應用磁性粒子於微流體裝置之可逆接合

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李岳蒲(Yueh-Pu Lee) 查詢紙本館藏

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機械工程學系

論文名稱

應用磁性粒子於微流體裝置之可逆接合

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摘要(中)

本研究成功的證明使用氧化鐵磁性粒子與二甲基矽氧烷(PDMS)製作出磁性PDMS裝置，其為一種簡單製作且可以達到高強度的可逆磁性接合方法；在此提出了兩種磁性PDMS裝置，包括不可光學檢測的暗視野裝置與可光學檢測的明視野裝置。
研究顯示，暗視野裝置製作上類似標準的PDMS鑄造，較不受微流道幾何形狀的影響；而明視野裝置澆鑄性能與微流道幾何圖形高度有關，實驗針對微流道的佈局進行了詳細的研究，探討PDMS墊塊層與微模具基板之間的間隙大小對於製作明視野裝置的相關性。磁性PDMS裝置接合強度測試中，證明在裝置底部增加一層PDMS薄膜層可以有效改善表面粗糙度，並且有效的提升磁性PDMS的可逆磁性接合強度。測試結果顯示，有PDMS薄膜的暗視野裝置最佳接合強度為110 KPa；而有PDMS薄膜的明視野裝置最佳接合強度為81 KPa。

摘要(英)

Iron oxide magnetic microparticles and poly(dimethylsiloxane) (MMPs-PDMS) composite was successfully demonstrated as a simple and high-strength reversible magnetic bonding method in this study. Dark-field (optical inspection impossible) and light-field (optical inspection possible) MMPs-PDMS casting were presented. This study showed that microchannel geometries have limited influence on dark-field casting which is similar to standard PDMS casting. Light-field casting performance was highly related to microchannel geometries. Effects of the microchannel layout, and the gap between the cover-PDMS layer and micromold substrate were detail investigated. MMPs-PDMS magnetic bonding experiments showed that thin PDMS film incorporating an MMPs-PDMS layer can effectively reduce surface roughness and enhance MMPs-PDMS reversible magnetic bonding strength. A thin PDMS film-coated dark-field MMPs-PDMS device exhibited the greatest bonding strength of 110 KPa. For a light-field MMPs-PDMS device with a thin PDMS film, a magnetic bonding strength of 81 KPa can be achieved.

關鍵字(中)

★ 可逆接合
★ 微流體裝置
★ 磁性

關鍵字(英)

論文目次

目錄
摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vii
第一章緒論 1
1.前言 1
1.2文獻回顧 3
1.3研究目的 9
1.4論文架構 10
第二章實驗設計與製程 11
2.1製程設備與耗材 11
2.1.1 製程設備與實驗儀器 11
2.1.2 製程材料與實驗耗材 12
2.2 黃光製程 13
2.2.1 光罩製作 14
2.2.2 晶圓清潔 15
2.2.3 光阻塗佈 15
2.2.4 軟烤 16
2.2.5 曝光 17
2.2.6 曝後烤 17
2.2.7 顯影 17
2.2.8 硬烤 18
2.2.9母模增厚製程 18
2.3 ”Fe3O4” 磁性奈米粒子合成[28] 19
2.4 磁性PDMS裝置製程 21
2.4.1 SU-8母模旋佈PDMS薄膜 22
2.4.2 PDMS墊塊製作 22
2.4.3 磁性PDMS混合與填入 23
2.4.4磁性PDMS裝置組裝 25
2.4.5暗視野裝置製程 25
2.4 磁性粒子於明視野裝置內之含量判定 26
2.5 磁性PDMS裝置接合強度測試裝置架設 27
2.5.1檢測流程 28
2.6 磁性PDMS表面粗糙度測量方法 28
第三章結果與討論 29
3.1 磁性PDMS吸入能力測試 29
3.1.1母模圖形－直線 30
3.1.2母模圖形－曲線 33
3.1.3母模圖形－夾角 36
3.2 磁性PDMS裝置接合強度測試 39
3.2.1明視野磁性PDMS裝置 40
3.2.2暗視野磁性PDMS裝置 42
3.3 磁性PDMS表面粗糙度測量 44
3.3.1 PDMS表面粗糙度量測 45
3.3.2磁性PDMS裝置無增加PDMS薄膜 45
3.3.3磁性PDMS裝置增加PDMS薄膜 45
第四章結論 48
第五章參考文獻 49

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指導教授

曹嘉文

審核日期

2015-1-30

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