博碩士論文 93323122 詳細資訊




以作者查詢圖書館館藏 以作者查詢臺灣博碩士 以作者查詢全國書目 勘誤回報 、線上人數:54 、訪客IP:3.145.56.59
姓名 林耕葆(Geng-Bao Lin)  查詢紙本館藏   畢業系所 機械工程學系
論文名稱 旋塗時接觸角變化研究
(Study on Variation of Dynamic Contact Angle during Spin Coating)
相關論文
★ 化學機械研磨流場模擬實驗研究★ 變轉速之旋轉塗佈實驗研究
★ 微小熱點之主動式冷卻★ 大尺寸晶圓厚膜塗佈
★ 科氏力與預塗薄膜對旋轉塗佈之影響★ 微液滴對微熱點之 冷 卻
★ 大尺寸晶圓之化學機械研磨實驗研究★ 液晶顯示器旋轉塗佈研究
★ 流體黏度對旋塗減量之影響★ 微熱點與微溫度感測器製作
★ 高溫蓄熱器理論模擬★ 熱氣泡式噴墨塗佈
★ 注液模式對旋轉塗佈之影響★ 磁流體旋塗不穩定之研究
★ TFT-LCD狹縫式塗佈研究★ 彩色濾光片噴塗研究
檔案 [Endnote RIS 格式]    [Bibtex 格式]    [相關文章]   [文章引用]   [完整記錄]   [館藏目錄]   至系統瀏覽論文 ( 永不開放)
摘要(中) 將液體利用旋轉塗佈方式塗佈到固體表面的過程中,會產生表面張力、黏滯力及離心力三者之間的相互關係。本文利用四種黏度的矽油於五種轉速下的動態接觸角與時間、動態接觸角與毛細管數( Ca )、動態接觸角與邦得數( Bo )、動態接觸角與雷諾數( Re ) 及動態接觸角與韋伯數( We )等關係,解釋表面張力、黏滯力及離心力三者對旋轉塗佈時之影響。針對同樣黏度之矽油,不同的旋轉速度,可看出動態接觸角度隨時間的變化有呈現一震盪的現象。此現象可分為三階段:發展期、峰值期、遞減期。發展期階段動態接觸角角度隨實驗時間增加而逐漸變大。峰值期階段動態接觸角度會隨實驗時間增加而達一最大值。遞減期階段動態接觸角角度從最大值降至一穩定值後持續至下一週期。加入無因次參數以幫助對於新現象發生的原因探討與了解。利用所得結果,進一步應用於液滴旋塗時臨界半徑的產生現象分析,最終能得一機制以預測或控制臨界半徑產生時機。
摘要(英) Utilize the liquid the rotatory coating way coating to in solid and superficial course, will produce the interrelation among surface tension, viscid strength and centrifugal three. This text utilizes four kinds viscosity of silicon oil under five kinds of rotational speed to get the relation between dynamical contact angle and time, capillary number (Ca), Bound number (Bo)‚Reynolds number (Re) and Weber number (We), to explain surface tension , viscid strength and centrifugal three to the influence while rotating coatings. To the silicon oil of the same viscosity, different speeds of rotation, can find out that the phenomenon of a shock has appeared with the change of time in the dynamic contact angle. This phenomenon can be divided into three stages: Develop one, peak period and decreasing progressively period. At develop stage the dynamic contact angle will increase with time. Peak period stage the dynamic contact angle will increase with time up to a maximum angle. Decreasing progressively period the dynamic contact will decrease from maximum angle to a stability angle and then last until the next cycle. We are using some dimensionless numbers to help discussion the cause reasons and to new understanding that phenomenon take place. Utilize the result of incomes, use the formulation phenomenon analysis of the critical radius when the drop is fastened and scribbled further, can must one mechanism in order to predict or control critical radius, happen time.
