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以作者查詢圖書館館藏 、以作者查詢臺灣博碩士 、以作者查詢全國書目 、勘誤回報 、線上人數：7 、訪客IP：3.144.248.24
姓名 塗家豪(Chia-Hao Tu) 查詢紙本館藏 畢業系所 材料科學與工程研究所 論文名稱 利用Ar+離子束轟擊及熱氧化法製備氧化鋅奈米結構的表面型態及成分分析
(The morphology and component analysis of ZnO nanostructures fabricated by Ar+ ion beam bombardment and thermal oxidation)相關論文 檔案 [Endnote RIS 格式]
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摘要(中) 自從奈米碳管發現以來，一維奈米結構逐漸受到重視，其中氧化鋅為最近熱門的應用例子。特性為多樣化的奈米結構，好的化學與熱穩定性，獨特的發光性質等等，因此有寬廣的應用範圍和潛力。
本論文採用Ar+離子轟擊鋅箔，產生粗糙化效果，配合大氣下熱氧化，產生氧化鋅奈米結構。參數方面使用5、7、10keV的離子束能量與1、4、8、16小時的轟擊時間，加上氮離子佈植8小時。然後使用SEM及XPS探討形成氧化鋅的表面型態與成分分析。
實驗結果方面，離子束濺射會在鋅箔上形成波浪狀有規則的起伏結構。其中凸起的位置在氧化時會生長出線狀的氧化鋅奈米結構。SEM觀察發現不同的轟擊時間會有不同類型的氧化鋅奈米結構。其中當轟擊離子數目越低時，越能顯示提高轟擊能量對於生長氧化鋅奈米結構的幫助。在XPS檢測方面，提高轟擊離子數與轟擊能量，都會造成增加氧化鋅產量的效果，同時提升氧化鋅結構的品質。關於氮離子轟擊後的試片，生長出來的氧化鋅奈米結構較細緻但整體產量較少。
摘要(英) Since carbon nanotube has been found, the one dimension of nanostructures has attracted great attention gradually, Among them that zinc oxide is one of the hot applications recently. Zinc oxide has broad range of applications and potentiality because of its variety of nanostructures、chemical and thermal stability and light emission.
In this thesis, we use Ar+ ion beam bombard zinc foil. Make zinc surface rough, and cooperate with thermal oxidation in the air. Produce zinc oxide nanostructures. We use 5、7、10keV ion beam energy and bombard 1、4、8、16 hours. After fabrication, the morphology of the sample is examined by scanning electron microscopy(SEM), and the component analysis is by X-ray photoelectron spectroscopy(XPS)
About the experiment results, the raised positions of rough surface after ion beam sputter will grown zinc oxide nanostructures, and different bombard hours induce different morphology types. When bombardment ions reduces, the bombardment energy will become more important of grown Zinc oxide nanostructures. In XPS, rise bombardment ions and energy also enhance the yield and the quality of Zinc oxide. Final, after N2+ions bombard, Zinc oxide nanostructures will grown more thin, but the yield will reduce.
關鍵字(中) ★ 氧化鋅奈米結構
★ 離子束關鍵字(英) ★ ZnO nanostructure
★ ion beam論文目次 中文摘要.................................................Ⅰ
英文摘要.................................................Ⅱ
目錄.....................................................Ⅲ
圖目錄...................................................Ⅵ
表目錄...................................................Ⅸ
第一章 緒論..............................................1
1-1 前言...............................................1
1-2 研究動機與目的.....................................2
1-3 氧化鋅材料特性與結構...............................3
1-4 各章摘要...........................................4
第二章 基本原理...........................................6
2-1 離子束的形成與加速原理.............................6
2-1-1氣體放電.....................................6
2-1-2 離子加速過程................................10
2-2 離子碰撞過程......................................11
2-3 氧化鋅奈米結構生長原理............................12
2-4量測儀器原理......................................13
2-4-1 X光光電子能譜儀(XPS)........................13
2-4-1-1能譜解析...............................14
2-4-1-2能譜數據處理...........................15
2-4-2 掃描式電子顯微鏡(SEM)......................18
2-4-2-1 試樣製備..............................19
第三章 實驗設備與實驗步驟..........................21
3-1 實驗設備..........................................21
3-1-1 離子槍系統.................................21
3-1-2 加速系統...................................22
3-1-3 真空系統...................................23
3-1-4 冷卻系統...................................24
3-2 實驗步驟..........................................24
3-2-1 準備實驗階段...............................24
3-2-2 正式實驗階段...............................25
3-2-3 樣品檢測階段...............................27
第四章 實驗結果與討論..............................32
4-1掃描式電子顯微鏡(SEM)影像.........................32
4-2 X光光電子能譜(XPS)分析..........................48
4-2-1 XPS全譜圖掃描.............................48
4-2-2 XPS鍵結分析................................51
4-2-3 氧(O1s)微區掃描.............................52
4-2-4 鋅(Zn2p)微區掃描............................61
4-2-5 Zn/O1s 分析.................................63
第五章 結論與未來展望..............................65
參考文獻...........................................68
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