| 摘要(英) |
In this study, ECR-CVD was used for the deposition of high doping silicon thin films and passivation layers, PE-CVD was used for the deposition of passivation layers. These thin films were deposited on single-crystalline silicon substrate to fabricate the homo-junction and hetero-junction c-Si solar cells. The electrical properties and solar cell performance of homo-junction and hetero-junction c-Si solar cells were investigated. ECR-CVD has advantages about high deposition rate, low working pressure, low ion bombardment and no electrode pollution. But high deposition rate makes the thin films more defects and loose structure, these feature are not good for passivation layers in HIT solar cells. Therefore, the better quality passivation layers were deposited by PE-CVD to improve the HIT solar cells.
In the first part, we will modulate the experimental parameters of doping concentration of BSF, oxygen content of emitter, single-crystalline silicon substrate types, and the electrode in homo-junction solar cells to investigate the electrical properties and conversion efficiency. The emitter and back surface field layers of homo-junction solar cell were deposited by ECR-CVD. The characteristics of homo-junction solar cell with screen printing electrode on p-type planar substrate were shown as follow: VOC = 0.616 V, JSC = 37.397 mA/cm2, F.F. = 75 %, efficiency = 17.29 % in the area of 1 cm2.
In second part, the passivation quality on different wafer and the variation of the passivation layer thickness were performed in hetero-junction solar cells. The passivation layer were deposited by ECR-CVD or PE-CVD, the emitter and back surface field layers were deposited by ECR-CVD. In addition, the characteristics of hetero-junction solar cell on p-type planar substrate with 3 nm passivation layer deposited by PE-CVD that were shown as follow: VOC = 0.644 V, JSC = 34.04 mA/cm2, F.F. = 68 %, efficiency = 14.8 % in the area of 1 cm2.
|
| 參考文獻 |
[1] Maria van der Hoeven, et al., "World Energy Investment Ooulook Special Report", IEA, (2014).
[2] 黃惠良，太陽電池，五南出版社，民國九十七年。
[3] 矽。取自http://zh.wikipedia.org/wiki/%E7%A1%85
[4] Zhao, J. H., et al., "High-efficiency PERL and PERT silicon solar cells on FZ and MCZ substrates." Solar Energy Materials and Solar Cells 65(1-4): 429-435, (2001).
[5] Hassan El Gohary, "Development of Low-Temperature Epitaxial Silicon Films and Application to Solar Cells", (2010).
[6] Donald A. Neamen, Semiconductor Physics and Devices: Basic Principles (4e), McGraw-Hill, (2012).
[7] Stuart Lindsay, Introduction to Nanoscience, OUP Oxford, (2009).
[8] Beiser, Concepts of Modern Physics, McGraw-Hill, (2003).
[9] A. Matsuda and K. Tanaka, Thin Solar Film 92,171, (1982).
[10] R. Robertson, D. Hils, H. Chatham, A. Gallagher, "Radical species in argon‐silane discharges" Appl. Phys. Lett. 43(6), 544, (1983)
[11] 陳治明，非晶半導體材料與器件，科學出版社，民國八十年。
[12] Rosenits, P., et al., "Epitaxially grown crystalline silicon thin-film solar cells reaching 16.5% efficiency with basic cell process." Thin Solid Films 519(10): 3288-3290, (2011).
[13] Hekmatshoar, B., et al. "Characterization of thin epitaxial emitters for high-efficiency silicon heterojunction solar cells." Applied Physics Letters 101(10), (2012).
[14] Cariou, R., et al., "Thin crystalline silicon solar cells based on epitaxial films grown at 165 degrees C by RF-PECVD." Solar Energy Materials and Solar Cells 95(8): 2260-2263, (2011).
[15] Ji, K. S., et al., "A study of crystallinity in amorphous Si thin films for silicon heterojunction solar cells." Solar Energy Materials and Solar Cells 95(1): 203-206, (2011).
[16] Taguchi, M., et al., "24.7% Record Efficiency HIT Solar Cell on Thin Silicon Wafer." Ieee Journal of Photovoltaics 4(1): 96-99, (2014).
[17] Oh, W. K., et al., "Study on the ITO work function and hole injection barrier at the interface of ITO/a-Si: H(p) in amorphous/crystalline silicon heterojunction solar cells." Materials Research Bulletin 47(10): 3032-3035, (2012).
[18] Kim, S., et al., "Low defect interface study of intrinsic layer for c-Si surface passivation in a-Si:H/c-Si heterojunction solar cells." Thin Solid Films 521: 45-49, (2012).
[19] Gogolin, R., et al., "Silicon heterojunction solar cells: Influence of H-2-dilution on cell performance." Solar Energy Materials and Solar Cells 106: 47-50, (2012).
[20] Lee, S. J., et al., "Effect of hydrogen plasma passivation on performance of HIT solar cells." Solar Energy Materials and Solar Cells 95(1): 81-83, (2011).
[21] Bock, R., et al., "n-type silicon solar cells with surface-passivated screen-printed aluminium-alloyed rear emitter." Physica Status Solidi-Rapid Research Letters 2(6): 248-250, (2008).
[22] Liu, C. S., et al., "High-rate deposition of a-Si:H thin layers for high-performance silicon heterojunction solar cells." Progress in Photovoltaics 21(3): 326-331, (2013).
[23] Cho, Y. S., et al. "Effect of Hydrogen Content in Intrinsic a-Si:H on Performances of Heterojunction Solar Cells." International Journal of Photoenergy, (2013).
[24] D. H. Thang, H. Muta, and Y. Kawai, "Investigation of plasma parameters in 915 MHz ECR plasma with SiH4/H-2 mixtures," Thin Solid Films 516, 4452-4455, (2008).
[25] N. Fujiwara, H. Sawai, M. Yoneda, K. Nishioka, K. Horie, K. Nakamoto, and H. Abe, "High-Performance Electron-Cyclotron Resonance Plasma-Etching with Control of Magnetic-Field Gradient," Jpn J Appl Phys 1 30, 3142-3146, (1991).
[26] S. Samukawa, and T. Nakamura, "Dependence of Electron-Cyclotron Resonance Plasma Characteristics on Magnetic-Field Profiles," Jpn J Appl Phys 2 30, L1330-L1332, (1991).
[27] Fujiwara, H., et al., "Application of hydrogenated amorphous silicon oxide layers to c-Si heterojunction solar cells." Applied Physics Letters 91(13), (2007).
[28] Banerjee, C., et al., "Fabrication of heterojunction solar cells by using microcrystalline hydrogenated silicon oxide film as an emitter." Journal of Physics D-Applied Physics 41(18), (2008).
|
[Endnote RIS 格式]
[相關文章]
[文章引用]
[完整記錄]
[館藏目錄]
[檢視]
plurk
funp
live
udn
HD
myshare
netvibes
friend
youpush
delicious
baidu
Google bookmarks
del.icio.us
hemidemi
facebook
twitter
google
reddit