位平台之研究
(Study of compound large-scale precision positioning stage)
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摘要(中) 本論文提出一套毫米級移動距離且具有奈米級定位能力之定位平台-「複合式長行程精密定位平台」。以整合微步進馬達平移台與壓電平移台,建構出具有長移動距離與高精密定位能力之定位平台,配合外差干涉儀及二值化相位演算法,提供具有高解析度與高速量測能力之光學式位置回授系統,再加上位置控制器進行閉迴路控制,完成本研究之定位平台。
本研究所設計之精密定位平台在閉迴路控制下定位誤差小於5nm,運動速度約為0.1mm/s,穩定度為4nm。所提出之相位演算法解析頻率為信號頻率的兩倍。
本論文亦對所提出之相位演算法的誤差容忍度進行分析,討論電源品質對微步進馬達平移台穩定性所造成的影響,並針對壓電平移台位移需求超出平移台所能提供之位移極限時提出應對的方法。
本論文所開發之定位平台有長移動距離與高穩定度的特性,將是一套高應用潛力的系統。
摘要(英) In this thesis, the Compound Large-Scale Precision Positioning Stage (CLSP2S) which can reach to millimeter scale moving distance and possesses ability of nanometer scale positioning is developed. This system is based on compound stage, which is consist of piezoelectric stage and stepping motor stage and provides abilities of long moving distance and high precision positioning, optical feedback system, which is consisted of heterodyne interferometer system and phase calculation algorithm that developed in the thesis, and proportional controller which perform close-loop control.
The positioning error of this system in close-loop control mode is less than 5nm. The speed limit of this system is about 0.1mm/s, and the stability of presented system is 4nm. The resolvable frequency of phase calculation algorithm proposed in this thesis is two times of frequency of signal.
The tolerance of phase calculation algorithm proposed and the effect of power stability for micro stepping motor stage will be discussed in this thesis. The dealing method for the movement of compound stage over the limit moving range of piezoelectric stage will be presented.
The system developed possesses the characteristics of long moving distance, high stability, and is high potential system for many applications.
關鍵字(中) ★ 干涉儀回授
★ 定位平台
★ 複合式
★ 二值化
★ 相位演算法
關鍵字(英) ★ stage
★ binarization
★ interferometry
★ feedback
★ phase algorithm
論文目次 摘要... I
Abstract... II
致謝... III
目錄... IV
圖目錄... VII
表目錄... XI
符號說明... XII
第一章 緒論... 1
1-1. 研究背景... 1
1-2. 文獻回顧... 2
1-3. 研究目的... 5
1-4. 章節介紹... 6
第二章 理論背景... 7
2-1. 準共光程外差干涉儀... 7
2-1-1. 外差干涉術... 8
2-1-2. 電光晶體調制... 10
2-1-3. 光柵引入相位... 11
2-1-4. 剪切干涉術... 12
2-1-5. 準共光程外差干涉儀... 13
2-2. 半波二值化相位演算法... 16
2-3. 比例控制器... 20
2-4. 小結... 21
第三章 實驗架構... 22
3-1. 元件與儀器規格... 22
3-2. 高速型準共光程外差干涉儀... 25
3-3. 控制程式... 26
3-4. 高速型準共光程外差干涉儀與複合式長行程精密定位平台... 29
第四章 實驗結果... 32
4-1. 位移運動實驗... 33
4-2. 重複性... 41
4-2-1. 倒V型運動... 41
4-2-2. N型運動... 46
4-3. 系統速度極限... 51
4-3-1. 理論速度極限... 51
4-3-2. 實際運動速度... 51
4-4. 穩定性... 52
4-5. 小結... 55
第五章 誤差分析... 57
5-1. 半波二值化解相位系統誤差分析... 57
5-2. 步進馬達-全步進、半步進技術與微步進技術暨步進馬達控制器電壓穩定度... 63
5-3. 壓電平移台極限位移控制... 70
5-4. 系統誤差... 70
5-5. 隨機誤差... 71
第六章 結論與未來展望... 72
6-1. 結論... 72
6-2. 未來展望... 72
參考資料... 75
附錄 單晶片相位週期計數器... 79
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指導教授 李朱育(Ju-Yi Lee) 審核日期 2009-7-19
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