電化學製作針錐微電極之製程研究與分析

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：85

、訪客IP：3.14.253.221

姓名

賴鍵毅(Chien-Yi Lai) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

電化學製作針錐微電極之製程研究與分析
(The Analysis and Investigation on the Manufacturing Pin-shaped Micro Electrodes by Electrochemical Machining)

相關論文

★ 迴轉式壓縮機泵浦吐出口閥片厚度對性能影響之研究	★ 鬆弛時間與動態接觸角對旋塗不穩定的影響
★ 蚶線形滑轉板轉子引擎設計與實作	★ 利用視流法分析金屬射出成形脫脂製程中滲透度與毛細壓力之關係
★ 應用離心法實驗探求多孔介質飽和度與毛細力之關係	★ 利用網絡模型數值模擬粉末射出成形製程毛細吸附脫脂機制
★ 轉注成形充填過程之巨微觀流數值模擬	★ 二維熱流效應對電化學加工反求工具形狀之分析
★ 金屬粉末射出成形製程中胚體毛細吸附脫脂之數值模擬與實驗分析	★ 飽和度對金屬射出成形製程中毛細吸附脫脂之影響
★ 轉注成型充填過程巨微觀流交界面之數值模擬	★ 轉注成型充填過程中邊界效應之數值模擬
★ 鈦合金整流板電化學加工技術研發	★ 射出/壓縮轉注成型充填階段中流場特性之分析
★ 脈衝電化學加工過程中氣泡觀測與分析	★ 金屬粉末射出成型二維毛細吸附脫脂及飽和度之研究

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

至系統瀏覽論文 ( 永不開放)

摘要(中)

微機電是目前科技界在未來最具有發展潛力的研究領域之一，其加工方法之研究和精進是所必需的。電化學微細加工(EMM)之優點為可以加工任何金屬材料，且不受硬度與強度的影響和加工過程刀具電極不損耗，加工速度快，應力也不會殘留在工件表面，加工的重現性也較放電加工高。
本文研究目的為利用電化學將直徑200 μm的鎢棒製作成針錐狀電極得到錐度極小及深寬比大的針錐狀電極,分別使用單一因子法與田口法來分析加工參數(如：操作電壓、電解液濃度、陽極長度、拉提速率、陰極面積、電極旋轉速率)之影響性。
實驗結果顯示當操作電壓和電解液濃度在加工電流達到極限電流前改變時會影響加工表面精度，而陽極浸入長度和拉提速率之搭配對於加工微電極成型之錐度與深寬比有重要的影響性，電極旋轉速率在適當速度內可使雜質離開加工表面提升表面精度，本文在參數範圍內找出一組較合宜之參數。

摘要(英)

MEMS is one of the most important technology in the future, and it is important and necessary to advance this manufacture methods. Electrochemical micro-machining (EMM) has several advantages. Any metal material regardless of its hardness can be machined by EMM. The cathode tool would not be wearied the machining process, and work piece after machining will not have any residual stress remained on its surface. The machining reproducibility of EMM is higher than that of electro discharge machining.
The purpose of this thesis is to use electrochemical machining to manufacture a tungsten rod with diameter of 200 μm to a conical-shaped electrode. The resulting cone angle is extremely tiny with high aspect ratio. Both Taguchi statistical method of quality-engineering and the single factor method are used to analyze the influences of working parameters, such as applied voltage, electrolyte concentration, anode length, draw up rate, cathode area, and rotational rate of electrode, on the conical-shaped electrode.
The applied voltage and electrolyte concentration are found to significantly affect the electrode fabrication when the current is smaller than the current limit. Anode length and drawing up rate have large influence on the aspect ratio and the cone angle. Rotational rate of electrode can increase the machining precision. The best combination of parameters are simultaneously acquired from the research.

