電化學放電加工於石英玻璃加工精度改善之研究

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姓名

林正宜(Cheng-yi Lin) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

電化學放電加工於石英玻璃加工精度改善之研究
(The Research of Improving the Machining Quality and Accuracy inElectrochemical Discharge Machining)

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摘要(中)

微機電系統近年來在科技工業上扮演舉足輕重的角色，其中光學
玻璃和石英等硬脆材料的應用與日俱增。電化學放電加工(ECDM)是
加工非導電材料的新興加工技術，具有殘留熱應力低、加工精度高、
加工速率快以及電極磨耗低等優點。
　　本文使用直徑100um之碳化鎢刀具作為工具電極，電解液採用
氫氧化鉀(KOH)溶液搭配不同濃度之乙醇(Ethanol)，利用電化學放電
加工對石英玻璃進行鑽孔，分別使用不同電解液濃度、電壓、頻率、
電解液高度等參數，對於氣膜穩定性、厚度以及加工精度造成的影響
作研究與分析。
　　實驗結果顯示，相較於未添加乙醇的電解液，在使用添加乙醇
6.5wt%的電解液作加工時，有較佳的表面過切量以及表面精度，並且
在加工時受到氣泡球的影響較少，電解液的對流效果也較好。添加
6.5wt%乙醇之電解液在過切量的表現上，比起未添加乙醇時，最多可
減少57%，而表面的熱影響區也大幅減少。

摘要(英)

MEMS is one of the most important technology in the future. Pyrex glass and quartz are widely used in MEMS. Electrochemical discharge machining(ECDM) is one of the novel technologies applied on machining non-conductive materials. ECDM has serveral advantages, such as low residual stress on the surface, high quality, high machining rate and low tool electrode wear.
　　A tungsten carbide cylindrical electrode with diameter of 100um is selected as the tool electrode. KOH solution contained with different concentration of ethanol is selected as the electrolyte. In this study, the method of ECDM is performed on drilling mirco holes on qurtz. By using the parameters, such as electrolyte concentration, applied voltage, frequency and electrolyte level, the stability and thickness of gas film along with the machining quality are analyzed.
　　From experimental results, it shows that the overcut, quality on the hole entrance and electrolyte circulation are better when the electrolyte contains 6.5wt% of ethanol. The influences of gas bubble and the heat affected zone are also less. Compared with KOH electrolyte, the overcut of the electrolyte contains 6.5wt% of ethanol can be reduced up to 57%.

關鍵字(中)

★ 電化學放電加工
★ 石英玻璃

關鍵字(英)

★ Quartz
★ Electrochemical discharge machining

論文目次

摘要 ..................................................... I
Abstract ................................................. II
目錄 .................................................... III
表目錄 .................................................. VI
圖目錄 ................................................. VII
符號說明 ................................................ IX
第一章緒論 .............................................. 1
1-1 前言 ............................................. 1
1-2 石英加工簡介 ...................................... 1
1-3 電化學放電加工簡介 ................................ 3
1-4 文獻回顧 .......................................... 4
1-4-1 電化學放電加工機制 ........................... 4
1-4-2 電化學放電加工製程 ........................... 8
1-5 研究目的與動機 ................................... 10
第二章基本原理 ...................................... 12
2-1 電化學放電加工原理 ............................... 12
2-2 火花形成機制......................................13
2-3 電化學放電反應式..................................15
2-4 電解液導電度......................................17
2-5 接觸角與濕潤性....................................18
第三章實驗設備方法與步驟 ............................... 20
3-1 實驗設備 ......................................... 20
3-1-1 機台結構設計............................... 20
3-1-2 刀具進給控制系統........................... 21
3-1-3 脈衝式直流電源供應系統..................... 21
3-1-4 聯軸器及導電夾具........................... 22
3-1-5 示波器與電流探測棒.............................. 22
3-2 實驗材料 ......................................... 22
3-3 實驗步驟及注意事項 ............................... 24
3-3-1 實驗步驟 .................................... 24
3-3-2 實驗量測與拍攝 .............................. 26
3-3-3 實驗注意事項 ................................ 26
第四章結果與討論....................................... 27
4-1 電解液濃度對電化學放電加工影響 ................... 30
4-2 電解液高度對電化學放電加工影響 ................... 32
4-3 加工電壓對電化學放電加工影響 ..................... 33
4-4 加工頻率對電化學放電加工影響 ..................... 35
4-5 氣泡球對電化學放電加工影響 ....................... 37
第五章結論與未來展望 ................................... 41
5-1 結論 ............................................ 41
5-2 未來展望 ......................................... 42
參考文獻 ................................................ 43

