矽晶片波導元件研究

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姓名

邱華恭(Hua-Kung Chiu) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

矽晶片波導元件研究
(The Component of Waveguide on SOI-based)

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摘要(中)

在此論文中，我們利用矽晶片來對波導元件製作及設計。其中，波導元件包含了1×8分光器、陣列波導光柵、錐狀波導及梳狀致動器。而在分光器中，我們設計了三種不同結構的1×8分光器，包含了1×8多模干涉分光器、Y型分叉分光器及1×2×2×2多模干涉分光器。這三種結構中，在loss、uniformity及device size的考量之下，1×8多模干涉分光器會有較好的效果。在陣列波導光柵方面，我們有效的控制陣列波導間距、輸出波導間距及星型耦合器長度提高陣列波導光柵之分光效果。而在上述之波導元件中，我們提出了錐狀波導之結構以減少元件在量測時之損耗。
而在梳狀致動器方面，我們以SOI作為梳狀致動器之結構，並利用Matlab軟體來輔助完成設計的工作，完成了梳狀致動器之設計，並改變可動部份之結構以增加元件之挺性。

摘要(英)

In this work, we have performed the simulation, fabrication and characterization of the silicon on insulator (SOI). 1×8 power splitters, Array Waveguide Grating(AWG), taper waveguides and comb drive attenuators are studied. Three types of 1×8 power splitters are investigated, including 1×8 multi-mode interference(MMI) splitters, 1×2×2×2 MMI splitters and 1×8 Y-branch splitters. Losses, uniformity and device sizes are compared for different splitters. Among these three kinds of structures, 1×8 power MMI splitters possess the best performance. For the results of AWG, the accurate distance control of array waveguides, output waveguides and length of star coupler can ameliorate the performance of the AWG. We also propose a taper structure attached to waveguides to reduce the coupling losses. In the comb drive attenuator, the component is fabricated in SOI wafer. Novel comb drive attenuator structures are proposed to solve the sticking problem.

關鍵字(中)

★ 波導
★ 多模干涉
★ 陣列波導光柵
★ 梳狀致動器
★ 錐狀波導
★ 分光器

關鍵字(英)

★ multimode interference
★ arrayed-waveguide gratings
★ power splitters
★ taper waveguide
★ comb drive
★ waveguides

論文目次

論文摘要…………………………………………………I
目錄………………………………………………………II
圖目錄……………………………………………………IV
表目錄………………………………………………………X
第一章簡介………………………………………………1
1.1 絕緣層上鍍矽晶片之簡介……………………………2
1.2 研究動機………………………………………………5
1.3 論文大綱………………………………………………7
第二章光波導元件的設計原理…………………………9
2.1 有限差分光傳播方法…………………………………9
2.2 多模干涉原理………………………………………11
2.3 邏輪圓原理…………………………………………13
2.4 梳狀致動器原理……………………………………17
2.5 陣列波導光柵原理…………………………………26
2.6結論……………………………………………………29
第三章 SOI分光器………………………………………30
3.1多模干涉分光器介紹及應用…………………………30
3.2 SOI分光器之模擬……………………………………35
3.3 SOI分光器之製作……………………………………48
3.4 SOI分光器之量測…………………………………52
3.5錐狀波導設計及量測…………………………………55
3.6結論……………………………………………………64
第四章陣列式波導光柵…………………………………67
4.1 陣列式波導光柵設計………………………………67
4.2 陣列式波導光柵量測………………………………75
4.3結論……………………………………………………76
第五章梳狀致動器之設計、製作及量測………………79
5.1 梳狀致動器之設計…………………………………81
5.2 梳狀致動器之製作…………………………………95
5.3結論…………………………………………………103
第六章總結……………………………………………105
第七章參考文獻………………………………………109