關鍵字(中) ★ 動態接觸角
★ 旋塗
關鍵字(英) ★ spin coating
★ dynamic contact angle
論文目次 目 錄
摘要……………………………………………………………………….I
英文摘要………………………………………………………………..II
致謝…………………………………………………………………III
目錄…………………………………………………………………….IV
表目錄…………………………………………………………………. VI
圖目錄………………………………………………………………….VII
符號表………………………………………………………………...IX
第一章 緒論………………………………………………..……………1
1-1 前言…………………………………………………….1
1-2 文獻回顧……………………………………………….2
1-2-1 旋轉塗佈相關文獻回顧……………………...2
1-2-2 液體擴展……………………………………..4
1-2-3 接觸線及接觸角……………………………...6
1-2-4 動態接觸角…………………………………...7
1-3 研究動機……………………………………………….8
第二章 實驗設備與方法…………………………………………..…...9
2-1 實驗液體……………………………………………….9
2-2 實驗設備……………………………………………...10 2-2-1 旋轉塗佈機…………………………………10
2-2-2 影像擷取系統……………………………….10
2-3 實驗方法……………………………………………..11
2-4 量測分析方法………………………………………...12
2-4-1 圖片選取…………………………………….12
2-4-2 液滴半徑分析………………………………12
2-4-3 動態接觸角角度分析……………………….13
2-4-4 實驗數據處理………………………….……14
第三章 實驗結果與討論……………………………………………...15
3-1 動態接觸角度與旋轉速度…….……………………15
3-2 動態接觸角度與毛細管數………….….…………….16
3-3 動態接觸角度與邦得數……………………………...17
3-4 動態接觸角度與雷諾數…...............………………18
3-5 動態接觸角度與韋伯數…...............………………18
第四章 結論……………………………………………………..……20
第五章 未來展望………………………………………………..……22
參考文獻………………………………………………………………..23
附表……………………………………………………………………..27
附圖……………………………………………………………………..29
參考文獻 1. A. G. Emsilie, F. T. Bonner, and L. G. Peck, Flow of a Viscous Liquidon a Rotating Disk, J. Appl. Phys., Vol. 29, pp. 858(1958).
2. E. Momoniat, D. P. Mason, Investigation of the Coriolis Force on a Thin Fluid Film on a Rotating Disk, Int. J. Non-Linear Mech., Vol. 31, pp. 1069(1998).
3. M. Yanagisawa, Slip Effect for Thin Liquid Film on a Rotating Disk, J. Appl. Phys., Vol. 61, pp. 1034(1978).
4. A. Acrivos, M. Shan, and E. E. Petersen,On the Flow of a Non-Newtonian Liquid on a Rotating Disk, J. Appl. Phys., Vol. 31, pp. 963(1960).
5. D. E. Bornside, C. W. Maccsko, and L.E., Scriven, Spin Coating: One-Dimensional Model, J. Appl. Phys., Vol. 66,pp. 5185(1989).
6. M. L. Forcada, and C. M. Mate, The Flow of Thin Lubricant Films on Rotating Disks, Wear, Vol. 168, pp. 21(1993).
7. D. Meyerhofer, Characteristics of Resist Films Produced by Spinning, J. Appl. Phys., Vol. 49, pp. 3993(1978).
8. T. Yada, T. Maejima, M. Aoki,and M. Umesaki, Thin-Film Formation by Spin Coating: Characteristics of a Positive Photoresist, Jpn. J. Appl. Phys., Vol. 34, pp. 6279(1995).
9. T. Yada, T. Maejima,and M. Aoki, Formation of a Positive Photoresist Thin Film by Spin Coating: Influence of Atmospheric Humidity, Jan. J. Appl. Phys., Vol. 36, pp.7041(1997).
10. T. Yada, T. Maejima, M. Aoki,and M. Ishizu, Formation of a Positive Photoresist Thin Film by Spin Coating: Influence of Atmospheric Temperature, Jan. J. Appl. Phys., Vol. 36, pp. 372(1997).
11. T. Yada, Formation of a Negative Photoresist Thin Film by Spin Coating, Jpn. J. Appl. Phys., Vol. 37, pp. 2752(1998).
12. W. W. Flack, D. D. Soong, A. T. Bell, and D. W. Hess, A Mathematical Model for Spin Coating of Polymer Resist, J. Appl. Phys., Vol. 56,pp. 1199(1984).
13. B. G. Higgins, Film Flow on a Rotating Disk, Phys. Fluids, Vol. 29, pp. 3522(1986).
14. C. T. Wang and S. C. Yeu, Theoretical Analysis of Film Uniformity in Spinning Processes, Chem. Eng. Sci., Vol. 50,pp.989(1995).
