矽基微柱狀透鏡於光耦合之研究

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姓名

簡惠君(Hui-Chun Chien) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

矽基微柱狀透鏡於光耦合之研究

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摘要(中)

本論文的目的在研究以矽為基板之微柱狀透鏡來提高光學元件間之耦合效率(Coupling Efficiency)，利用在微型光學平台(Micro-Optical Bench，MOB)上，結合半導體製程技術可在矽基板上製作，精確將各元件定位，降低封裝上的誤差。本文所設計出之矽基微柱狀透鏡具有一個維度聚焦能力，將其應用在工作距離約100~200μm之雷射二極體-光纖耦合上。而且利用半導體製程，直接在矽基板上成長蝕刻出透鏡輪廓，具有微小化，低成本且高量產可能性等優點。模擬之光耦合效率在工作距離約100~200μm及不考慮反射損耗(Fresnel Loss)下，約20～40 %，並對元件的製作與系統之量測皆有提出完整的說明及討論。

摘要(英)

The monolithic micro-cylindrical si lens is proposed for increasing
the coupling efficiency between Laser Diode and Single Mode Fiber.
Although the cylindrical lens only has one-dimensional focusing ability,
the coupling efficiency of 20~40% is still designed in the short working
distance of 100~200 μm. By using the micro-optical-bench (MOB)
technology, the optical elements can be precisely aligned on the chip. The
profile is properly defined by the mask, and is fabricated by deep dry
etching. In addition, the strong Fresnel loss is improved by the
anti-reflection coating of SiO2 film. The measurement results show the
highly consistence of the designed structure. In summary, this proposed
coupler module posses the characteristics of minimized, low cost and
high mass production possibility.

關鍵字(中)

★ 耦合效率
★ 透鏡
★ 矽基板
★ 微型光學平台

關鍵字(英)

★ coupling efficiency
★ Silicon-based
★ lens
★ micro-optical-bench

論文目次

摘要 I
目錄 IV
圖目錄 VI
第一章緒論
1-1 前言 1
1-2 微光學系統 3
1-3 論文內容與架構簡介 5
第二章相關理論介紹
2-1 光線追跡法(Ray Tracing) 6
2-2 高斯光傳遞理論 10
2-3 光束傳播法(Beam Propagation Method，BPM) 14
2-4 光纖的耦合 16
第三章矽基微柱狀透鏡之元件設計與分析
3-1 雷射二極體-光纖耦合模組之簡介 22
3-2 矽基微柱狀透鏡應用於光耦合系統之設計概念 26
3-3 設計流程與模擬結果 28
第四章元件製作與量測
4-1 矽基微柱狀透鏡之製作與規格量測 34
4-2 矽基微柱狀透鏡應用在雷射二極體-光纖耦合模組之製作 41
4-3 系統耦合效率之量測 42
4-4 量測結果之分析與討論 48
第五章結論與未來展望 55
參考文獻 56

參考文獻

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指導教授

張正陽(Jeng-Yang Chang)

審核日期

2006-7-25

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