參考文獻

[1] Casey F. Kane and Robert R. Krchnavek, “Benzocyclobutene Optical Waveguides,” IEEE Photon. Technol. Lett., vol.7, no.6, pp. 535-537, 1995.
[2] 李沛宸, “1×2 Y-branch之大角度偏折波導分光器,” 國立中山大學光電工程研究所碩士論文, 2002
[3] P. D. Trinh. S. Yegnanarayanan, and B. Jalali, “5×9 Integrated Optical Star Coupler in Silicon-on-Insulator Technology,” IEEE Photon. Technol. Lett., vol. 8, no. 6, pp. 794-796, 1996
[4] P. D. Trinh. S. Yegnanarayanan, and B. Jalali, “Integrated optical directional coupler in silicon-on-insulator,” Electron. Lett., vol. 31, no. 24, pp. 2097-2098, 1995
[5] A. G. Rickman, G. T. Reed, and F. Namavar, “Silicon-on-insulator optical rib waveguide circuits for fiber optic sensors,” in Pric. SPIE, Distributed and Multiplexed Fiber Optic Sensors III, vol. 2071, pp.190-196, 1993
[6] A. G. Rickman, G. T. Reed, and F. Namavar, “Silicon-on-insulator optical rib waveguide loss and mode characteristics,” J. Lightwave Technol., vol. 12, pp. 1771-1776, 1994
[7] P. D. Trinh, S. Yegnanarayanan, and B. Jalali, “Guided-wave optical circuits in silicon-on-insulator technology,” in Tech. Dig. Integrated Phonoics Res. Conf., pp. 273-277, 1996
[8] Y. Tang, W. Wang, Y. Wu, J. Yang, Y. Wang, "Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator," Optical Engineering - Bellingham, vol.43, no. 11, pp. 2495-2496, 2004
[9] R. A. Soref, J. Schmidtchen, and K. Petermann, “Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron., vol. QE-27, pp. 1971-1974, 1986
[10] Rsoft Design Group, BeamPROP user menu, chapter 1, pp. 4-21
[11] Introduction to optical waveguide analysis, chapter 5, pp. 165-231
[12] E. C. M. Pennings, R. van Roijen, M. J. N. van Stralen, P. J. Waard, R. G. M. P. Koumans and B. H. Verbeek, “Reflection properties of multimode interference devices,” IEEE Photon. Technol. Lett., vol.6, no. 6, 1994
[13] L. B. Soldano, F. B. Veerman, M. K. Smit,B. H. Verbeek, A. H. Dubost, E. C. M. Pennings, J. Lightwave Technol., vol. 10, no. 12, pp.1843-1850, 1992
[14] E. C. M. Pennings, “Bends in optical ridge waveguides: modeling and experiments,” Ph. D. Thesis, Delfr University of Technology, 1990
[15] O. Bryngdahl, J. Opt. Soc. Am., vol. 63, no. 4, pp. 416-419, 1973
[16] R. Ulrich and G. Ankele, Appl. Phys. Lett., vol. 27, no. 6, pp. 337-339, 1975
[17] L. B. Soldano, F. B. Veerman, M. K. Smit, B. H. Verbeek, A. H. Dubost, E. C. M. Pennings, J. Lightwave Technol., vol. 10, no. 12, pp. 1843-1850, 1992
[18] O. Bryngdahl, J. Opt. Soc. Am., vol. 63, no. 4, pp. 416-419, 1973
[19] L. B. Soldano, M Bouda, M. K. Smit and B. H. Verbeek, Proc. 18th, ECOC, Paper Web10, pp. 465-468, 1992
[20] J. M. Heaton, R. M. Jenkins, D. R. Wight, J. T. Parker, J. C. H. Birbeck and K. P. Hilton, Appl. Phys. Lett., vol. 61, no. 15, pp. 1754-1756, 1992
[21] S J. J. niegowski, and E. J.e Garcia, “Microfabricated Actuators and Their Application to Optics,” Proc. SPIE-Int. Soc. Opt. Eng. (USA) vol.2383, San Jose, CA, February 7-9, pp. 46-64, 1995