參考文獻

[1]A.J. Shih, “An experimental investigation of rotary diamond truing and dressing of vitreous bond wheels for ceramic grinding, ” International Journal of Machine Tools & Manufacture, Vol. 40, pp.1755–1774, 2000.
[2]B. Linke, F. Klocke, “Temperatures and wear mechanisms in dressing of vitrified bonded grinding wheels,” International Journal of Machine Tools& Manufacture, Vol. 50, pp.552–558, 2010.
[3]E. W. Becker, H. Betz, W. Ehrfeld, W. Glashauser, A. Heuberger, H. J. Michel, D. Miinchmeyer, S. Pongratz and R. von Siemens, “Production of separation nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics,” Naturwissenschaften, Vol. 69, pp.520-523, 1982.
[4]H. Kurafuji and K. Suda, “Electrical discharge drilling of glass,” Annals of the CIRP, Vol.16, pp.415-419, 1968.
[5]H. H. Kellog, “The interface observation of poles in water electrolysis,” Journal of Electrochemical Society, Vol. 97, pp. 133-137, 1950.
[6]H. Langen, V. Fascio, R. Wüthrich and D. Viquerat, “Three-dimensional microstructuring of Pyrex glass wafers by spark-assisted chemical etching”, Microrobotics and Microassembly, Vol. 4568, pp.304-309, 2001.
[7]N. H. Cook, G. B. Foote, P. Jordan and B. N. Kalyani,
“Experimental studies in electro-machining,” Transactions of ASME
Journal of Engineering for Industry, pp. 945-950, 1973.
[8]M. Kubota, “Drilling of steel by using electrochemical discharge
machining,” Proceedings of the International Conference on
Production Engineering, Tokyo, pp. 51-55, 1974.
[9]S. Tandon, V. K. Jain, P. Kumar and K. P. Rajurkar, “Investigations
into machining of composites,” Precision Engineering, Vol. 12, pp. 227-238, 1990.
[10]M. Kubota and Y. Tamura, “ECDM drills a steel plate with high feed rate,” Bulletin of the Japan Society of Precision Engineering, Vol. 7, pp.114-118, 1983.
[11]A. B. Khayry and J. A. McGeough, “Analysis of electrochemical arc machining by stochastic and experimental methods,” Proceedings of Royal Society, London, pp.403-429, 1987.
[12]V. Reghuram ,Experimental observations of the ECD phenomena, Dissertation Thesis, Indian Institute of Technology, Kanpur, India, 1994.
[13]I. Basak and A. Ghosh, “Mechanism of material removal in electrochemical dischargemachining: a theoretical model and experimental verification,” Journal of Material Processing Technology, Vol. 71 pp. 350-359, 1997.
[14]I. Basak, Electrochemical discharge machining mechanism and a scheme for enhancing material removal capacity, Dissertation Thesis, Indian Institute of Technology, Kanpur, India, 1991.
[15]V.K. Jain, P.M. Dixit and P.M. Pandey, “On the analysis of the electro-chemical spark machining process- test of machining on composite materials,” International Journal of Machine Tools and Manufacture,” Vol. 39, pp.165-186, 1999.
[16]B. Bhattacharyya, B.N. Doloi and S.K. Sorkhel, “Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials,” Journal of Materials Processing Technology, Vol. 95, pp. 145-154, 1999.
[17]A. Kulkarni, R. Sharan and G.K. Lal, “An experimental study of discharge mechanism in electrochemical discharge machining,” International Journal of Machine Tools and Manufacture, Vol. 42, pp. 1121-1127, 2002.
[18]V. Fascio, H. H. Langen, H. Bieuler and Ch. Comninellis, “Investigations of the spark assisted chemical engraving,” Electrochemistry Communications, Vol. 5, pp. 203-207, 2003.
[19]V. Fascio, H. H. Langen, H. Bleuler and C. Comninellis, “Spark assisted chemical engraving: a novel technology for glass microstructuring,” 54th Annual Meeting of the International Society of Electrochemistry, São Pedro, Brazil, pp. 203-207, 2003.
[20]R. Wuthrich, V. Fascio and H. Bleuler, “A stochastic model for electrode effects,” Electrochimica Acta , Vol. 49, pp. 4005-4010, 2004.
[21]R. Wüthrich and V. Fascio and “Machining of non-conducting materials using electrochemical discharge phenomenon ─ an overview,” International Journal of Machine Tools & Manufacture, Vol. 45, pp. 1095-1118, 2005.
[22]V. Fascio, R. Wüthrich and H. Bleuler, “Spark assisted chemical engraving in the light of electrochemistry” Electrochimica Acta, Vol. 49, pp. 3997-4003, 2004.
[23]R. Wüthrich, C. Comninellis and H. Bleuler, “Bubble evolution on vertical electrodes under extreme current densities,” Electrochimica Acta, Vol. 50, pp. 5242-5246, 2005.
[24]R. Wüthrich and L.A. Hof, “The gas film in spark assisted chemical engraving(SACE) ─ A key element for micro-machining applications,” International Journal of Machine Tools & Manufacture, Vol. 46, pp. 828-835, 2006.
