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姓名 賴鍵毅(Chien-Yi Lai)  查詢紙本館藏   畢業系所 機械工程學系
論文名稱 電化學製作針錐微電極之製程研究與分析
(The Analysis and Investigation on the Manufacturing Pin-shaped Micro Electrodes by Electrochemical Machining)
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摘要(中) 微機電是目前科技界在未來最具有發展潛力的研究領域之一,其加工方法之研究和精進是所必需的。電化學微細加工(EMM)之優點為可以加工任何金屬材料,且不受硬度與強度的影響和加工過程刀具電極不損耗,加工速度快,應力也不會殘留在工件表面,加工的重現性也較放電加工高。
本文研究目的為利用電化學將直徑200 μm的鎢棒製作成針錐狀電極得到錐度極小及深寬比大的針錐狀電極,分別使用單一因子法與田口法來分析加工參數(如:操作電壓、電解液濃度、陽極長度、拉提速率、陰極面積、電極旋轉速率)之影響性。
實驗結果顯示當操作電壓和電解液濃度在加工電流達到極限電流前改變時會影響加工表面精度,而陽極浸入長度和拉提速率之搭配對於加工微電極成型之錐度與深寬比有重要的影響性,電極旋轉速率在適當速度內可使雜質離開加工表面提升表面精度,本文在參數範圍內找出一組較合宜之參數。
摘要(英) MEMS is one of the most important technology in the future, and it is important and necessary to advance this manufacture methods. Electrochemical micro-machining (EMM) has several advantages. Any metal material regardless of its hardness can be machined by EMM. The cathode tool would not be wearied the machining process, and work piece after machining will not have any residual stress remained on its surface. The machining reproducibility of EMM is higher than that of electro discharge machining.
The purpose of this thesis is to use electrochemical machining to manufacture a tungsten rod with diameter of 200 μm to a conical-shaped electrode. The resulting cone angle is extremely tiny with high aspect ratio. Both Taguchi statistical method of quality-engineering and the single factor method are used to analyze the influences of working parameters, such as applied voltage, electrolyte concentration, anode length, draw up rate, cathode area, and rotational rate of electrode, on the conical-shaped electrode.
The applied voltage and electrolyte concentration are found to significantly affect the electrode fabrication when the current is smaller than the current limit. Anode length and drawing up rate have large influence on the aspect ratio and the cone angle. Rotational rate of electrode can increase the machining precision. The best combination of parameters are simultaneously acquired from the research.
關鍵字(中) ★ 動力拉提法
★ 針錐
★ 電化學微細加工
★ 微電極
關鍵字(英) ★ electrochemical micro-machining
★ micro electrode
★ tungsten
★ conical-shaped
★ dynamic drawing
論文目次 摘要 V
Abstract VI
目錄 VIII
表目錄 XI
圖目錄 XII
符號說明 XIV
第一章 序論 1
1-1前言 1
1-2掃描探針顯微術 3
1-3電化學加工 4
1-4文獻回顧 5
1-5研究目的 10
第二章 理論基礎 12
2-1電化學加工理論 12
2-1-1電流效率(Current Efficiency) 13
2-1-2歐姆定律(Ohm's Law) 13
2-1-3電雙層 14
2-2極化 15
2-2-1活性極化(activation polarization): 16
2-2-2濃度極化(concentration polarization): 16
2-2-3歐姆極化(resistance polarization): 17
2-3電解液導電度、導電度與濃度的關係、電流密度 17
2-3-1導電度(Conductivity) 17
2-3-2 導電度與濃度之關係 18
2-3-3 電流密度(Current Density) 19
2-4質量傳遞類型 19
2-5電化學反應式 20
2-6 田口實驗計畫法 21
2-6-1 參數的種類 21
2-6-2 參數設計的配置 23
2-6-3信號雜音比 24
2-6-4 變異數分析 25
第三章 實驗設備與步驟 28
3-1 實驗設備 28
3-1-1 機台結構設計 28
3-1-2 刀具進給控制系統 29
3-1-3 電源供應器 30
3-1-4 導電度量測儀器 31
3-1-5 伺服馬達 32
3-1-6 恆溫加熱器 32
3-2 實驗材料 33
3-2-1 陰極電極片 33
3-2-2 陽極電極工件 33
3-2-3 電解液─氫氧化鉀KOH 34
3-3 直交表的建構 34
3-3-1 自由度的計算 35
3-3-2 標準直交表的選擇 35
3-3-3 變異數分析法(ANOVA) 36
3-4 實驗步驟及注意事項 36
第四章 結果與討論 39
4-1 陽極旋轉速率對微電極製作影響 42
4-2 陰極面積對微電極製作影響 44
4-3 陽極長度對微電極製作影響 45
4-4 操作電壓對微電極製作影響 47
4-5 電解液濃度對微電極製作影響 49
4-6 田口方法 51
4-6-1 ANOVA 與各參數分析 52
4-6-2 最佳參數水準組合 52
第五章 結論 54
5-1結論 54
5-2 未來展望 56
參考文獻 58
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指導教授 洪勵吾(Lih-Wu Hourng) 審核日期 2011-7-20
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