[22] K. E. Petersen, “Dynamic Micromechanics on Silicon：Techniques and Devices, ” IEEE Trans. Electr. Dev., Vol.ED-25, pp. 1242-1249, 1978
[23] A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett., vol. 12, pp. 1180-1182, 2000
[24] Y. Barbarin, X. J. M. Leijtens, E. A. J. M. Bente, C. M. Louzao, J. R. Kooiman, M. K. Smit, “Extremely small AWG demultiplexer fabricated on InP by using a double-etch Process,” IEEE Photon. Technol. Lett., vol. 16, pp. 2478-2480, 2004
[25] K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang; X. Jiang, Y. Wu, M. Wang, Y. Wang, “Silicon-on-Insulator-Based Optical Demultiplexer Employing Turning-Mirror-Integrated Arrayed-Waveguide Grating,” IEEE Photon. Technol. Lett., pp. 1-3, 2004
[26] 陳意智, “矽光波導元件光損耗研究,” 國立中央大學光電科學研究所碩士論文, pp. 17, 2005
[27] Y. Shani, R. C. Kistler, R. F. Kazarinow and K. J. Orlowski: “Integrated optic adiabatic devices on silicon,” IEEE J. Quantum Electron., QE-27, pp. 556-566, 1991
[28] H. Yamagawa, S. Nakamura and K. Ueki “Broad-band High-Silica Optical Waveguide Star Coupler With Asymmetrical Directional Coupler,” J. Lightwave Techno., LT-8, pp. 1292-1297, 1990
[29] R. Ardar, C. H. Genry, R. F. Kazarinow, R. C. Kistler and G. R. Weber “Adiabatic 3-dB couplers, filters, and multiplexers made with silica waveguides on silicon,” J. Lightwave Technol., LT-1, pp. 46-50, 1992
[30] S. Day, R. Bellerby, G. Cannell and M. Grant “Silicon based fiber pigtailed 1×16 power splitter,” Electron. Lett., vol. 10, pp. 920-922, 1992
[31] L. B. Soldano, E. C. M. Pennings, J. Lightwave Technol., Vol. 13, pp.615, 1995
[32] T.J. Tayag, D.M. Mackie, G.W. Bryant, IEEE Photon. Technol. Lett., vol. 10, pp. 1262, 1998
[33] L. B. Soldano, F. B. Veerman, M. K. Smit, B. H. Verbeek, A.H.Dubost, E.C.M. Pennings, J. Lightwave Technol., vol. 10, pp. 1843, 1992
[34] R. M. Jenkins, R. W. J. Devereux, J. M. Heaton, Opt. Commun., vol. 109, pp. 410, 1994
[35] L. B. Soldano, M. B. Bouda, M. K. Smit and B.H. Verbeek “New small-size single-mode optical power splitter based on multi-mode interference,” Proc. 18th Eur. Conf. On Opt. Comm. ECOC’92, 27- 1 Sept., vol. I, pp. 465-468, 1992
[36] L. B. Soldano and E. C. M. Pennings, “Optical multi-mode interference devices based on self-imaging: Principles and applications,” J. Lightwave Technol., vol. 13, pp. 615-627, 1995
[37] D. S. Levy, K. H. Park, R. Scarmozzino, R. M. Osgood Jr., C. Dries, P. Studenkov, and S. Forrest, “Fabrication of ultracompact 3-dB 2×2 MMI power splitters,” IEEE Photon. Technol. Lett., vol. 11, pp. 1009-1011, 1999
[38] M. L. Masanovic, E. J. Skogen, J. S. Barton, J. M. Sullivan, D. J. Blumenthal, and L. A. Coldren, “Multimode interference-based two-stage 1×2 light splitter for compact photonic integrated circuits,” IEEE Photon, Technol. Lett., vol. 15, pp. 706-708, 2003
[39] P. Munoz, D. Pastor and J. Capmany, “Analysis and design of arrayed waveguide gratings with MMI couplers,” Optics Express, vol. 9, No. 7, 2001
[40] K. Okamoto and H. Yamada, “Arrayed-waveguide grating multiplexer with flat spectral response,” Opt. Lett., vol. 20, pp. 43-45, 1995