[25]R. Wüthrich, U. Spaelter and H. Bleuler, “The current signal in spark-assisted chemical engraving(SACE): what does it tell us,” Journal of Micromechanics and Microengineering, Vol. 16, pp. 779-785, 2006.
[26]R. Wüthrich, U. Spaelter, Y. Wu and H. Bleuler, “A systematic characterization method for gravity-feed micro-hole drilling in glass with spark assisted chemical engraving (SACE),” Journal of Micromechanics and Microengineering, Vol. 16, pp.1891-1896, 2006.
[27]P. Maillard, B. Despont, H. Bleuler and R. Wüthrich, “Geometrical characterization of micro-holes drilled in glass by gravity-feed with spark assisted chemical engraving (SACE) ,” Journal of Micromechanics and Microengineering, Vol. 17, pp.1343-1349, 2007.
[28]C. K. Yang, C. P. Cheng, C.C. Mai, A.C. Wang, J.C. Hung, B. H. Yan, “Effect of surface roughness of toolelectrode materials in
ECDM performance,” International Journal of Machine Tools & Manufacture, Vol. 50, pp.1088-1096, 2010.
[29]V.K. Jain, Y.P. Singh, P. Kumar and D.C. Agrawal, “Machining piezoelectric (PZT)ceramics using an electrochemical spark machining(ECSM) process,” Journal of Materials Processing Technology, Vol. 58, pp. 24-31, 1996.
[30]V. Fascio, R. Wüthrich, D. Viquerat and H. Langen, “3D microstructuring of glass using electrochemical discharge machining (ECDM) ,” Micromechatronics and Human Science, pp.179-183, 1999.
[31]C.T. Yang, S.S. Ho and B.H. Yan, “Micro hole machining of borosilicate glass through electrochemical discharge machining (ECDM),” Key Engineering Materials, Vol. 196, pp. 149-166, 2001.
[32]H.J. Lim, Y.M. Lim, S.H. Kim and Y.k. Kwak, “Self-aligned micro tool and electrochemical discharge machining (ECDM) for ceramic materials”, Optical Engineering for Sensing and Nanotechnology, Vol. 4416, pp. 348-353, 2001.
[33]D.J. Kim, Y. Ahn, S.H. Lee and Y.K. Kim, “Voltage pulse frequency and duty ratio effects in an electrochemical discharge microdrilling process of Pyrex glass,” International Journal of Machine Tools & Manufacture, Vol. 46, pp. 1064-1067, 2006.
[34]R. Wüthrich, B. Despont, P. Maillard and H. Bleuler, “Improving the material removal rate in spark-assisted chemical engraving (SACE) gravity-feed micro-hole drilling by tool vibration,” Journal of Micromechanics and Microengineering, Vol. 16, N 28-N31, 2006.
[35]Z.P. Zheng, H.C. Su, F.Y. Huang and B.H. Yan, “The tool geometrical shape and pulse-off time of pulse voltage effects in a Pyrex glass electrochemical discharge microdrilling process,” Journal of Micromechanics and Microengineering, Vol. 17, pp. 265-272, 2007.
[36]M. S. Han, B. K. Min and S. J. Lee, “Modeling gas film formation in electrochemical discharge machining processes using a side-insulated electrode ”, Journal of Micromechanics and Microengineering, Vol. 18, 045019, 2008.
[37]M. S. Han, B. K. Min and S. J. Lee, “Geometric improvement of electrochemical discharge micro-drilling using an ultrasonic-vibrated electrolyte ”, Journal of Micromechanics and Microengineering, Vol. 19, 065004, 2009.
[38]C. K. Yang, K. L.Wu, J. C. Hung, S. M. Lee, J. C. Lin, B. H. Yan, “Enhancement of ECDM efficiency and accuracy by spherical toolelectrode,” International Journal of Machine Tools & Manufacture, Vol.51, pp.528-535, 2011.
[39]王家威，界面活性劑改善玻璃微孔電化學放電成形精度的影響，國立中央大學機械工程研究所，碩士論文 (2006)。
[40]朱樹敏編著，電化學加工技術，化學工業出版社（2006）。
[41]胡啟章編著，電化學原理與方法，五南圖書 (2002)。
[42]田福助編著，電化學基本原理與應用，五洲出版社 (2004)。
[43]J.F. Thorpe and R.D. Zerkle, “Theoretical analysis of the equilibrium sinking of shallow, axially symmetric, cavities by electrochemical machining, ” Fundamentals of Electrochemical Machining, pp.1-39,1971.
[44]N. Gautam, V. K. Jain, “Experimental investigations into ECSD process using various tool kinematics,” International Journal of Machine Tools & Manufacture, Vol. 38, pp.15–27, 1998.
[45]高世橋,劉海鵬編著，毛細力學，科學出版社 (2010)。
[46]X. D. Cao, B. H. Kim, C. N. Chua, “Micro-structuring of glass with features less than 100?m by electrochemical discharge machining” Precision Engineering, Vol.33, pp.459–465, 2009
[47]C. S. Dutcher, A. S. Wexler and S. L. Clegg, “Surface tensions of inorganic multicomponent aqueous electrolyte solutions and melts, ” The Journal of Physical Chemistry A, Vol.114, pp.12216-12230, 2010

指導教授

洪勵吾(Lih-wu Hourng)

審核日期

2012-7-10

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