衛載遙測取像儀反射鏡加工缺陷檢測與最佳光學成像品質之運動學裝配設計

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范綱傑(Gang-jie Fan) 查詢紙本館藏

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論文名稱

衛載遙測取像儀反射鏡加工缺陷檢測與最佳光學成像品質之運動學裝配設計
(Detection of grinding defect and the optimum design of kinematic mount for a primary mirror of a space-born remote sensing instrument)

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摘要(中)

本文主要研究對象為遙測取像儀之反射鏡加工與裝配，旨在探討加工與裝配對反射鏡光學品質之影響。加工缺陷檢測主要以殘留應力與次表層破壞為主，本研究利用不同粒徑之鑽石刀具，分別在試片上研磨，再以不同儀器觀察表面之殘留應力與次表層破壞，得到刀具粒徑對此兩種加工缺陷之影響。
一般光學分析流程中，不易計入運動學裝配與鏡片變形所降低的光學品質，本研究建立一套光機分析流程，整合有限元素與曲面擬合方法，能將主鏡受力產生之變形匯入光學軟體進行分析，模擬實際運作情況下之光學品質。利用此一流程，分析運動學裝配貼合位置對主鏡光學品質之影響，並找出具最佳品質之貼合位置；另外，此流程亦搭配田口法進一步改良裝配參數，使其對主鏡成像影響能降至最低。

摘要(英)

This study investigates the effect of machining defects and the optimum mounting on a primary mirror of a remote sensing instrument. Processing defects discussed here are residual stress and subsurface damage. The specimens are ground by diamond tools with different grain-sized, and the effects of grain size of the grinding tool on the residual stress and subsurface damage are investigated.
Generally, optical simulation process does not consider the degraded optical performance caused by the deformations of mounting and mirror. This research established an opto-mechanical analysis process to integrate finite element analysis and surface fitting. After fitting, the data of the deformed primary mirror can be imported into optical simulation software to analyze its real optical performance. Based on the integrated opto-mechanical analysis, the best position to glue the kinematic mount and the primary mirror is determined. Furthermore, Taguchi method is adopted to determine the design parameters of the kinematic mount for the primary mirror which will yield a best optical performance.

關鍵字(中)

★ 光機整合分析
★ 有限元素法
★ 田口法
★ 像散
★ 調制轉換函數
★ 光彈法
★ 次表層破壞
★ 殘留應力
★ Zernike多項式

關鍵字(英)

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vii
表目錄 xi
第1章緒論 1
1.1 研究背景 1
1.2 文獻回顧 2
1.2.1 脆性材料加工應力與次表層破壞 2
1.2.2 反射鏡裝配設計分析 5
1.2.3 反射面變形分析 10
1.3 研究目的與動機 13
第2章反射鏡加工應力與次表層破壞分析 14
2.1 光彈原理與應力殘留檢測 14
2.1.1 光彈原理 14
2.1.2 光彈法儀器架構 19
2.2 次表層破壞分析與檢測 21
2.3 實驗流程與規劃 23
2.4 實驗結果與討論 25
2.4.1 殘留應力量測結果 25
2.4.2 次表層破壞量測結果 31
2.5 結論 35
第3章運動學裝配貼合位置分析 36
3.1 研究流程與架構 36
3.2 模型幾何外型與光學規格 37
3.3 貼合位置分析設定 42
3.4 有限元素模擬 44
3.4.1 邊界條件與網格設定 44
3.4.2 材料設定 47
3.5 Zernike多項式曲面擬合 48
3.5.1 反射面變形分析 48
3.5.2 Zernike多項式擬合 50
3.6 調制轉換函數模擬 52
3.7 貼合位置分析結果與討論 54
3.7.1 非球面鏡貼合位置分析 54
3.7.2 無減重結構之非球面鏡貼合位置分析 58
3.7.3 近似平面鏡貼合位置分析 62
3.7.4 貼合位置分析結論 63
3.8 結論 64
第4章貼合位置實驗分析 65
4.1 實驗用干涉儀架構 65
4.2 模型與模擬設定 66
4.3 實驗與模擬結果討論 68
4.4 實驗與模擬偏差討論 71
4.4.1 實驗結果偏差討論 71
4.4.2 ISM組裝誤差模擬 73
4.5 結論 74
第5章田口法與運動學裝配分析 75
5.1 田口法理論 75
5.1.1 品質特性 75
5.1.2 系統因子分析與選用 76
5.1.3 實驗規劃直交表 77
5.1.4 S/N比計算與分析 78
5.2 模擬流程與參數設定 80
5.2.1 模擬流程與品質特性定義 80
5.2.2 控制因子與水準數設定 82
5.2.3 模型與有限元素法邊界條件設定 86
5.3 L25直交表模擬結果與分析 87
5.3.1 有限元素法模擬結果 87
5.3.2 田口法結果與分析 93
5.4 L9直交表模擬結果與分析 99
5.4.1 田口法參數設定 99
5.4.2 模擬結果與討論 102
5.5 L9直交表第6組與其他組合綜合比較與討論 105
5.5.1 光學模擬結果與設計參數 105
5.5.2 鏡面變形量與最大主應力 110
5.5.3 模態分析 112
5.6 結果與討論 115
第6章結論與未來工作 116
6.1 結論 116
6.2 未來工作 118
參考文獻 119

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指導教授

陳怡呈

審核日期

2012-10-23

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