週期性極化反轉鈮酸鋰之結構製作與研究

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姓名

呂建興(Jian-Hsin Lu) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

週期性極化反轉鈮酸鋰之結構製作與研究
(Fabrication and research of periodically poled lithium niobate structure)

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摘要(中)

本實驗的目的是利用準相位匹配原理，透過外加電場的實驗方法，使用未摻雜共熔配比鈮酸鋰晶片製做出週期性極化反轉鈮酸鋰晶體的二倍頻元件。配合液態電極的使用，製作出特定週期的PPLN，並且研究各項不同製程參數對於極化反轉之結果所造成的影響。本論文將針對週期性區域反轉鈮酸鋰晶片的製作與極化之結果進行討論。
從實驗結果發現，電量雖然是直接影響電疇擴散的主要參數，但光阻線寬的大小亦會對於duty-cycle值產生影響。吾人透過實驗方法，找出較適合本系統之電量與線寬參數值，其電量參數為7.22μC、線寬為10.6μm，依據此參數值來製作週期32μm，可得最接近duty-cycle=50:50的PPLN。

摘要(英)

The purpose of this experiment is using the undoped congruent lithium niobate chip through the external high electric field method to fabricate the periodically poled lithium niobate (PPLN) for quasi phase matched second harmonic generation (QPMSHG) device. By using the system with liquid electrode ”lithium chlorine”, we fabricated the PPLN of some specific period ,then the effects of domain inversion in the lithium niobate chip with different fabrication parameters are studied. The purposes of this thesis are on both the fabrication and the phenomenon of domain inversion of PPLN.
From the observation of experiment results we found that although the poling charge is the primary parameter of domain propagation, the line width on the photoresist(PR) pattern can also effect the results of duty-cycle. Through the experiment method that we used, we found some proper parameters of our experiment system, we fixed the poling charge on 7.22μC and line width 10.6μm on the PR pattern. According to these parameters we successfully fabricated the PPLN with the domain inversion period 32μm, with the effective length to 3mm , and the duty-cycle is near 0.5.

關鍵字(中)

★ 電疇反轉
★ 準相位匹配
★ 二倍頻轉換
★ 週期性極化反轉鈮酸裡

關鍵字(英)

★ PPLN
★ second harmonic generation
★ quasi phase match
★ domain inversion

論文目次

目錄
摘要......................................................I
Abstract..................................................II
誌謝......................................................III
目錄......................................................V
圖表目錄..................................................VII
符號說明..................................................X
第一章緒論...............................................1
1.1前言...................................................1
1.2鈮酸鋰晶體之結構與性質.................................2
1.2.1 鈮酸鋰性質..........................................2
1.2.2 鈮酸鋰晶體結構......................................3
1.2.3鈮酸鋰的反轉機制.....................................4
1.2.4 高壓電場致鈮酸鋰週期性區域反轉機制..................6
1.3.1 倍頻轉換（SHG）.....................................8
1.3.2 公式推導............................................10
1.4研究動機與目的.........................................11
第二章實驗設備與流程.....................................18
2.1高電壓極化反轉之實驗架設...............................18
2.2極化實驗流程...........................................20
2.2.1週期性極化反轉的前段製程.............................20
2.2.2電極的定義...........................................22
2.2.3週期與線寬之設計.....................................22
2.2.4週期性極化反轉的後段製程.............................23
2.3反轉區域的觀察 ........................................24
第三章極化反轉區域觀察的結果與討論......................31
3.1 黃光微影製程對於極化均勻度的影響.....................31
3.1.1正負Z面反轉結構不均..................................31
3.1.2 局部區域不反轉......................................32
3.1.3 結論................................................33
3.2 極化參數的控制........................................34
3.2.1.極化電壓的穩定度....................................34
3.2.2極化時間與電流.......................................35
3.2.3反轉電流的觀察.......................................35
3.2.4矯頑電場的觀察.......................................36
3.2.5 電量不足致反轉區域不均..............................36
3.3電量對於duty-cycle的影響...............................37
3.3.1 不同電量、相同電極週期與線寬........................39
3.3.2 相同電量、電極週期不同線寬..........................39
3.3.3 結論................................................40
第四章結論與展望.........................................56
參考文獻 .................................................59

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指導教授

陳志臣(Jyh-Chen Chen)

審核日期

2006-7-7

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