液滴撞擊旋轉表面研究

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：29

、訪客IP：3.147.78.242

姓名

李克威(Ke-Wei Li) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

液滴撞擊旋轉表面研究
(Liquid Droplet Impact on a Rotating Surface)

相關論文

★ 化學機械研磨流場模擬實驗研究	★ 變轉速之旋轉塗佈實驗研究
★ 微小熱點之主動式冷卻	★ 大尺寸晶圓厚膜塗佈
★ 科氏力與預塗薄膜對旋轉塗佈之影響	★ 微液滴對微熱點之冷卻
★ 大尺寸晶圓之化學機械研磨實驗研究	★ 液晶顯示器旋轉塗佈研究
★ 流體黏度對旋塗減量之影響	★ 微熱點與微溫度感測器製作
★ 高溫蓄熱器理論模擬	★ 熱氣泡式噴墨塗佈
★ 注液模式對旋轉塗佈之影響	★ 磁流體旋塗不穩定之研究
★ TFT-LCD狹縫式塗佈研究	★ 彩色濾光片噴塗研究

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

至系統瀏覽論文 ( 永不開放)

摘要(中)

本研究目的在於討論液滴撞擊在旋轉表面時，所發生的各種現象。實驗中液滴產生器由針筒和補液系統所組成，進而運用不同的掉落高度來產生不同的撞擊速度；為比較不同表面張力的影響，實驗所使用的液體為純水和酒精；撞擊表面為一個十二吋的矽晶圓，而旋轉的速度由控制器所操作，實驗過程中，表面切線速度由旋轉半徑以及轉速所決定。所有的實驗結果由影像的方式，使用高速攝影機拍攝，以千分之ㄧ秒的時間尺度量測影像中的液滴撞擊速度與液滴直徑。實驗中最重要之參數為韋伯數（Ｗｅ）和表面切線速度，隨著這兩個變數探討現象的變化。由實驗結果得知當表面切線速度為零時，隨著韋伯數的增加，水液滴撞擊會由附著現象轉變成手指不穩定性的現象，而酒精液滴撞擊會由附著現象變成飛濺。當表面切線速度隨著韋伯數改變，在水液滴撞擊實驗中顯示六個形變特徵：附著、手指不穩定性、尖端質量累積、手指擴散、平滑表面飛濺，以及手指狀表面飛濺。而酒精液滴實驗結果顯示，除了附著、尖端質量累積、平滑表面飛濺，以及手指狀表面飛濺四種特徵與其相似，另有:飛濺、前端薄膜飛濺，和水液滴撞擊有顯著的不同。實驗得知，當表面切線速度足夠大時，空氣膜就會影響液滴撞擊後的變化。

摘要(英)

An experimental study is presented for liquid droplet impingement on a rotating smooth wafer. The liquids used to obtain different surface tension are water and alcohol with given properties. Tangential velocities of the surface are given by the rotational radiuses and rotating speeds. A single droplet released from a needle is falling onto the wafer due to gravity. The impact process is recorded by two high speed CCD cameras providing vertical and lateral views. As the wafer is static, the evolution of water droplet impact with increasing Weber number varies from deposition (We < 115) to fingering (We > 132). As to alcohol droplet impact, the evolution is from deposition (We < 184) to splashing (We > 214). Statistically, regimes of features: (a) deposition, (b) fingering, (c) tip accumulation, (d) finger spreading, (e) air-cut film with smooth front, and (f) air-cut film with fingering are observed in water droplet impact under different Weber numbers and tangential velocities. And regimes: (a), (c), (e), (f), (g) splashing, and (h) front sheet are also found in alcohol droplet impact. Experimentally, the effect of air layer during impact is not negligible as the tangential velocity is large sufficiently.

關鍵字(中)

★ 液滴
★ 旋轉表面
★ 韋伯數

關鍵字(英)

★ Droplet
★ Rotating Surface
★ Weber Number

論文目次

Abstract in Chinese I
Abstract in English II
Acknowledgement III
Table of Contents IV
List of Tables V
List of Figures VI
Nomenclature XII
Chapter 1 Introduction 1
1.1 Motivation 1
1.2 Review of the literature 1
1.3 Current investigation 5
Chapter 2 Methods and apparatus of experiments 6
2.1 Experimental set-up 6
2.2 Quantification 7
Chapter 3 Results and discussion 9
3.1 Impact on a static solid surface 9
3.2 Impact on a rotating solid surface 11
3.2.1 Water droplet impact 11
3.2.2 Alcohol droplet impact 16
3.2.3 Impact under different centripetal accelerations 19
3.3 Impact at the center of a rotating wafer closely 20
3.4 Observation in detail 21
Chapter 4 Conclusion 23
Referenes 25

