強度敏感式影像橢圓儀及應用

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姓名

張幼欣(Yu-hsin Chang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

強度敏感式影像橢圓儀及應用
(Intensity-sensitive Imaging Ellipsometer and Applications)

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摘要(中)

在本篇論文採用橢圓儀的量測技術，發展出兩套皆可量測扭轉向列型液晶TNLC二維影像參數的光學系統，分別為強度敏感式影像橢圓儀與單通道式影像橢圓儀，利用基本的P-S-A架構並藉由旋轉四分之一波片量測扭轉向列型液晶，並且此二者皆具實現即時影像量測的能力。透過數值擬合的運算方式，並結合Yeh與Gu和Lien所推導出的兩種TNLC物理模型，我們可以同時量到TNLC的五種參數，包含：厚度、預傾角、扭轉角、配向角與非扭轉相位延遲。最後，我們對此兩種光學系統所得到的TNLC參數進行比較。實驗結果顯示強度敏感式影像橢圓儀提供了較高的量測精度，而單通道式影像橢圓儀有架設簡單與量測過程簡便的優勢。

摘要(英)

In this thesis, we propose that both the intensity sensitive imaging ellipsometer and single channel imaging ellipsometer can two-dimensionally measure the parameters of the twisted nematic liquid crystal (TNLC) cell by using a polarizer-sample-analyzer ellipsometric configuration with a rotating quarter wave plate (QWP). Both of them have ability to achieve the real-time measurement. The five characteristic parameters, including cell gap, pretilt angle, rubbing angle, twist angle and untwisted phase retardation can be measured simultaneously by numerical curve fitting two different physical model of a TNLCD, which are derived by Lien, and Yeh and Gu. Finally, we compare two sets of TN-LC parameters obtaining from these two developed optical system setup. The experimental result shows that the intensity sensitive imaging ellipsometer can provide higher measurement accuracy, while the single channel imaging ellipsometer takes advantage on the easy to set up and less measurement process.

關鍵字(中)

★ 扭轉向列型液晶
★ 影像橢圓儀

關鍵字(英)

★ imaging ellipsometer
★ TNLC

論文目次

中文摘要………………………………………………………………………i
Abstract ………………………………………………………………………ii
致謝……………………………………………………………………………iii
目錄……………………………………………………………………………v
圖目錄…………………………………………………………………………vii
表目錄…………………………………………………………………………ix
一、緒論…………………………………………………………………………1
1-1 研究動機………………………………………………………………1
1-2 研究目的………………………………………………………………1
1-3 文獻回顧………………………………………………………………2
1-4 論文架構………………………………………………………………2
二、實驗原理……………………………………………………………………3
2-1 偏振光原理……………………………………………………………3
2-1-1 偏振光簡介……………………………………………………3
2-1-2 瓊斯向量………………………………………………………7
2-1-3 瓊斯矩陣………………………………………………………8
2-1-4 史托克向量與穆勒矩陣……………………………………10
2-2四分之一波片………………………………………………………16
2-3液晶簡介……………………………………………………………20
2-3-1 液晶種類……………………………………………………21
2-3-2 液晶的光學特性……………………………………………23
2-3-3 液晶的物理特性……………………………………………26
2-3-4 液晶的分布定向情形………………………………………27
2-3-5 扭轉向列型液晶樣品………………………………………29
三、實驗方法 ………………………………………………………………37
3-1 液晶樣品製作………………………………………………………37
3-2 強度敏感式影像橢圓儀……………………………………………38
3-2-1 實驗架構……………………………………………………38
3-2-2實驗步驟……………………………………………………40
3-2-3 光強度影像之處理…………………………………………40
3-3 單通道影像式橢圓儀………………………………………………44
3-3-1 實驗架構與步驟……………………………………………44
3-3-2光強度影像之處理……………………………………………44
3-4 曲線擬合……………………………………………………………47
四、實驗數據與分析…………………………………………………………50
4-1 算術平均數與標準差………………………………………………50
4-2 實驗結果……………………………………………………………50
4-2-1強度敏感式影像橢圓儀………………………………………51
4-2-2單通道影像式橢圓儀…………………………………………57
4-3 實驗數據分析………………………………………………………62
4-4 影像處理……………………………………………………………62
五、結論與展望………………………………………………………………65
5-1 結論與討論…………………………………………………………65
5-2 未來展望……………………………………………………………65
參考文獻………………………………………………………………………67

參考文獻

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指導教授

周晟、賴昆佑
(Chien Chou、Kun-yu Lai)

審核日期

2012-7-23

推文