大尺寸金屬有機化學氣相沉積反應腔之數值分析模擬研究

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姓名

胡智愷(ZHI-KAI HU) 查詢紙本館藏

畢業系所

能源工程研究所

論文名稱

大尺寸金屬有機化學氣相沉積反應腔之數值分析模擬研究
(The simulation analysis of a large-size MOCVD reactor)

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摘要(中)

MOCVD為製造發光二極體(LED)的關鍵設備，MOCVD系統的組件大致可分為：反應腔、氣體控制系統、反應源及廢氣處理系統等。反應腔體為MOCVD過程中發生化學反應的地方，腔體與氣體供應系統連接，並藉由噴嘴(nozzle)或噴氣頭(showerhead)將氣體混合；腔體材質通常採用不鏽鋼製作，腔體的內壁則由石英或是高溫陶瓷構成內襯，而腔體中的乘盤置於加熱器之上。
MOCVD反應腔的設計對薄膜厚度均勻性和品質而言非常關鍵，
本文以CFD計算流體力學軟體Fluent針對大尺寸近耦合MOCVD反應腔體設計做一研究探討，並以載台與進氣口間隙、腔體壁面溫度、進氣口溫度、載台旋轉速度、壓力變化等作為研究參數。初步探討大尺寸下MOCVD腔體內部熱流場之行為。本研究結果也將提供設計大尺寸近耦合MOCVD反應腔體的基本架構.

摘要(英)

MOCVD is a key process for Light Emitting Diode industry, and the main components in a MOCVD system include reaction chamber, gas control system, MO source system and scrubber.
Basically, the reaction chamber connected with the gas supply system is a place where chemical reaction happened for MOCVD process. It makes MO source and carrier gas into a mixed gas by using the gas inlet system nozzle or showerhead. Generally, the material of the reactor is stainless steel, and the chamber wall is usually made by quartz or ceramics, and the susceptor is placed upper to the heater.
Design of a MOCVD reactor is very critical for epitaxy thin film uniformity and also the quality. A numerical Analysis for a large size closed-spaced MOCVD reactor will be developed by introducing the existing software Computational Fluid Dynamics FLUENT in this research. The numerical parameters will involve space between gas inlet and susceptor, wall temperature, gas inlet temperature, susceptor rotation rate, chamber pressure and so on. In the paper, we primarily investigate the behavior for thermal flow field of a large size close-spaced MOCVD reactor. Additionally, the results of this study can be used as a basic frame work for designing a large size close-spaced MOCVD reactor.
.

關鍵字(中)

★ 金屬有機化學氣相沉積
★ 加熱器
★ 熱流場
★ 反應腔體
★ 發光二極體

關鍵字(英)

論文目次

................................................................ 13
2-1-2 化學氣相沉積(CVD)反應步驟 .................................... 17
2-2 化學氣相沉積分類 ................................................................... 19
2-3 磊晶生長示意圖 ....................................................................... 23
2-4 強制、自然對流效應 ............................................................... 25
iii
2-5 熱質傳耦合效應 ....................................................................... 27
2-6 金屬有機化學氣相沉積機制 ................................................... 28
2-6-1 金屬有機化合物源 ........................................................ 28
2-6-2 氫化物源 ........................................................................ 30
2-7 金屬有機化學氣相沉積反應腔系統 ............................... 32
2-7-1 MOCVD反應腔體設計要點 ......................................... 32
2-7-2 研究型水平反應腔體 .................................................... 36
2-7-3 生產型水平反應腔體 .................................................... 38
2-7-4 高速旋轉式反應腔體 ............................................................ 40
2-7-5 近耦合式反應腔體 ................................................................ 42
2-8 近耦合式MOCVD反應腔系統機制分析 .............................. 44
2-9 相關條件假設闡述 ................................................................... 48
2-9-1 動量傳輸 ........................................................................ 49
2-9-2 熱能傳遞 ........................................................................ 49
2-9-3 質量傳輸 ........................................................................ 50
2-9-4 輸送性質 ........................................................................ 51
2-9-5 統御方程式 .................................................................... 52
第三章:數值分析運算 ............................................................................. 53
3-1 計算流體力學軟體FLUENT背景介紹 .................................. 53
iv
3-2 FLUENT原理 ............................................................................ 54
3-2-1 有限體積法 .................................................................... 54
3-2-2 流體區域離散 ................................................................ 55
3-3 流場疊代求解方法 ................................................................... 57
3-4 交錯網格與控制體積 ............................................................... 60
3-5 收斂條件 ................................................................................... 61
第四章:結果與討論 ................................................................................. 62
4-1 研究內容 ................................................................................... 62
4-2 腔體尺寸網格說明 ................................................................... 66
4-3 改變進氣口與載台之間間隙 ................................................... 69
4-4 改變腔體壁面溫度 ................................................................... 75
4-5 改變進氣口溫度 ....................................................................... 79
4-6 無載台轉速下腔體壓力影響 ................................................... 83
4-7 定載台轉速下腔體壓力影響 ................................................... 88
4-8 定壓力下轉速影響 ................................................................... 92
第五章:結論與展望 ................................................................................. 97
參考文獻 ............................................................................................... 98

參考文獻

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指導教授

利定東

審核日期

2012-11-30

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