15. J. H. Hwang and F. Ma, On the Flow of a Thin Liquid Film over a Rough Rotating Disk, J. Appl. Phys. Vol. 66, pp. 388(1989).
16. F. Ma and J. H. Hwang, The Effect of Air Shear on the Flow of a Thin Liquid Film Over a Rough Rotating Disk, ASME J. Appl. Phys., Vol. 112, pp. 165(1990).
17. J. Gu, M. D. Bullwinkel, and G. A. Campbell, J Electrochemical Society, Vol. 142, pp. 907(1995).
18. R. K. Youkoski and D. S. Soane, Model for Spin Coating in Microelectronic Applications, J. Appl. Phys., Vol. 72, pp. 725(1992).
19. J. De Conink, M. de Ruijter et M. Voué, "Dynamics of wetting", Current Opinion in Colloid & Interface Science, Vol.6, pp. 49-(2001).
20. Srinivas R. Ranabothu, Cassandra Karnezis, Lenore L. Dai, Dynamic wetting: Hydrodynamic or molecular-kinetic? , Journal of Colloid and Interface Science, Vol. 288 , pp. 213(2005).
21. J. Eggers and H. A. Stone, Characteristic Lengths at Moving Contact Lines for A Perfectly Wetting Fluid the Influence of Speed on the Dynamic Contact Angle, J. Fluid Mech., Vol. 505, pp. 309(2004).
22. C. W. Extrand and Y. Kumagai, An Experimental Study of Contact Angle Hysteresis, Journal of Colloid and Interface Scienc, Vol. 191, pp. 378(1997).
23. A. Carré and P. Woehl, Spreading of Silicone Oils on Glass in Two Geometries, Langmuir, Vol. 22, pp. 134(2006).
24. E. Rio, A. Daerr, B. Andreotti, and L. Limat, Boundary Conditions in the Vicinity of a Dynamic Contact Line: Experimental Investigation of Viscous Drops Sliding Down an Inclined Plane, Physical Review Letters, PRL94, pp. 024503(2005).
25. F. Melo, J. F. Joanny, and S. Fauve, Fingering Instability of Spinning Drops, Physical Review Letters, Vol. 63, pp. 1958(1989).
26. N. Fraysse and G. M. Homsy, An Experimental Study of Rivulet Instabilities in Centrifugal Spin Coating of Viscous Newtonian and Non- Newtonian Fluid, Phys Fluids, Vol. 6, pp. 1491(1994).
27. P. G. de Gennes, F. Brochard-Wyart and D. Quéré, Capillarity and Wetting Phenomena: Drops, Bubbles, Pearls, Waves (Springer, New York, 2003).
28. H. Pirouz Kavehpour, Ben Ovryn, and Gareth H. McKinley, Microscopic and Macroscopic Structure of the Precursor Layer in Spreading Viscous Drops, Physical Review Letters, Vol. 91, pp. 196104 (2003).
29. R. Goodwin and G. M. Homsy, Viscous Flow Down a Slope in the Vicinity of a Contact Line. Phys. Fluids. Vol. 3, pp. 515(1991).
30. Hoffman, R. L., A Study of the Advancing Interface, I.- Interface Shape in Liquid-Gas Systems, J. Colloid Interface Sci., Vol. 50, pp. 228(1975).
31. I. Veretennikov, A. Agarwal, A. Indeikina, and H. C. Chang, Unusual Contact-Line Dynamics of Thick Films and Drops, Journal of Colloid and Interface Science, Vol. 215, pp. 425(1999).
32. R. F. Allen and P. R. Benson, Rolling drops on an inclined plane, Journal of Colloid and Interface Science. Vol.50, pp. 250(1975)
33. M. W. Wang and F. C. Chou, Fingering Instability and Maximum Radius at High Rotational Bond Number, submitted to Journal of The Electrochemical Society, Vol. 148, pp. 283(2001).
指導教授 周復初(Fu-Chu Chou) 審核日期 2006-6-29
推文 facebook   plurk   twitter   funp   google   live   udn   HD   myshare   reddit   netvibes   friend   youpush   delicious   baidu   
網路書籤 Google bookmarks   del.icio.us   hemidemi   myshare   

若有論文相關問題,請聯絡國立中央大學圖書館推廣服務組 TEL:(03)422-7151轉57407,或E-mail聯絡  - 隱私權政策聲明