[41] M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel and C. Caneau, “Passband broadening of integrated arrayed waveguide flaters using multimode interference couplers,”
Electron. Lett., vol. 32, pp. 449-451, 1996
[42] A. Mehta, W. Mohammed, and E. G. Johnson, Member, IEEE, “Multimode Interference-Based Fiber-Optic Displacement Sensor,”IEEE Photon. Technol. Lett., vol. 15, no. 8, 2003
[43] 陳意智, “矽光波導元件光損耗研究,” 國立中央大學光電科學研究所碩士論文, pp. 31, 2005
[44] Mashayekhi, M ; Touam, Tahar ; Wang, W J ; Berolo, Ezio ; Najafi, S Iraj, “Semiconductor device to optical fiber coupling using low-loss glass taper waveguide,” Optical Engineering - Bellingham , vol. 36, no. 12, pp. 3476-3477, 1997
[45] S. I. Najafi, Ed. Introduction to Glass Integrated Optics, Artech House, Boston, 1992
[46] M.Mashayekhi, T. Touam, W.J.Wang, E. Berolo, and S. I. Najafi, “Diode laser array to optical fiber multiplexing via glass waveguide,” Integrated Optics Devices: Potential for commercialization, Proc. SPIE, S. I. Najafi and M. N. Armenise, Eds., 2997, 335-342, 1997
[47] A.D.Rossi, et al. “Measuring propagation loss in a multimode semiconductor waveguide,” in Journal Of Applied Physics 97, 073105 2005
[48] 陳意智, “矽光波導元件光損耗研究,” 國立中央大學光電科學研究所碩士論文, pp. 38, 2005
[49] M. B. Frish, J. A. Fijol, E. E. Fike, S. A. Jacobson, P. B. Keating, W. J. Kessler, C. Bozler, M. Fritze, C. Keast, J. Knecht, R. Williamson, and C. Manolatou, “Coupling of single-mode fibers to planar Si waveguides using vertically tapered mode converters,” in Integrated Photonics Res., 2002 Tech. Dig., Vancouver, BC, Canada, pp.IFB2-1–IFB2-3, 2002
[50] C. Dragone, “An NxN optical multiplexer using a planar arrange-mentof two star couplers,” IEEE Photon. Technol. Lett., vol. 3,
pp.812-814, 1991
[51] 陳意智, “矽光波導元件光損耗研究,” 國立中央大學光電科學研究所碩士論文, pp. 38, 2005
[52] Rsoft Design Group, BeamPROP user menu, chapter 2, pp.19
[53] Rsoft Design Group, BeamPROP user menu, chapter 2, pp.13
[54] M.C. Carrozza, P. Dario, B. Hannaford, and A. Menciassi, “4-axis electromagnetic microgripper,” Robotics and Automation
Proceedings, vol.4, pp. 2899 –2904, 1999
[55] M. C. Carrozza, A. Menciassi, and P. Dario, “The development of a LIGA-microfabricated gripper for micromanipulation tasks,” Journal of Micromechnics and Microengineering, vol.8, pp.141-143, 1998
[56] H. Du, C. Su, M. K. Lim. and W. L. Jin, “A micromachined thermally-driven gripper: a numerical and experimental study,”Smart Material Structure, Vol.8, pp. 616-622, 1999
[57] M. Kohl, E. Just, W. Pfleging, S. Miyazaki, “SMA microgripper with integrated antagonism,” Sensors and Actuators, vol.83, pp. 208-213, 2000
[58] P. B. Chu and S. J. Pister, “Analysis of closed-loop control of parallel-plate electrostatic microgrippers ,” Robotics and
Automation, Proceedings, San Diego, CA, vol.1, pp. 820 -825, 1994
[59] M. J. Madou, “Fundamentals of Microfabrication,” CRC Press LLC, Chapter 4, pp. 198, 2002

指導教授

陳啟昌(Chii-Chang Chen)

審核日期

2005-6-22

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