積體化鈮酸鋰光電電磁場感測器研究

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姓名

李宗信(Tsung-Hsin Lee) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

積體化鈮酸鋰光電電磁場感測器研究
(Investigation of Intergraded LiNbO3 Electrooptical Electromagnetic Field Sensor)

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摘要(中)

近年來，隨著無線通訊的蓬勃發展，所產生的電磁場的安全性受到科學界與一般民眾的關切，因此電磁場的量測技術及電磁防護便顯得重要。發展可精確量測的電磁波量測系統，進而研究其對於環境、生物的影響，將有助於在此方面之了解。
本文採用鈮酸鋰晶體鈦擴散製程，製作可於線性區工作之無偏壓馬氏調制器，配合感應天線與調制電極之結合，完成光電電磁場感測器。另外，利用微型化感應天線與馬氏調制器積體化製程，完成光電電磁場感測器微型化目標。最後完成電磁場感測器系統模組，以實際的運用量測來驗證鈮酸鋰光電電磁場感測器優異的特性。藉由本文的研究成果，將可提昇國內在電磁場量測技術的發展及應用的能力與前景。

摘要(英)

In view of the progress of wireless communications, the security of electromagnetic field is concerned by the mass population. Therefore, the EM Field detective technology will be respected gradually. The accurate EM Field detective system will be contributive to the study in biology and environment ecology.
In this thesis, we focus on the research and develop the applications of Mach-Zehnder modulator with micro antenna in electrooptical electromagnetic sensors. We study the basic configuration of the no bias Mach-Zehnder modulator, high sensitivity electrooptical electromagnetic sensors and the packaged module of fiber coupling with electrooptical electromagnetic detective system. According to the experimental results, This integrated structure of electromagnetic field sensor can be potentially employed in electromagnetic measurement.

關鍵字(中)

★ 鈮酸鋰
★ 電光效應
★ 電磁場
★ 感測器
★ 天線

關鍵字(英)

★ lithium niobate
★ sensor
★ elctromagnetic field
★ electro-optic effect
★ antenna

論文目次

摘要………………………………………………….…………….……Ⅰ
目錄……………………………………………………………..........…Ⅲ
圖目………………………………………………………..……………Ⅳ
第一章緒論……………………………………………………………..1
第二章鈮酸鋰的電光效應……………………………………..………5
2-1 電光效應…………………………………………….……5
2-2 馬氏調制器……………………………………………….7
2-3 行波式電極……………………………………………….9
第三章鈮酸鋰波導元件製作技術……………………………………11
3-1 鈮酸鋰馬氏調制器的製作……………………………...11
3-2 光纖與波導耦合技術……………………………...……19
第四章光電電磁場感測器製作與量測………………………………23
4-1無偏壓之馬氏調制器之設計製作與特性量測及分析….23
4-2環形天線與馬氏調制器結合之光電電磁場感測器…….27
4-3積體化環形天線之光電電磁場感測器………………….34
4-4 積體化共平面波導天線之光電電磁場感測器…….…...38
4-5電容式天線與穿透式及反射式馬氏調制器積體化之光電電磁場感測器…………………………………………...43
第五章結論……………………………………………………………54
參考文獻………………………………………………………………..56
本人發表之文章………………………………………………………..68

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指導教授

張正陽、李清庭
(Jeng-yang Chang、Ching-Ting Lee)

審核日期

2007-11-14

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