離子助鍍對二氧化鈦光觸媒薄膜之研究

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姓名

劉又齊(Yiu-Chi Liu) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

離子助鍍對二氧化鈦光觸媒薄膜之研究
(Research on the photocatalytic of TiO2 films using ion-beam assisted deposition)

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摘要(中)

二氧化鈦在太陽能電池、消毒殺菌、分解污染物、表面自潔等方面皆有廣泛應用，但其使用波長侷限在紫外光。在親水性實驗中，本實驗使用解離電壓40V之離子助鍍得到比沒有離子助鍍有效的二氧化鈦光觸媒，接觸角在照射紫外光五分鐘後達到十度以下。並在氮氣離子助鍍的實驗中，為了研究氮氣在二氧化鈦膜中之鍵結，我們以XPS量測N訊號，並且測到396eV之氮氣鍵結訊號;並以可見光照射光觸媒，照射一個小時後，接觸角降至20度，並在兩個小時後下降到10度以下。

摘要(英)

TiO2 has diverse functional application in solar cell, sterilization, degradation of organic pollutants and self-cleaning, however, the photocatalytic activities of titanium dioxide can effectively work only under ultraviolet (UV) light irradiation. In the hydrophilicity experiment, we get better photocatalytic activities films in using ion assisted deposition under anode voltage 40V than without using ion assisted deposition, after the UV light treatment 5 minutes, the contact angle was less than 10 degree. Besides, in the N2 ion assisted deposition experiment, to investigate N state in TiO2-xNx, and found that, the XPS peak at 396eV of N binding signal is clear observed .After the visible light treatment for one hour, the contact angle was 20 degree, and after the visible light treatment for two hours, the contact angle was less than 10 degree.

關鍵字(中)

★ 二氧化鈦
★ 光觸媒
★ 離子助鍍

關鍵字(英)

★ TiO2
★ photocatalytic
★ ion-beam

論文目次

摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VI
表目錄 IX
第一章緒論 1
1-1前言 1
1-2研究動機 2
1-3論文架構 3
第二章原理 4
2-1二氧化鈦光觸媒介紹 4
2-2文獻回顧-不同掺雜及製備方式之比較 10
2-2-1耦合半導體 10
2-2-2金屬離子摻雜 10
2-2-3添加有機色素 12
2-2-4電漿處理 14
2-2-5非金屬離子摻雜 15
2-2-6結果比較 19
第三章實驗內容 20
3-1研究內容簡介 20
3-2研究步驟 20
3-3試樣選擇 20
3-4實驗設備及測量裝置 20
第四章實驗內容與結果 27
4-1第一階段無離子助鍍與將氧氣充入輔助離子源中 27
4-1-1離子助鍍比較調變解離電壓 27
4-1-2離子助鍍調變膜層厚度 31
4-1-3結果與討論 33
4-2第二階段將氮氣及氧氣充入靶上 34
4-2-1實驗內容 34
4-2-2結果與討論 38
4-3第三階段將氧氣及氮氣充入輔助離子源中 40
4-3-1實驗內容 40
4-3-2結果與討論 44
4-4 第四階段將氮氣充入輔助離子源中 45
4-4-1 實驗內容 45
4-4-2結果與討論 49
第五章結果與討論 51
第六章參考資料 54

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指導教授

李正中(Cheng-Chung Lee)

審核日期

2008-7-16

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