博碩士論文 975201116 詳細資訊


姓名 管挺鈞(Ting-chun Kuan)  查詢紙本館藏   畢業系所 電機工程學系
論文名稱 有機介電層(CiPVP)電特性分析及其在有機薄膜電晶體的應用
(Electrical Characterization of CiPVP Dielectric Layer and its Application on Organic Thin-Film Transistors)
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摘要(中) 近年來有機薄膜電晶體因具有低製造成本與高延展性的特點,不僅可以應用在電子紙類的商品上,而且可以結合創新與輕便的設計,因此引發了產學界廣泛的興趣。但礙於有機半導體的載子移動速度不夠快,且有機介電層的緻密性較無機材料差,因此有機薄膜電晶體電氣特性與可靠度仍無法與無機薄膜電晶體並駕齊驅。如何針對上述的兩點去做改良,正是現今有機薄膜電晶體重要的研究課題。
  在本篇論文中,我們針對有機介電層材料(CiPVP)做一個完整的電性與可靠度評估。開發CiPVP材料的最主要的目的是希望借助其優異的抗水氧特性,以達到較穩定的可靠度。因此,藉由一連串的電性特性分析,我們可以了解該有機介電層材料應用在有機薄膜電晶體上時,是否真的具有優異的抗水氧能力,以及其電性特性的好壞。
  將介電層材料CiPVP應用於金屬-介電層-金屬二極體與有機薄膜電晶體中,藉由電特性量測,我們知道CiPVP與常用的介電層材料PVP相比其電特性反而較差。原因是CiPVP材料的表面粗糙度與緻密性均較PVP差,導致內部補陷電荷與接面捕陷電荷較多,因此元件的電氣特性較差。不過CiPVP仍有其優點,就是在介電層厚度縮薄時,其電氣特性變化量較小。
  另外,在元件的可靠度評估方面,我們發現在進行真空偏壓測試與溼度測試時,CiPVP同樣具有電氣特性較不會因為厚度改變而變化的特點,顯示這材料仍具有一定的賣點。
摘要(英) In recent years, organic thin-film-transistor attracts attention in both industrial and academic fields. Because low in production cost and high in ductility, it can be applied to electronic paper easily, combined with innovation. Still, organic semiconductors have its’ own problems: the mobility is not fast enough, and the compactness of organic dielectric layer is not as good as inorganic material as well. Therefore, organic thin-film-transistor still needs to improve itself on these areas. How to improve its performance to be good as inorganic thin-film-transistors is one of the main topics.
In this paper, we focused on organic material in dielectric layer (CiPVP) to do a complete assessment of electrical and reliability. The main purpose of developing CiPVP materials is to achieve more stable reliability by its excellent resistance to water and oxygen features. By a series of electrical characterization, we can understand whether organic dielectric layer can well resist water and oxygen features when it is applied to organic thin-film-transistor and its electrical characteristic.
Electrical tests show that CiPVP applied to metal- dielectric layer-metal diode and organic thin-film-transistors is worse than common dielectric layer material, PVP. Because of the poor surface roughness and compactness of CiPVP, there are more bulk trapped charges and interface trapped charges than those in PVP.
Nevertheless, CiPVP has more stable electrical characteristic in thinner dielectric layer and better behavior in bias stress test and humility test when thickness changed. In conclusion, CiPVP has some problems to be solved but still enough selling points.
關鍵字(中) ★ 有機薄膜電晶體
★ 介電層
關鍵字(英) ★ Dielectric Layer
★ Organic Thin-Film Transistors
論文目次 中文摘要……………………………………………………i
英文摘要……………………………………………………ii
致謝…………………………………………………………iii
目錄…………………………………………………………iv
圖目錄………………………………………………………vi
表目錄……………………………………………………viii
第一章 緒論
1-1 研究動機………………………………………1
1-2有機薄膜電晶體之優點…………………………2
1-3目前瓶頸…………………………………………3
1-4研究目標…………………………………………6
第二章 介電層材料本質特性分析
2-1 前言……………………………………………8
2-2 CiPVP與PVP分子結構分析與比較……………8
2-3 MIM測試元件的製作…………………………10
2-4 MIM崩潰電場量測……………………………14
2-5 MIM漏電流量測………………………………16
2-6 MIM CV量測……………………………………18
第三章 有機薄膜電晶體的製作以及量測
  3-1 前言……………………………………………21
  3-2 有機薄膜電晶體的結構與製作………………21
3-3 有機薄膜電晶體的CV量測……………………25
3-4 有機薄膜電晶體Id-Vg量測…………………26
3-5 有機薄膜電晶體Id-Vd量測……………………33
3-6 介電層薄膜因製作過程產生的應力對主動層
的影響…………………………………………36
3-7 Bottom Gate結構與製作流程…………………37
3-8 改良後之電性量測……………………………40
3-9 結論……………………………………………45
第四章 有機薄膜電晶體的環境可靠度測試
4-1 前言……………………………………………48
   4-2 時間偏壓測試…………………………………48
   4-3 高溼儲存測試…………………………………54
第五章 總結與展望……………………………………………62
參考文獻………………………………………………………64
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指導教授 李佩雯、詹益仁
(Pei-wen Li、Yi-jen Chan)
審核日期 2010-8-18
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