關鍵字(中)

★ 動力拉提法
★ 針錐
★ 電化學微細加工
★ 微電極

關鍵字(英)

★ electrochemical micro-machining
★ micro electrode
★ tungsten
★ conical-shaped
★ dynamic drawing

論文目次

摘要 V
Abstract VI
目錄 VIII
表目錄 XI
圖目錄 XII
符號說明 XIV
第一章序論 1
1-1前言 1
1-2掃描探針顯微術 3
1-3電化學加工 4
1-4文獻回顧 5
1-5研究目的 10
第二章理論基礎 12
2-1電化學加工理論 12
2-1-1電流效率(Current Efficiency) 13
2-1-2歐姆定律(Ohm's Law) 13
2-1-3電雙層 14
2-2極化 15
2-2-1活性極化(activation polarization)： 16
2-2-2濃度極化(concentration polarization)： 16
2-2-3歐姆極化(resistance polarization)： 17
2-3電解液導電度、導電度與濃度的關係、電流密度 17
2-3-1導電度(Conductivity) 17
2-3-2 導電度與濃度之關係 18
2-3-3 電流密度(Current Density) 19
2-4質量傳遞類型 19
2-5電化學反應式 20
2-6 田口實驗計畫法 21
2-6-1 參數的種類 21
2-6-2 參數設計的配置 23
2-6-3信號雜音比 24
2-6-4 變異數分析 25
第三章實驗設備與步驟 28
3-1 實驗設備 28
3-1-1 機台結構設計 28
3-1-2 刀具進給控制系統 29
3-1-3 電源供應器 30
3-1-4 導電度量測儀器 31
3-1-5 伺服馬達 32
3-1-6 恆溫加熱器 32
3-2 實驗材料 33
3-2-1 陰極電極片 33
3-2-2 陽極電極工件 33
3-2-3 電解液─氫氧化鉀KOH 34
3-3 直交表的建構 34
3-3-1 自由度的計算 35
3-3-2 標準直交表的選擇 35
3-3-3 變異數分析法(ANOVA) 36
3-4 實驗步驟及注意事項 36
第四章結果與討論 39
4-1 陽極旋轉速率對微電極製作影響 42
4-2 陰極面積對微電極製作影響 44
4-3 陽極長度對微電極製作影響 45
4-4 操作電壓對微電極製作影響 47
4-5 電解液濃度對微電極製作影響 49
4-6 田口方法 51
4-6-1 ANOVA 與各參數分析 52
4-6-2 最佳參數水準組合 52
第五章結論 54
5-1結論 54
5-2 未來展望 56
參考文獻 58