參考文獻

[1] Worthington, A. M., On the forms assumed by drops of liquids falling vertically on a horizontal plate, Proc. R. Soc. London, 25, 261 (1876).
[2] Rein, M., Phenomena of liquid drop impact on solid and liquid surfaces, Fluid Dyn. Res., 12, 61 (1993).
[3] Thoroddsen, S. T., and Sakakibara, J., Evolution of the fingering pattern of an impacting drop, Phys. Fluids, 10, 1359 (1998).
[4] Rioboo, R., Marengo, M., and Tropea, C., Time evolution of liquid drop impact onto solid, dry surfaces, Exp. Fluids, 33, 112 (2002).
[5] Rioboo, R., Tropea, C., and Marengo, M., Outcomes from a drop impact on solid surfaces, At. Sprays, 11, 155 (2001).
[6] Sikalo, S., Marengo, M., Tropea, C., and Ganic, E. N., Analysis of impact of droplets on horizontal surfaces, Exp. Therm. Fluid Sci., 25, 503 (2002).
[7] Roux, D. C. D., and Cooper-White, J. J., Dynamics of water spreading on a glass surface, J. Colloid Interface Sci., 277, 424 (2004).
[8] Kim, H. Y., and Chun, J. H., The recoiling of liquid droplets upon collision with solid surfaces, Phys. Fluids, 13, 643 (2001).
[9] Pasandideh-Fard, M., Qiao, Y. M., Chandra, S., and Mostaghimi, J., Capillary effects during droplet impact on a solid surface, Phys. Fluids, 8, 650 (1996).
[10] Mundo, C., Sommerfeld, M., and Tropea, C., Droplet-wall collisions: experimental studies of the deformation and breakup process, Int. J. Multiph. Flow, 21, 151 (1995).
[11] Bussmann, M., Chandra, S., and Mostaghimi, J., Modeling the splash of a droplet impacting a solid surface, Phys. Fluids, 12, 3121 (2000).
[12] Xu, L., Zhang, W. W., and Nagel, S. R., Drop splashing on a dry smooth surface, Phys. Rev. Lett., 94, 184505 (2005).
[13] Sikalo, S., Tropea, C., and Ganic, E. N., Impact of droplets onto inclined surfaces, J. Colloid Interface Sci., 286, 661 (2005).
[14] Pasandideh-Fard, M., Chandra, S., and Mostaghimi, J., A three-dimensional model of droplet impact and solidification, Int. J. Heat Mass Trans., 45, 2229 (2002).
[15] Fujimoto, H., Shiraishi, H., and Hatta, N., Evolution of liquid/solid contact area of a drop impinging on a solid surface, Int. J. Heat Mass Trans., 43, 1673 (2000).
[16] Mao, T., Kuhn, D. C. S., and Tran, H., Spread and rebound of liquid droplets upon impact on flat surfaces, AIChE J., 43, 169 (1997).
[17] Stow, C. D., and Hadfield, M. G., An experimental investigation of fluid flow resulting from the impact of a water drop with an unyielding dry surface, Proc. R. Soc. London Ser., A 373, 419 (1981).
[18] Yarin, A. L., and Weiss, D. A., Impact of drops on solid surfaces: self-similar capillary waves, and splashing as a new type of kinematic discontinuity, J. Fluid Mech., 283, 141 (1995).
[19] Zhang, X., and Basaran, O. A., Dynamic surface tension effects in impact of a drop with a solid surface, J. Colloid Interface Sci., 187, 166 (1997).
[20] Range, K., and Feuillebois, F., Influence of surface roughness on liquid drop impact, J. Colloid Interface Sci., 203, 16 (1998).
[21] van Dam, D. B., and Le Clerc, C., Experimental study of the impact of an ink-jet printed droplet on a solid substrate, Phys. Fluids, 16, 3403 (2004).
[22] Fukai, J., Shiiba, Y., Yamamoto, T., Miyatake, O., Poulikakos, D., Megaridis, C. M., and Zhao, Z., Wetting effects on the spreading of a liquid droplet colliding with a flat surface: experiment and modeling, Phys. Fluids, 7, 236 (1995).
[23] White, F. M., Viscous fluid flow, New York McGraw-Hill, p. 167, (1974).

指導教授

周復初(Fu-Chu Chou)

審核日期

2006-6-29

推文