應用於彩色共焦顯微術之繞射元件設計

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姓名

施政杰(Cheng-Chieh Shih) 查詢紙本館藏

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光機電工程研究所

論文名稱

應用於彩色共焦顯微術之繞射元件設計
(The design of diffractive optical element applied to chromatic confocal microscopy)

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摘要(中)

本論文主要在探討利用繞射光學理論設計出折射/繞射複合光學元件，實現在光軸上產生線性色散的光學特性，搭配準直透鏡來彙整折射/繞射複合光學元件所產生的色散光線，並且利用顯微物鏡來提升解析度，所組合而成的彩色共焦模組，以建立物體表面三維結構量測技術。
利用繞射光學理論設計出兩顆折射/繞射複合光學元件，實現在光軸上產生線性色散的光學特性，而且色散範圍皆在38000μm左右，利用可見光波長範圍“400 nm ~ 800 nm”來作為彩色共焦模組的工作波長，使搭配折射/繞射複合光學元件的彩色共焦模組的色散範圍可達2000μm左右，色散呈現線性趨勢。在降低光源發散角的敏感度的測試中，我們以相同色散範圍條件下，比較色散趨勢為正與色散趨勢為負的折射/繞射複合光學元件，發現色散趨勢為負的元件可使各波長後焦距誤差下降至-4.9%~-2.7%，而光斑半徑也縮小至783μm~584μm，而搭配色散趨勢為負的元件所組成彩色共焦模組的各波長後焦距誤差在-9.2%~-11.5%內，而光斑半徑更可縮小至176μm ~138μm，且此顆折射/繞射複合光學元件的最小線寬為30.5μm，可以進行超精密加工。

摘要(英)

This paper focuses on the use of diffractive optics theory to design refraction / diffraction composite optical elements to realize the optical axis to generate the optical properties of linear dispersion, with coupling lens to compile with refraction / diffraction composite dispersion optical elements produced by light, and the use of microscopy to improve resolution, the chromatic confocal module to create three dimensional structure of a surface measurement technique.
Diffractive optics theory to design two refractive / diffractive optical elements combined to achieve the optical axis to generate the optical properties of linear dispersion and dispersion are in 38000μm about the scope of the use of visible light wavelength "400 nm ~ 800 nm" to chromatic confocal module, as the work of the wavelength, so that with a refractive / diffractive optical elements for chromatic confocal module is about the dispersion range of up to 2000μm, the dispersion in a linear trend. Reduce the divergence angle in the light sensitivity of the test, in the same range of dispersion conditions, compare the positive dispersion trend and negative dispersion trend refraction / diffractive optical elements, found that the trend is negative dispersion allows all wavelengths components the error of back focal length dropped to -4.9% ~ -2.7%, while the spot radius is also reduced to 783μm ~ 584μm, while the trend with a negative dispersion of components of the chromatic confocal module the error of back focal length dropped to -9.2% ~ -11.5 %, and the spot radius can shrink to 176μm ~ 138μm, and the minimum line width of refractive / diffractive optical elements was 30.5μm, can be ultra-precision machining.

關鍵字(中)

★ 折射/繞射複合光學元件
★ 色散範圍
★ 最小線寬
★ 光源發散角

關鍵字(英)

★ the minimum line width
★ dispersion range
★ refraction/diffraction composite optical element
★ divergence angle of light

論文目次

中文摘要 I
英文摘要 III
誌謝 IV
表目錄 VII
圖目錄 IX
第 1 章緒論 1
1.1 研究背景 1
1.2 研究目的 2
1.3 技術與文獻回顧 3
1.4 論文架構 12
第 2 章彩色共焦顯微術基礎理論 13
2.1 彩色共焦顯微術原理 13
2.2 彩色共焦顯微術數學模型 16
第 3 章折射/繞射複合光學元件設計與彩色共焦模組分析 19
3.1 折射/繞射複合光學元件之規格與設計流程 19
3.2 折射/繞射複合光學元件設計與光學性質分析 21
3.3 彩色共焦模組光學性質分析 33
3.4 折射/繞射複合光學元件與彩色共焦模組之結論 42
第 4 章發散光源對折射/繞射複合光學元件與彩色共焦模組之影響 44
4.1 發散光源對折射/繞射複合光學元件的光學特性影響 44
4.2 發散光源對彩色共焦模組的光學特性影響 48
4.3 發散光源對彩色共焦模組的量測誤差分析 50
4.4 發散光源對折射/繞射複合光學元件與彩色共焦模組影響之結論 57
第 5 章結論與未來展望 59
參考文獻 61

參考文獻

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指導教授

陳奇夆(Chi-Feng Chen)

審核日期

2010-8-27

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