參考文獻

1. 楊龍杰編著，認識微機電，滄海書局(2001).
2. 徐泰然著，朱銘祥譯，微機電系統與微系統，普林斯頓(2003).
3. J. A. McGeough, M. Leu, K. P. Rajurkar, A. DeSilva, Q. Liu, Electroforming Process and Application to Micro/Macro Manufacturing, CIRP Annals Manufacturing Technology, Vol. 50 (1), 499-502 (2001).
4. I. S. Hwang, Scanning Probe Microscopy: Principles and Applications,科儀新知第二十六卷第四期94.2 (2005).
5. S. H. Ahn, S. H. Ryu, D. K. Choi, C. N. Chua, Electro-chemical Micro Drilling Using Ultra Short Pulses, Precision Engineering, Vol. 28, pp. 129-34 (2004).
6. 木本康雄著，賴耿陽譯著，精密加工之電學應用，復漢出版社(1982).
7. 佐藤敏一著，賴耿陽譯著，金屬腐蝕加工技術，復漢出版社(1986).
8. B. Bhattacharyya, J. Munda, M. Malapati, Advancement in Electrochemical Micro-Machining, International Journal of Machine Tools & Manufacture, Vol. 44, pp. 1577-1578 (2004)
9. Y. M. Lim, S. H. Kim, An Electrochemical Fabrication Method for Extremely Thin Cylindrical Micropin, International Journal of Machine Tools & Manufacture, Vol. 41, pp. 2287-2296 (2001).
10. M. Kock, V. Kirchner and R. Schuster, Electrochemical Micromachining with Ultrashort Voltage Pulses-a Versatile Method with Lithographical Precision, Electrochemical Action, Vol. 48, pp. 3213-3219 (2003).
11. H. Hocheng,Y. H. Sun, S. C. Lin and P.S. Kao, A Material Removal Analysis of Electrochemical Machining Using Flat-End Cathode, Journal of Material Processing Technology, Vol. 140, pp. 264-268 (2003).
12. B. H. Kim, S. H. Ryu, D. K. Choi, and C. N. Chu, Micro Electrochemical Milling, Journal of Micromechanics and Microengineering, Vol. 15, No. 1, pp. 124-129 (2004).
13. B. Bhattacharyya , M. Malapati and J. Munda, Advancement in Electrochemical Micro-machining, Journal of Materials ProcessingTechnology, Vol. 169, pp. 485-492 (2005).
14. H. S. Shin, B. H. Kim and C. N. Chu, Analysis of the Side Gap Resulting form Micro Electrochemical Machining with a Tungsten Wire and Ultrashort Voltage Pulses, Journal of Macromechanics and Microengineering, Vol. 18, pp. 1-6 (2008).
15. Z. Wang, B. Zhu and G. Cao, Fabricating Microelectrode by Electrochemical Micromachining, Proceedings of SPIE, Vol. 6041, pp. 1-5 (2006).
16. 陳裕豐，高潔淨閥件之流道表面處理－電解拋光（EP）技術，機械工業雜誌，198 期， 230-240 頁，9 月，(1999).
17. D. Zhu, K. Wang and N. S. Qu, Micro Wire Electrochemical Cutting by Using in Situ Fabricated Wire Electrode, CIRP Annals -Manufacturing Technology, Vol. 56, pp. 241-244 (2007).
18. R. Hobara, S. Yoshimoto, and S. Hasegawa, Dynamic Electrochemical Etching Technique for Tungsten Tips Suitable for Multi-tip Scanning Tunneling Microscopes, Journal of Surface Science and Nanotechnology, Vol. 5, pp. 94-98 (2007).
19. S. H. Choi, S.H. Ryu and C.N. Chu, Fabrication of WC Micro-shaft by Using Electrochemical Etching, International Journal of Advanced Manufacture Technology, Vol. 31, pp. 682-687 (2007).
20. E. S. Lee, S. Y. Baek, and C. R. Cho, A Study of the Characteristics for Electrochemical Micromachining with Ultrashort Voltage Pulses, International Journal of Advanced Manufacture Technology, Vol. 31, pp. 762-769 (2007).
21. C. H. Jo, B. H. Kim and C. N. Chu, Micro Electrochemical Machining for Complex Internal Micro Features, CIRP Annals - Manufacturing Technology, Vol. 384, pp. 247-250 (2009).
22. H. S. Shin, B. H. Kim and C. N. Chu, Analysis of the Side Gap Resulting forｘｕMicro Electrochemical Machining with a Tungsten Wire and Ultrashort Voltage Pulses, Journal of Macromechanics and Microengineering, Vol. 18, pp. 1-6 (2008).
23. S. H. Ryu, Micro Fabrication by Electrochemical Process in Citric Acid Electrolyte, Journal of Materials Processing Technology, Vol. 209, pp. 2831-2837 (2008).
24. V. Kirchner, X. Xia and R. Schuster, Electrochemical Nano-structuring with Ultra-short Voltage Pulses, Acc. Chem. Res., Vol. 34, pp. 371-377 (2001).
25. 胡啟章編著，電化學原理與方法，五南圖書 (2002).
26. J. F. Thorpe and R. D. Zerkle, Theoretical Analysis of the Equilibrium Sinking of Shallow, Axially Symmetric, Cavities by Electrochemical Machining, Electrochemical Society, Princeton ,pp. 1-39 (1971).
27. 范智文，利用電化學加工製作微電極與鑽孔之研究與分析，國立中央大學機械工程學系，博士論文， (2010).
28. 永田靖著, 陳耀茂譯, 實驗計畫法入門, 財團法人中衛發展中心 (2004).
29. Madhavv S. Phadke 著, 黎中正譯著, 穩健設計之品質工程, 台北圖書 (1993).
30. 王維鴻，利用電化學加工配合動力拉提法製作針錐微電極之參數分析，國立中央大學機械工程學系，碩士論文， (2010).
31. 田福助編著，電化學基本原理與應用，五州出版社 (2004).
32. 楊明棋，電化學微電極製程之最佳化參數分析，國立中央大學機械工程學系，碩士論文， (2007).

指導教授

洪勵吾(Lih-Wu Hourng)

審核日期

2011-7-20

推文