轉角中空光波導的研製

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姓名

張忠興(Chung-Hsing Chang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

轉角中空光波導的研製
(Study of Bent Hollow Waveguide)

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摘要(中)

在本論文中，我們運用二氧化矽與非晶向矽(amorphous silicon, a-Si)、二氧化矽(silicon dioxide, SiO2)與氮化矽(silicon nitride, Si3N4)兩種不同結構所組成的高反射之布拉格反射鏡(Bragg reflectors)，設計並製作中空光波導。設計過程中，我們將會利用能帶結構(band structure)與傳遞矩陣法(transfer matrix method)設計出膜層結構。設計中空波導後，我們將設計出兩種膜層結構組合而成的中空波導之轉角波導，並利用二維有限時域差分法(two-dimensional finite-difference time-domain method, 2-D FDTD)模擬彎角式中空光波導(angled hollow waveguides)及截角式中空光波導(cut-type 90o-hollow waveguides)。論文中，我們將會介紹波導的製作過程及其量測結果。

摘要(英)

In this study, we design and fabricate hollow waveguides by the Bragg reflectors. Moreover, we utilize two types of multilayer structures including silicon dioxide/amorphous silicon (SiO2/Si) and silicon dioxide/silicon nitride (SiO2/Si3N4) to form the Bragg reflectors. We design multilayer structures by the transfer matrix method. We design the bent hollow waveguides with two types of multilayer structures by using the two-dimensional finite-difference time-domain method (2-D FDTD) to simulate bent hollow waveguides with different bending designs. In the end, we introduce the fabrication process and measurement results.

關鍵字(中)

★ 轉角波導
★ 中空光波導
★ SU8光波導

關鍵字(英)

★ hollow optical waveguide
★ SU8 optical waveguide
★ bent waveguide

論文目次

摘要............................................................................................................................... I
Abstract ......................................................................................................................... II
謝誌.............................................................................................................................. III
目錄.............................................................................................................................. IV
圖目錄.......................................................................................................................... VI
表目錄.......................................................................................................................... IX
第1 章序論............................................................................................................ 1
1.1 光波導........................................................................................................ 2
1.1.1 中空光纖........................................................................................ 3
1.1.2 中空光波導.................................................................................... 4
1.2 本章結論與研究動機................................................................................ 7
第2 章光波導設計原理........................................................................................ 8
2.1 布洛赫波與色散關係................................................................................ 8
2.2 布拉格反射器與全方向反射鏡.............................................................. 12
2.3 傳遞矩陣.................................................................................................. 15
2.4 有限時域差分法...................................................................................... 19
2.5 結論.......................................................................................................... 24
第3 章光波導設計與模擬.................................................................................. 25
3.1 膜層設計.................................................................................................. 25
3.2 彎角式中空光波導模擬.......................................................................... 28
3.3 截角式中空光波導模擬.......................................................................... 30
3.4 模擬結論.................................................................................................. 33
第4 章中空光波導製程與量測結果分析.......................................................... 35
4.1 光波導製程與量測.................................................................................. 35
4.2 SU8 光波導 ............................................................................................. 37
4.2.1 彎角式SU8 光波導量測與分析 ................................................. 39
4.2.2 截角式SU8 光波導量測與分析 ................................................. 41
4.3 中空光波導.............................................................................................. 43
4.4 量測結論.................................................................................................. 49
第5 章總結與未來工作...................................................................................... 50
5.1 本論文總結.............................................................................................. 50
5.2 未來工作.................................................................................................. 51
附錄.............................................................................................................................. 53
參考文獻...................................................................................................................... 57

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指導教授

陳啟昌(Chii-Chang Chen)

審核日期

2009-7-16

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